JPS62170627U - - Google Patents
Info
- Publication number
- JPS62170627U JPS62170627U JP5832186U JP5832186U JPS62170627U JP S62170627 U JPS62170627 U JP S62170627U JP 5832186 U JP5832186 U JP 5832186U JP 5832186 U JP5832186 U JP 5832186U JP S62170627 U JPS62170627 U JP S62170627U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- metal material
- carbon
- utility
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007769 metal material Substances 0.000 claims description 3
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5832186U JPS62170627U (is) | 1986-04-17 | 1986-04-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5832186U JPS62170627U (is) | 1986-04-17 | 1986-04-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62170627U true JPS62170627U (is) | 1987-10-29 |
Family
ID=30888790
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5832186U Pending JPS62170627U (is) | 1986-04-17 | 1986-04-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62170627U (is) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH029425U (is) * | 1988-07-01 | 1990-01-22 |
-
1986
- 1986-04-17 JP JP5832186U patent/JPS62170627U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH029425U (is) * | 1988-07-01 | 1990-01-22 |