JPS62169213A - Positioning device - Google Patents

Abstract

PURPOSE:To position a mobile part accurately by providing a temperature measuring means in one side of a driving part of the mobile part to correct the positioning error of the mobile part due to the variation of temperature. CONSTITUTION:A driving part 2 consisting of a ball screw 2a, a servo motor 2b, etc., is set to a freely movable table (mobile part) 1, and the motor 2b is provided with a position detecting part 3 to detect the extent of displacement of the motor. A control part 4 is connected to the motor 2b, and the direction and the extent of rotation are controlled properly to position the table 1 to an objective position. In this case, a temperature sensor (temperature measuring means) 6 is set to the motor 2b, and the variation of temperature with time detected by this sensor is inputted to the control part 4 through an arithmetic part 7. Since an actual accurate position of the table 1 obtained by correction of the temperature sensor 6 is compared with the objective position, the table 1 can be positioned accurately.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a positioning technique, particularly to a technique that is effective when applied to a semi-closed positioning technique.

[Prior art] Semi-closed positioning technology is described in "Automation Technology", Vol. 1, published by Industrial Research Institute Co., Ltd., 1984.
It is described in Vol. 6, No. 9, page 28 onwards.

The outline is that the rotational motion of the servo motor is converted into linear displacement of the table using a ball screw, and the amount of table displacement is indirectly detected from the amount of rotation of the servo motor and fed back to the control mechanism. It is of structure.

[Problems to be Solved by the Invention] However, the above-mentioned semi-closed positioning technology has the disadvantage that it cannot prevent the positioning accuracy from decreasing due to dimensional changes in the ball screw or table due to heat generated by the servo motor, etc. be.

An object of the present invention is to provide a positioning technique that allows accurate positioning of a movable part.

The above and other objects and novel features of the present invention include:
It will become clear from the description herein and the accompanying drawings.

[Means for Solving the Problems] A brief overview of typical inventions disclosed in this application is as follows.

That is, a movable part, a drive part that displaces the movable part,
A positioning device comprising a position detection section that detects the position of the movable section via the drive section, and a control section that controls displacement of the movable section by the drive section based on information from the position detection section, At least one of the movable part and the drive part,
A temperature measuring means is provided, and errors in the positioning of the movable portion due to temperature changes are corrected based on the temperature measurement by the temperature measuring means.

The present invention also provides a movable section, a drive section that displaces the movable section, a position detection section that detects the position of the movable section via the drive section, and a position detection section that detects the position of the movable section based on information from the position detection section. A positioning device comprising a control section that controls the displacement of the movable section by the drive section, wherein at least one of the movable section and the drive section is provided with a strain measuring means, and based on the strain measurement by the strain measuring means, the displacement due to temperature change is determined. Errors in the positioning of the movable part due to dimensional changes of the movable part and the drive part are corrected.

[Function] According to the above-described means, the occurrence of positioning errors due to temperature changes is avoided in positioning the movable part, and, for example, in semi-closed positioning technology, accurate positioning of the movable part can be performed. can.

[Embodiment 1] FIG. 1 is an explanatory diagram showing the main parts of a positioning device that is an embodiment of the present invention.

The table 1 (movable part) is provided so as to be movable in the horizontal direction in the figure by a predetermined guide mechanism (not shown).
For example, a structure in which a driving unit 2 consisting of a ball screw 2a and a servo motor 2b for rotating the ball screw 2a in a predetermined direction is installed, and the rotational displacement of the ball screw 2a is converted into a linear displacement of the table 1. It is said that

The servo motor 2b is provided with a position detection section 3 consisting of, for example, a rotary encoder.
The configuration is such that the amount of linear displacement of the table 1 from a predetermined reference position, that is, the position of the table 1, is indirectly detected from the amount of rotation of the ball screw 2a rotated by the ball screw 2a.

A control section 4 is connected to the servo motor 2b, and controls the direction and amount of rotation of the servo motor 2b as appropriate based on the position information of the table 1 fed back from the position detection section 3. , the table 1 is configured as a semi-closed system in which the table 1 is positioned at a predetermined target position.

Further, a positioning position setting section 5 is connected to the control section 4, and the control section 4 is configured to receive a desired positioning position of the table 1 set from the outside.

In this case, the servo motor 2b is equipped with a temperature sensor 6 (temperature measuring means), and is configured to detect temperature changes over time of the servo motor 2b etc. detected by the temperature sensor 6. There is.

Further, the temperature sensor 6 detects the amount of displacement of a predetermined portion of the table 1 due to thermal deformation of the ball screw 2a and the table 1 caused by a temperature change of the servo motor 2b, for example. , is connected to the control unit 4 via a calculation unit 7 that calculates based on data such as the correlation between temperature changes of the servo motor 2b and thermal deformation of the ball screw 2a, table 1, etc.

Then, in the control section 4, the position of the table 1 indirectly obtained from the position detection section 3 is corrected according to the amount of displacement of a predetermined portion of the table 1 obtained from the temperature sensor 6 via the calculation section 7. The structure is said to be

The operation of this embodiment will be explained below.

First, the positioning position setting section 5 holds the target positioning position of the table 1 inputted from the outside.

Next, the control unit 4 corrects the position of the table 1 indirectly obtained from the position detection unit 3 according to the amount of displacement at a predetermined portion of the table 1 obtained from the temperature sensor 6 via the calculation unit 7. By comparing the actual accurate position obtained by the process and the target positioning position of the table 1 commanded by the positioning position setting section 5, and appropriately rotating the servo motor 2b in the direction where both coincide, the ball can be adjusted. screw 2a
It is not affected by thermal deformation of table 1, etc.
The table 1 is accurately positioned to the desired position.

As described above, according to this embodiment, the following effects can be obtained.

