JPS62172147U - - Google Patents
Info
- Publication number
- JPS62172147U JPS62172147U JP6000086U JP6000086U JPS62172147U JP S62172147 U JPS62172147 U JP S62172147U JP 6000086 U JP6000086 U JP 6000086U JP 6000086 U JP6000086 U JP 6000086U JP S62172147 U JPS62172147 U JP S62172147U
- Authority
- JP
- Japan
- Prior art keywords
- deposited film
- chamber
- vibrating
- producing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例の断面図、第２図は
従来例の断面図である。
１３……上チヤンバー、３３……下チヤンバー
、４１……振動源、４２……振動端子。
FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional example. 13... Upper chamber, 33... Lower chamber, 41... Vibration source, 42... Vibration terminal.
Claims (1)
れを覆うチヤンバーに振動させる機構を設けたこ
とを特徴とする堆積膜生成装置。 What is claimed is: 1. A deposited film generating device for producing a deposited film, characterized in that a chamber covering the chamber is provided with a mechanism for vibrating it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6000086U JPS62172147U (en) | 1986-04-21 | 1986-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6000086U JPS62172147U (en) | 1986-04-21 | 1986-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62172147U true JPS62172147U (en) | 1987-10-31 |
Family
ID=30892021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6000086U Pending JPS62172147U (en) | 1986-04-21 | 1986-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62172147U (en) |
-
1986
- 1986-04-21 JP JP6000086U patent/JPS62172147U/ja active Pending