JPS61297058A - Positioning apparatus - Google Patents

Positioning apparatus

Info

Publication number
JPS61297058A
JPS61297058A JP13714785A JP13714785A JPS61297058A JP S61297058 A JPS61297058 A JP S61297058A JP 13714785 A JP13714785 A JP 13714785A JP 13714785 A JP13714785 A JP 13714785A JP S61297058 A JPS61297058 A JP S61297058A
Authority
JP
Japan
Prior art keywords
ball screw
temperature
movable table
thermal deformation
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13714785A
Other languages
Japanese (ja)
Inventor
Haruhiko Miyamoto
治彦 宮本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP13714785A priority Critical patent/JPS61297058A/en
Publication of JPS61297058A publication Critical patent/JPS61297058A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/182—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by the machine tool function, e.g. thread cutting, cam making, tool direction control
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49206—Compensation temperature, thermal displacement, use measured temperature
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/50—Machine tool, machine tool null till machine tool work handling
    • G05B2219/50019—Zero, null offset

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Automatic Control Of Machine Tools (AREA)
  • Machine Tool Positioning Apparatuses (AREA)

Abstract

PURPOSE:To permit the high-precision positioning even with the thermal deformation of a ball screw and the temperature variation of the apparatus by carrying out correction by detecting the shift quantity of the ball screw and the temperature of the apparatus in the positioning apparatus such as an X-Y table. CONSTITUTION:A microcomputer 9 reads-in the transfer instruction value supplied from a position instruction device 1, and also reads-in the shift quantity of a ball screw 12 for a board 10 which is supplied from a noncontact shift detector 2 and the temperature of the apparatus which is supplied from a temperature detector 3 through an A/D converter 8. The microcomputer 9 calculates the position deflection due to the thermal deformation of a movable table 11 on the basis of the signals of the above-described devices, and further obtains the shift quantity at the transfer instruction position, performs correction calculation, and then drives a motor 7 to the corrected transfer instruction value through a motor driving part 6, and shifts the movable table 11. Thus, the movable table can be shifted to the correct position.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、ＸＹテーブルなどのボールねじを使用した位
置決め装置の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement in a positioning device using a ball screw, such as an XY table.

〔発明の概略〕[Summary of the invention]

本発明は、ボールねじを用いて位置決めする装置におい
て、ボールねじの変形と装置温度を検出し、変形量から
位置補正を行なうことにより、熱変形があったとしても
精度よく位置決めが行なえるようにしたものである。The present invention detects the deformation of the ball screw and the temperature of the device in a positioning device using a ball screw, and performs position correction based on the amount of deformation, so that accurate positioning can be performed even if there is thermal deformation. This is what I did.

〔従来の技術〕[Conventional technology]

従来、ボールねじを用いて位置決めする装置においては
油温調整装置を備えてボールねじを冷却させると同時に
、ねじ軸に予圧をかけて引張応力を生じさせ、ねじ軸の
発熱による伸びを内部応力の変化によりて吸収してしま
い、熱変形による位置決め誤差を小さくするようにして
いた。Conventionally, in positioning devices using ball screws, an oil temperature adjustment device is installed to cool the ball screw, and at the same time, a preload is applied to the screw shaft to generate tensile stress. The positioning error caused by thermal deformation is minimized.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、従来のボールねじを用いた位置決め装置は、予
圧のために変形しない十分な剛性が必要でありかつ、装
置全体の熱変形による位置決め誤差をなくすることがで
きないという問題を有していた。However, conventional positioning devices using ball screws require sufficient rigidity to avoid deformation due to preload, and have the problem that positioning errors due to thermal deformation of the entire device cannot be eliminated.

そこで、本発明はこのような問題点を解決するためにな
されたもので、ボールねじや装置全体が熱変形したとし
ても誤差のない高精度な位置決めが行なえることを目的
としている。The present invention has been made to solve these problems, and its object is to enable highly accurate positioning without errors even if the ball screw or the entire device is thermally deformed.

〔問題を解決するための手段〕[Means to solve the problem]

本発明の可動テーブルの位置決め装置は、第１図に示す
ような制御部で構成されており、１は位置指示器で、ボ
ールねじの変形を検出する非接触変位検出器２と装置の
温度を検出する温度検出器３と、非接触変位検出器２と
温度検出器３からの信号を入力装置の変形量を検出する
手段４と、変形量から位置補正を行なう位置補正手段５
を装置内に設は位置決めすることを特徴とする。The movable table positioning device of the present invention is composed of a control section as shown in FIG. A temperature detector 3 for detecting the temperature, a means 4 for detecting the amount of deformation of the device inputting signals from the non-contact displacement detector 2 and the temperature sensor 3, and a position correcting means 5 for correcting the position from the amount of deformation.
The device is characterized in that it is installed and positioned within the device.

