JPS62173992A - Electrostatic attraction device - Google Patents

Abstract

PURPOSE:To facilitate the work to join rightly together in attracting and holding sheets, by independently actuating at least two electrostatic attraction elements which are arranged side by side. CONSTITUTION:After the first sheet is placed on the first electrostatic attraction element 2 and suitably positioned, the first switch 11 is closed and the DC voltage impressed. Then, this sheet is attracted and fixed by forcing the first electrostatic attraction element 2 to absorb and fix this sheet. The second sheet, which is to determined the alignment with the first sheet, is then placed on the second electrostatic attraction element 3. After the alignment is made with the first sheet, the second switch 12 is closed and the DC current impressed on the electrostatic attraction element 3 to act on the second sheet, which is attracted and fixed accordingly. Under this state the overlapped portion of the two sheets is either pasted or stuck with an adhesive tape.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an electrostatic chuck device, and more particularly to an electrostatic chuck device for holding a seat neck by suction.

(Prior Art) When copying large drawings, printed matter, etc., it is customary to divide them into two or more parts, copy them, and then stitch them together. This seaming is done by aligning the positions and pasting them together with glue or adhesive tape.
It is extremely difficult to do it manually.

(Objective of the Invention) Therefore, an object of the present invention is to provide an electrostatic chuck device that allows one person to easily perform the above-described work.

(Structure of the Invention) The electrostatic adsorption device according to the present invention has at least two electrostatic adsorption parts arranged adjacently so that their surfaces are on the same plane, and these at least two electrostatic adsorption parts can be operated independently. It is characterized by the following.

As is known from Japanese Utility Model Publication No. 54-41892, the electrostatic adsorption section is a group of electrodes in which a plurality of electrodes are placed on an insulating layer and a dielectric adsorption layer is superimposed thereon. It is sufficient to use one that applies a DC voltage to the adsorption layer and electrostatically adsorbs the object placed on the adsorption layer. In the device of the present invention, at least two electrostatic adsorption parts are arranged adjacently so that the surfaces thereof are on the same plane; however, two electrostatic adsorption plates may be arranged adjacently. It is convenient to form two sets of internal electrodes on a single electrostatic adsorption plate so that there are two electrostatic adsorption parts, since a continuous surface can be obtained. Furthermore, if these two electrostatic attraction parts are made of a transparent material and can be illuminated from below, alignment will be further facilitated.

(Embodiments) Hereinafter, an electrostatic adsorption device according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings.

The drawing is a schematic perspective view showing an electrostatic adsorption device according to an embodiment of the present invention.

In the figure, reference numeral 1 indicates an electrostatic adsorption device, and this electrostatic adsorption device 1 has a plate shape and includes first and second electrostatic adsorption parts 2 and 3. As shown in FIG. These first and second electrostatic adsorption parts 2 and 3 are arranged adjacently so that their surfaces are on the same plane, and each has a pair of combs made of a conductive material, for example, as shown in the figure. The toothed electrodes 4, 5, 6, and 7 are disposed on a common thermoplastic resin insulating support layer 8 so as to mesh with each other, and this is also protected by a common thermoplastic resin insulating protective layer 9. be.

In this embodiment, one electrode 4 and 6 of the first and second electrostatic attraction parts 2 and 3 are connected, and the other electrode 5 and 7 are shown as being independent from each other, but both electrodes are It may be independent. Further, the support layer 8 and the protective layer 9 may also be independent.

The connected electrodes 4 and 6 are directly connected to the DC power source 10, while the independent electrodes 5 and 7 are connected to the DC power source 10 via first and second switches 11 and 12, respectively. ing. Therefore, when only the first switch 11 is turned on, only the first electrostatic attraction section 2 acts, and when only the second switch 12 is turned on, only the second electrostatic attraction section 3 is activated. Note that in order to facilitate the work described later, it is desirable to provide a lamp 13 below the electrostatic chuck device 1.

To explain how to align the two sheets by 1δ using this device described above, first, the first
After placing the sheet and positioning it appropriately, turn the first switch 1.
1, a DC voltage is applied, the first electrostatic attraction section is activated, and this sheet is attracted and fixed. Next, a second sheet to be aligned with this is placed on the second electrostatic attraction section 3, and after alignment with the first sheet, the second switch 12 is turned on and this electrostatic attraction section 3 is placed. A DC voltage is applied to act on the second sheet to attract and fix the second sheet.

Once the two sheets are fixed in this way, it is extremely easy to glue the overlapping parts together, attach them with adhesive tape, or cut them off with a utility knife. If the sheet is separated, a precisely aligned and spliced sheet is obtained.

(Effects of the Invention) As described above, according to the present invention, it is possible for one person to easily produce accurately stitched large-sized drawings, printed matter, and the like.

[Brief explanation of drawings]

The drawing is a schematic perspective view showing an electrostatic adsorption device according to an embodiment of the present invention. ■... Electrostatic adsorption device, 2.3... Electrostatic adsorption unit, 4.5, 6.7... Electrode, 11.12... Switch .

Claims (1)

[Claims] An electrostatic chucking device characterized in that at least two electrostatic chucking units are arranged adjacently so that their surfaces are on the same plane, and the at least two electrostatic chucking units can be operated independently.