JPS62170547U - - Google Patents
Info
- Publication number
- JPS62170547U JPS62170547U JP5983386U JP5983386U JPS62170547U JP S62170547 U JPS62170547 U JP S62170547U JP 5983386 U JP5983386 U JP 5983386U JP 5983386 U JP5983386 U JP 5983386U JP S62170547 U JPS62170547 U JP S62170547U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- cleaning
- airtightness
- gas
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims 4
- 238000007689 inspection Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5983386U JPH0247472Y2 (ru) | 1986-04-21 | 1986-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5983386U JPH0247472Y2 (ru) | 1986-04-21 | 1986-04-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62170547U true JPS62170547U (ru) | 1987-10-29 |
| JPH0247472Y2 JPH0247472Y2 (ru) | 1990-12-13 |
Family
ID=30891696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5983386U Expired JPH0247472Y2 (ru) | 1986-04-21 | 1986-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247472Y2 (ru) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0254140A (ja) * | 1988-07-20 | 1990-02-23 | Expertek Inc | 流体包有室の漏れを検出する装置および方法 |
| JP2009071570A (ja) * | 2007-09-13 | 2009-04-02 | Epson Toyocom Corp | 圧電振動子の気密検査装置及び気密検査方法 |
| JP2009198431A (ja) * | 2008-02-25 | 2009-09-03 | Kayaba Ind Co Ltd | 漏れ検査装置および漏れ検査方法 |
-
1986
- 1986-04-21 JP JP5983386U patent/JPH0247472Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0254140A (ja) * | 1988-07-20 | 1990-02-23 | Expertek Inc | 流体包有室の漏れを検出する装置および方法 |
| JP2009071570A (ja) * | 2007-09-13 | 2009-04-02 | Epson Toyocom Corp | 圧電振動子の気密検査装置及び気密検査方法 |
| JP2009198431A (ja) * | 2008-02-25 | 2009-09-03 | Kayaba Ind Co Ltd | 漏れ検査装置および漏れ検査方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0247472Y2 (ru) | 1990-12-13 |