JPS62170628U - - Google Patents

Info

Publication number
JPS62170628U
JPS62170628U JP5923486U JP5923486U JPS62170628U JP S62170628 U JPS62170628 U JP S62170628U JP 5923486 U JP5923486 U JP 5923486U JP 5923486 U JP5923486 U JP 5923486U JP S62170628 U JPS62170628 U JP S62170628U
Authority
JP
Japan
Prior art keywords
impurities
forming
tube
diffusion
semiconductor wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5923486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5923486U priority Critical patent/JPS62170628U/ja
Publication of JPS62170628U publication Critical patent/JPS62170628U/ja
Pending legal-status Critical Current

Links

JP5923486U 1986-04-18 1986-04-18 Pending JPS62170628U (US06589383-20030708-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5923486U JPS62170628U (US06589383-20030708-C00041.png) 1986-04-18 1986-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5923486U JPS62170628U (US06589383-20030708-C00041.png) 1986-04-18 1986-04-18

Publications (1)

Publication Number Publication Date
JPS62170628U true JPS62170628U (US06589383-20030708-C00041.png) 1987-10-29

Family

ID=30890536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5923486U Pending JPS62170628U (US06589383-20030708-C00041.png) 1986-04-18 1986-04-18

Country Status (1)

Country Link
JP (1) JPS62170628U (US06589383-20030708-C00041.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008244088A (ja) * 2007-03-27 2008-10-09 Naoetsu Electronics Co Ltd 熱処理方法及び熱処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008244088A (ja) * 2007-03-27 2008-10-09 Naoetsu Electronics Co Ltd 熱処理方法及び熱処理装置

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