〔実施例〕〔Example〕

以下本発明の実施例を図によって説明する。第２図のブ
ロック図に示すようにマイクロコンピュータ９および周
辺回路からできている制御部と、第３図に示すモータ７
により動作する可動部から構成されている。Embodiments of the present invention will be described below with reference to the drawings. A control section consisting of a microcomputer 9 and peripheral circuits as shown in the block diagram of FIG. 2, and a motor 7 shown in FIG.
It is composed of movable parts that operate by.

第３図は可動部の断面図で図のような構造になっており
、モータ７の回転はボールねじ１２に伝えられナツト１
５を介して可動テーブル１１を目的の位置まで移動させ
る。この時ボールねじ１２がナツト１５との摩擦によっ
て熱変形を起した場合、ボールねじ１２はアンギュラ玉
軸受１４によって支持されている位置を基準として玉軸
受１３の方向に伸びる。この熱変形による伸びは非接触
変位検出器２によって検出される。非接触変位検出器２
によって検出される変位量は台１ｏとボールねじ１２の
相対的な変位量であるため、さらに台１０に取り付けら
れた温度検出器３によって装置の温度を検出し装置全体
の熱変形量を検出し、この装置全体の熱変形量に変位置
を加えることによって可動テーブル１１の熱変形による
位置ずれ誤差を検出する。Figure 3 is a cross-sectional view of the movable part, which has the structure shown in the figure.The rotation of the motor 7 is transmitted to the ball screw 12, and the nut 1
5 to move the movable table 11 to the desired position. At this time, when the ball screw 12 is thermally deformed due to friction with the nut 15, the ball screw 12 extends in the direction of the ball bearing 13 from the position supported by the angular ball bearing 14 as a reference. The elongation due to this thermal deformation is detected by the non-contact displacement detector 2. Non-contact displacement detector 2
Since the amount of displacement detected by is the relative amount of displacement between the table 1o and the ball screw 12, the temperature of the device is further detected by the temperature detector 3 attached to the table 10, and the amount of thermal deformation of the entire device is detected. By adding the displacement to the amount of thermal deformation of the entire device, a positional displacement error due to thermal deformation of the movable table 11 is detected.

第２図のブロック図と第４図の７０−チャートに従って
全体の動作を説明する。The overall operation will be explained according to the block diagram in FIG. 2 and the 70-chart in FIG. 4.

位置指示器１により移動指示が出されると（ステップ１
６）、マイクロコンピュータ９は移動指示値を読み込む
（ステップ１７）。同時に、Ａ／Ｄ変換器８を介して接
続されている非接触変位検出器２から台１０に対するボ
ールねじ１２の変位量と、Ａ／Ｄ変換器８を介して接続
されている温度検出器５から温度が検出され２連符号と
してマイクロコンピュータに読込まれる（ステップ１８
．１９）。変位信号と温度信号から可動テーブル１１の
熱変形による位置ずれ誤差を計算する（ステップ２０）
。この位置ずれに基づいて移動指示位置での変位量を計
算する（ステップ２１）。移動指示値より移動指示位置
での変位量を減じることによって補正計算を行なう（ス
テップ２２）。When a movement instruction is issued by the position indicator 1 (step 1
6), the microcomputer 9 reads the movement instruction value (step 17). At the same time, the amount of displacement of the ball screw 12 with respect to the base 10 is detected from the non-contact displacement detector 2 connected via the A/D converter 8, and the temperature sensor 5 is connected via the A/D converter 8. The temperature is detected and read into the microcomputer as a double code (step 18).
．． 19). Calculate the positional deviation error due to thermal deformation of the movable table 11 from the displacement signal and temperature signal (step 20)
. Based on this positional deviation, the amount of displacement at the designated movement position is calculated (step 21). A correction calculation is performed by subtracting the amount of displacement at the movement instruction position from the movement instruction value (step 22).

この補正された移動指示値までモータ駆動器６を動作さ
せ可動テーブル１１を指示された位置まで移動させる（
ステップ２５）。The motor driver 6 is operated to this corrected movement instruction value to move the movable table 11 to the instructed position (
Step 25).

