JPS62169462U - - Google Patents
Info
- Publication number
- JPS62169462U JPS62169462U JP5743586U JP5743586U JPS62169462U JP S62169462 U JPS62169462 U JP S62169462U JP 5743586 U JP5743586 U JP 5743586U JP 5743586 U JP5743586 U JP 5743586U JP S62169462 U JPS62169462 U JP S62169462U
- Authority
- JP
- Japan
- Prior art keywords
- ray
- sample
- detector
- electron microscope
- characteristic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 3
- 238000002441 X-ray diffraction Methods 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5743586U JPS62169462U (cs) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5743586U JPS62169462U (cs) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62169462U true JPS62169462U (cs) | 1987-10-27 |
Family
ID=30887132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5743586U Pending JPS62169462U (cs) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62169462U (cs) |
-
1986
- 1986-04-18 JP JP5743586U patent/JPS62169462U/ja active Pending