JPS6217061U - - Google Patents
Info
- Publication number
- JPS6217061U JPS6217061U JP10914485U JP10914485U JPS6217061U JP S6217061 U JPS6217061 U JP S6217061U JP 10914485 U JP10914485 U JP 10914485U JP 10914485 U JP10914485 U JP 10914485U JP S6217061 U JPS6217061 U JP S6217061U
- Authority
- JP
- Japan
- Prior art keywords
- panel
- fluorescent surface
- exposure
- vertical
- directions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
第１図は本考案の螢光面露光装置の一実施例を
示す外観斜視図、第２図及び第３図はそれぞれ螢
光面パネルとマスクパターンの位置合せの方法を
説明するための図、第４図は従来の螢光面露光装
置の欠点を説明するための図である。
５……露光架台、７……第１板体、８……第２
板体、９……螢光面パネル、１４，１５……テレ
ビカメラ、１６……鏡体。
FIG. 1 is an external perspective view showing an embodiment of the fluorescent surface exposure apparatus of the present invention, and FIGS. 2 and 3 are diagrams for explaining the method of aligning the fluorescent surface panel and the mask pattern, respectively. FIG. 4 is a diagram for explaining the drawbacks of the conventional fluorescent surface exposure apparatus. 5... Exposure mount, 7... First plate, 8... Second
Plate body, 9... fluorescent surface panel, 14, 15... television camera, 16... mirror body.
Claims (1)
動可能に設けられた載置部上にマスクパターンを
通過した露光光源の光が照射される螢光面パネル
を配置するとともに、前記螢光面パネルの回転に
よつて生じるモアレ縞を前記パネルの面に対して
略直角方向から観察可能に配置された鏡体と、前
記螢光面パネルの縦横方向の位置合せの観察を行
なうモニター用テレビカメラを備えた螢光面露光
装置。 A fluorescent surface panel that is irradiated with light from an exposure light source that has passed through a mask pattern is disposed on a mounting section that is movable in vertical and horizontal directions and rotational directions on the upper plate of the exposure mount, and a mirror body arranged to be able to observe moiré fringes caused by rotation of the panel from a direction substantially perpendicular to the surface of the panel; and a monitor television camera for observing the vertical and horizontal alignment of the fluorescent surface panel. A fluorescent surface exposure device equipped with
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10914485U JPS6217061U (en) | 1985-07-16 | 1985-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10914485U JPS6217061U (en) | 1985-07-16 | 1985-07-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6217061U true JPS6217061U (en) | 1987-01-31 |
Family
ID=30986977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10914485U Pending JPS6217061U (en) | 1985-07-16 | 1985-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6217061U (en) |
-
1985
- 1985-07-16 JP JP10914485U patent/JPS6217061U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6217061U (en) | ||
| JPS63111070U (en) | ||
| JPH02107011U (en) | ||
| JPH0316165U (en) | ||
| JPS63177828U (en) | ||
| JPS62179727U (en) | ||
| JPH0375426U (en) | ||
| JPS6081508U (en) | dental x-ray equipment | |
| JPH0412629U (en) | ||
| JPH0241252U (en) | ||
| JPS6249232U (en) | ||
| JPH02101209U (en) | ||
| JPH0317505U (en) | ||
| JPS59159083U (en) | Display device position adjustment device | |
| JPH03106411U (en) | ||
| JPS6436849U (en) | ||
| JPS6341135U (en) | ||
| JPS59114678U (en) | Material presentation device | |
| JPS62195132U (en) | ||
| JPS63120242U (en) | ||
| JPS62199812U (en) | ||
| JPH0270427U (en) | ||
| JPS62122336U (en) | ||
| JPH01120114U (en) | ||
| JPH0179034U (en) |