このようにボールねじが変形したり、装置の基原が変っ
て熱変形したとしても補正され、可動テーブルは正確な
位置に移動することができる。In this way, even if the ball screw is deformed or thermal deformation occurs due to a change in the basis of the device, it is corrected and the movable table can be moved to an accurate position.

〔発明の効果〕〔Effect of the invention〕

本発明は、上述のようにボールねじの変位量と装置の温
度も検出し補正を行なうことによって、ボールねじの熱
変形や温度による装置の変形があったとしても精度よく
位置決めが行なえるという大きな効果がある。As described above, the present invention detects and corrects the amount of displacement of the ball screw and the temperature of the device, thereby making it possible to perform accurate positioning even if there is thermal deformation of the ball screw or deformation of the device due to temperature. effective.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明の制御部の構成図。 第２図は本発明による実施例の制御部のブロック図、第
３図は本発明による実施例の可動部の断面図、第４図は
制御を行なうためのプログラム例を示すフルーチャート
図。 １・・・・・・位置指示器 ２・・・・・・非接触変位検出器 ３・・・・・・温度検出器 ４・・・・・・変形被検出手段 ５・・・・・・位置補正手段 ６・・・・・・モータ駆動器 ７…・・・モータ ８・・・・・・Ａ　／　Ｄ変換器 ９・・・・・・マイクロコンピュータ １０１・・台 １１・・・可動テーブル １２・・・・・・ボールねじ １５・・・・・・玉軸受 １４・・・・・・アンギュラ玉軸受 １５・・・・・・ナツト 以−りFIG. 1 is a configuration diagram of a control section of the present invention. FIG. 2 is a block diagram of a control section of an embodiment according to the present invention, FIG. 3 is a sectional view of a movable section of an embodiment according to the present invention, and FIG. 4 is a flowchart showing an example of a program for controlling. 1...Position indicator 2...Non-contact displacement detector 3...Temperature detector 4...Deformation detected means 5... Position correction means 6...Motor driver 7...Motor 8...A/D converter 9...Microcomputer 101...Base 11...Movable table 12...Ball screw 15...Ball bearing 14...Angular ball bearing 15...Nut

Claims (1)

【特許請求の範囲】[Claims] 位置指令に従って可動テーブルをボールねじを用いて位
置決めする装置において、前記ボールねじの変形を検出
する非接触変位検出器と、装置の温度を検出する温度検
出器と、前記変位検出器と前記温度検出器からの信号を
入力し装置の変形量を検出する手段と、前記変形量から
位置補正を行なう手段とを設けたことを特徴とする可動
テーブルの位置決め装置。A device for positioning a movable table using a ball screw according to a position command, comprising: a non-contact displacement detector for detecting deformation of the ball screw; a temperature detector for detecting temperature of the device; and the displacement detector and the temperature detection device. 1. A positioning device for a movable table, comprising means for inputting a signal from a device to detect an amount of deformation of the device, and means for correcting a position based on the amount of deformation.
JP13714785A 1985-06-24 1985-06-24 Positioning apparatus Pending JPS61297058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13714785A JPS61297058A (en) 1985-06-24 1985-06-24 Positioning apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13714785A JPS61297058A (en) 1985-06-24 1985-06-24 Positioning apparatus

Publications (1)

Publication Number Publication Date
JPS61297058A true JPS61297058A (en) 1986-12-27

Family

ID=15191913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13714785A Pending JPS61297058A (en) 1985-06-24 1985-06-24 Positioning apparatus

Country Status (1)

Country Link
JP (1) JPS61297058A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010284737A (en) * 2009-06-10 2010-12-24 Jtekt Corp Positioning device
JP2015116664A (en) * 2015-02-02 2015-06-25 株式会社ジェイテクト Positioning device
CN106871857A (en) * 2017-02-28 2017-06-20 天津大学 A kind of ball-screw sag detection means and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010284737A (en) * 2009-06-10 2010-12-24 Jtekt Corp Positioning device
JP2015116664A (en) * 2015-02-02 2015-06-25 株式会社ジェイテクト Positioning device
CN106871857A (en) * 2017-02-28 2017-06-20 天津大学 A kind of ball-screw sag detection means and method
CN106871857B (en) * 2017-02-28 2023-02-17 天津大学 Device and method for detecting bending deflection of ball screw

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