JPS62169789U - - Google Patents
Info
- Publication number
- JPS62169789U JPS62169789U JP1986057448U JP5744886U JPS62169789U JP S62169789 U JPS62169789 U JP S62169789U JP 1986057448 U JP1986057448 U JP 1986057448U JP 5744886 U JP5744886 U JP 5744886U JP S62169789 U JPS62169789 U JP S62169789U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- laser beam
- laser
- optical path
- reflected light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986057448U JPS62169789U (el) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986057448U JPS62169789U (el) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62169789U true JPS62169789U (el) | 1987-10-28 |
Family
ID=30887157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986057448U Pending JPS62169789U (el) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62169789U (el) |
-
1986
- 1986-04-18 JP JP1986057448U patent/JPS62169789U/ja active Pending