JPS62173005U - - Google Patents

Info

Publication number
JPS62173005U
JPS62173005U JP6126186U JP6126186U JPS62173005U JP S62173005 U JPS62173005 U JP S62173005U JP 6126186 U JP6126186 U JP 6126186U JP 6126186 U JP6126186 U JP 6126186U JP S62173005 U JPS62173005 U JP S62173005U
Authority
JP
Japan
Prior art keywords
rotating shaft
circuit
radial deviation
bridge circuit
pll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6126186U
Other languages
Japanese (ja)
Other versions
JPH051763Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986061261U priority Critical patent/JPH051763Y2/ja
Publication of JPS62173005U publication Critical patent/JPS62173005U/ja
Application granted granted Critical
Publication of JPH051763Y2 publication Critical patent/JPH051763Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係る回路の好適な実施例の回
路図、第２図はターボ分子ポンプの内部構成説明
図、第３図はセンサコイル説明図、第４図は従来
回路の説明図である。 １０Ａ，１０Ｂ……センサコイル、１２……ケ
ーブル、１４Ａ，１４Ｂ……抵抗、１６……共振
コンデンサ、１８Ａ，１８Ｂ……端子、２２……
回転軸、２４……差動増幅器、２６……位相比較
器、２８……ローパスフイルタ、３０……基本周
波数設定器、３２……演算器、３４……ＶＣＯ、
３６……増幅器、３８……抵抗。 Fig. 1 is a circuit diagram of a preferred embodiment of the circuit according to the present invention, Fig. 2 is an explanatory diagram of the internal configuration of a turbo molecular pump, Fig. 3 is an explanatory diagram of a sensor coil, and Fig. 4 is an explanatory diagram of a conventional circuit. be. 10A, 10B...Sensor coil, 12...Cable, 14A, 14B...Resistor, 16...Resonance capacitor, 18A, 18B...Terminal, 22...
Rotating shaft, 24... Differential amplifier, 26... Phase comparator, 28... Low pass filter, 30... Fundamental frequency setter, 32... Arithmetic unit, 34... VCO,
36...Amplifier, 38...Resistor.

Claims (1)

【実用新案登録請求の範囲】 コンデンサと回転軸に近接配置された一対のセ
ンサコイルとにより共振回路が形成され回転軸の
径方向偏位に応じた検出電圧が取り出されるブリ
ツジ回路と、 前記ブリツジ回路に対する供給電圧と電流とを
同一位相に保持するＰＬＬと、 を有することを特徴とする磁気軸受装置の回転軸
径方向偏位検出回路。[Claims for Utility Model Registration] A bridge circuit from which a resonant circuit is formed by a capacitor and a pair of sensor coils disposed close to a rotating shaft, and a detection voltage corresponding to a radial deviation of the rotating shaft is extracted; and the bridge circuit. A rotating shaft radial deviation detection circuit for a magnetic bearing device, comprising: a PLL that maintains a supply voltage and a current in the same phase;
JP1986061261U 1986-04-23 1986-04-23 Expired - Lifetime JPH051763Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986061261U JPH051763Y2 (en) 1986-04-23 1986-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986061261U JPH051763Y2 (en) 1986-04-23 1986-04-23

Publications (2)

Publication Number Publication Date
JPS62173005U true JPS62173005U (en) 1987-11-04
JPH051763Y2 JPH051763Y2 (en) 1993-01-18

Family

ID=30894432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986061261U Expired - Lifetime JPH051763Y2 (en) 1986-04-23 1986-04-23

Country Status (1)

Country Link
JP (1) JPH051763Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004204939A (en) * 2002-12-25 2004-07-22 Koyo Seiko Co Ltd Magnetic bearing unit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5127374A (en) * 1974-05-10 1976-03-06 Control Data Corp INDAKUTANSUKEI
JPS55107903A (en) * 1979-02-09 1980-08-19 Ono Sokki Co Ltd Measuring method of eccentricity

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5127374A (en) * 1974-05-10 1976-03-06 Control Data Corp INDAKUTANSUKEI
JPS55107903A (en) * 1979-02-09 1980-08-19 Ono Sokki Co Ltd Measuring method of eccentricity

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004204939A (en) * 2002-12-25 2004-07-22 Koyo Seiko Co Ltd Magnetic bearing unit

Also Published As

Publication number Publication date
JPH051763Y2 (en) 1993-01-18

Similar Documents

Publication Publication Date Title
JPS62173005U (en)
JPH0249397U (en)
JPS6123805Y2 (en)
JPS60141683U (en) small step motor
JPH03123926U (en)
JPS6199076U (en)
JPH0355103Y2 (en)
JPS6191505A (en) Apparatus for detecting opening degree of throttle valve of internal combustion engine
JPS62117513U (en)
JPH0449806U (en)
JPS5931304B2 (en) brushless motor
JPS5847182U (en) flux gate magnetometer
JPH0423819U (en)
JPH0235978U (en)
JPS5941085U (en) brushless motor
JPH02133689U (en)
JPS60131867U (en) AC motor rotation detection sensor
JPS6396416U (en)
JPH01157600U (en)
JPS6333373U (en)
JPS59195982U (en) eddy current fittings
JPH02120006U (en)
JPH01149018U (en)
JPS61105904U (en)
JPS6194769U (en)