JPS62172147U - - Google Patents
Info
- Publication number
- JPS62172147U JPS62172147U JP6000086U JP6000086U JPS62172147U JP S62172147 U JPS62172147 U JP S62172147U JP 6000086 U JP6000086 U JP 6000086U JP 6000086 U JP6000086 U JP 6000086U JP S62172147 U JPS62172147 U JP S62172147U
- Authority
- JP
- Japan
- Prior art keywords
- deposited film
- chamber
- vibrating
- producing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6000086U JPS62172147U (bs) | 1986-04-21 | 1986-04-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6000086U JPS62172147U (bs) | 1986-04-21 | 1986-04-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62172147U true JPS62172147U (bs) | 1987-10-31 |
Family
ID=30892021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6000086U Pending JPS62172147U (bs) | 1986-04-21 | 1986-04-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62172147U (bs) |
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1986
- 1986-04-21 JP JP6000086U patent/JPS62172147U/ja active Pending