(1) The temperature of the table 1 due to thermal deformation of the ball screw 2a and table 1 due to temperature changes in the servo motor 2b, etc., detected from the temperature sensor 6 attached to the servo motor 2b via the calculation unit 7. Since the position of the table 1 indirectly detected by the position detection unit 3 is corrected by the amount of displacement at a predetermined portion, the ball screw 2a
It is not affected by thermal deformation of table 1, etc.
The effect is that the table 1 is accurately positioned at the target position.

(2) As a result of (11) above, it is possible to achieve the effect that high positioning accuracy similar to the closed method can be achieved using a simple semi-closed method.

(3) As a result of (1), the bonding accuracy can be improved by using it for positioning a lead frame (not shown), etc., in wire bonding in the manufacture of semiconductor devices, for example.

[Embodiment 2] FIG. 2 is an explanatory diagram showing the main parts of a positioning device that is another embodiment of the present invention.

In this embodiment, the table 1 and the ball screw 2a
A strain gauge 8a and a strain gauge 8b (strain measuring means) are respectively attached to a part of the table 1 and the ball screw 2.
This embodiment differs from the first embodiment in that it is configured so that strain caused by thermal deformation of a is directly detected.

That is, the amount of displacement at a predetermined portion of the table 1 caused by the strain detected by the strain gauges 8a and 8b is calculated via the calculation unit 9 and then transmitted to the control unit 4, The position of table l that is indirectly detected in is corrected, and the position of table l and ball screw 2 is corrected.
Accurate positioning of the table 1 is performed without being affected by thermal deformation such as a.

As described above, according to this embodiment, the following effects can be obtained.

(1) Ball screw 2a, table 1, etc., which are detected via calculation unit 9 from strain directly detected by strain gauges 8a and 8b attached to parts of table 1 and ball screw 2a, respectively. The position of the table 1 indirectly detected by the position detection unit 3 is corrected by the amount of displacement at a predetermined portion of the table l due to thermal deformation of the ball screw 2a, the table 1, etc. The effect is that the table 1 can be positioned more accurately at the target position without being affected by the

(2) As a result of the above-mentioned fil, it is possible to achieve the effect that high positioning accuracy similar to the closed method can be achieved using a simple semi-closed method.

(3) As a result of (1), the bonding accuracy can be improved by using it for positioning a lead frame (not shown), etc., in wire bonding in the manufacture of semiconductor devices, for example.

Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. Nor. For example, the movable direction of the table 1 is not limited to one direction, but may have a structure in which displacement in two or three mutually orthogonal directions is controlled simultaneously.

Further, the drive section 2 for displacing the table 1 is not limited to one that converts the rotational displacement of the servo motor 2b into a linear displacement via the ball screw 2a'fj-, but may have a structure using a linear motor or the like.

The above explanation has mainly been about the application of the invention made by the present inventor to positioning technology, which is the background application field, but the invention is not limited to this, and the invention is not limited to this, and the invention is not limited to this. It can be widely applied to any technology that requires

[Effects of the Invention] The effects obtained by typical inventions disclosed in this application are briefly described below.

That is, a movable part, a drive part that displaces the movable part,
A positioning device comprising a position detection section that detects the position of the movable section via the drive section, and a control section that controls displacement of the movable section by the drive section based on information from the position detection section, At least one of the movable part and the drive part is provided with a temperature measuring means, and the configuration is configured such that an error in positioning of the movable part due to temperature change is corrected based on temperature measurement by the temperature measuring means. Therefore, when positioning the movable part using, for example, a semi-closed system, positioning errors due to temperature changes are avoided, and the movable part can be accurately positioned.

The present invention also provides a movable section, a drive section that displaces the movable section, a position detection section that detects the position of the movable section via the drive section, and a position detection section that detects the position of the movable section based on information from the position detection section. A positioning device comprising a control section that controls displacement of the movable section by a drive section, wherein at least one of the movable section and the drive section is provided with a strain measuring means, and based on strain measurement by the strain measuring means, The structure is configured to correct errors in positioning of the movable part due to dimensional changes in the movable part and the drive part due to temperature changes. This avoids the occurrence of positioning errors and enables accurate positioning of the movable part.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram showing the main parts of a positioning device which is one embodiment of the present invention, and FIG. 2 is an explanatory diagram showing the main parts of a positioning device which is another embodiment of the invention. 1... Table (movable part), 2... Drive part, 2a.
... Ball screw, 2b... Servo motor, 3... Position detection section, 4... Control section, 5... Positioning position setting section, 6... Temperature sensor (temperature measurement means), 7. ...Arithmetic unit, 8a, 8b...Strain gauge (strain measurement means), 9.
...Arithmetic section.

Claims (1)

[Scope of Claims] 1. A movable part, a drive part that displaces the movable part, and a position detection part that detects the position of the movable part via the drive part;
and a control section that controls displacement of the movable section by the drive section based on information from the position detection section, wherein at least one of the movable section and the drive section is provided with temperature measuring means. A positioning device characterized in that an error in the positioning of the movable portion due to a temperature change is corrected based on the temperature measurement by the temperature measuring means. 2. The positioning device according to claim 1, wherein the movable part is a table, and the drive part is composed of a servo motor and a ball screw. 3. a movable part, a drive part that displaces the movable part, and a position detection part that detects the position of the movable part via the drive part;
and a control section that controls displacement of the movable section by the drive section based on information from the position detection section, wherein at least one of the movable section and the drive section is provided with strain measuring means. A positioning device characterized in that an error in positioning the movable portion due to a change in dimensions of the movable portion and the driving portion due to a temperature change is corrected based on the strain measurement by the strain measuring means. 4. The positioning device according to claim 3, wherein the movable part is a table, and the drive part is composed of a servo motor and a ball screw.