JPS6217063U - - Google Patents

Info

Publication number
JPS6217063U
JPS6217063U JP10896085U JP10896085U JPS6217063U JP S6217063 U JPS6217063 U JP S6217063U JP 10896085 U JP10896085 U JP 10896085U JP 10896085 U JP10896085 U JP 10896085U JP S6217063 U JPS6217063 U JP S6217063U
Authority
JP
Japan
Prior art keywords
skimmer
plasma
orifice
low
pressure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10896085U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0323653Y2 (US06826419-20041130-M00005.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10896085U priority Critical patent/JPH0323653Y2/ja
Publication of JPS6217063U publication Critical patent/JPS6217063U/ja
Application granted granted Critical
Publication of JPH0323653Y2 publication Critical patent/JPH0323653Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP10896085U 1985-07-17 1985-07-17 Expired JPH0323653Y2 (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10896085U JPH0323653Y2 (US06826419-20041130-M00005.png) 1985-07-17 1985-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10896085U JPH0323653Y2 (US06826419-20041130-M00005.png) 1985-07-17 1985-07-17

Publications (2)

Publication Number Publication Date
JPS6217063U true JPS6217063U (US06826419-20041130-M00005.png) 1987-01-31
JPH0323653Y2 JPH0323653Y2 (US06826419-20041130-M00005.png) 1991-05-23

Family

ID=30986628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10896085U Expired JPH0323653Y2 (US06826419-20041130-M00005.png) 1985-07-17 1985-07-17

Country Status (1)

Country Link
JP (1) JPH0323653Y2 (US06826419-20041130-M00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6437227U (US06826419-20041130-M00005.png) * 1987-08-24 1989-03-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6437227U (US06826419-20041130-M00005.png) * 1987-08-24 1989-03-07

Also Published As

Publication number Publication date
JPH0323653Y2 (US06826419-20041130-M00005.png) 1991-05-23

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