JPS6216872U - - Google Patents

Info

Publication number
JPS6216872U
JPS6216872U JP10861685U JP10861685U JPS6216872U JP S6216872 U JPS6216872 U JP S6216872U JP 10861685 U JP10861685 U JP 10861685U JP 10861685 U JP10861685 U JP 10861685U JP S6216872 U JPS6216872 U JP S6216872U
Authority
JP
Japan
Prior art keywords
plunger
diaphragm
fluid
control valve
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10861685U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10861685U priority Critical patent/JPS6216872U/ja
Publication of JPS6216872U publication Critical patent/JPS6216872U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2図1,2及び第3図1,2は本考
案の実施例を示す断面図、第4図1,2は従来例
を示す断面図である。 1……圧電制御バルブ本体、2……圧電セラミ
ツク、3……リンク機構、4……プランジヤ、5
……バネ、6……NOポート(ノーマリオープン
ポート)、7……COMポート(コモンポート)
、8……NCポート(ノーマリクローズポート)
、9……ピストン、10……ダイヤフラム。
1, 2 and 3 are sectional views showing an embodiment of the present invention, and FIGS. 4, 1 and 2 are sectional views showing a conventional example. 1... Piezoelectric control valve body, 2... Piezoelectric ceramic, 3... Link mechanism, 4... Plunger, 5
...Spring, 6...NO port (normally open port), 7...COM port (common port)
, 8...NC port (normally closed port)
, 9...Piston, 10...Diaphragm.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ガスその他の流体物の流体通路を制御するプラ
ンジヤまたはダイヤフラムから成る圧電制御バル
ブにおいて、前記プランジヤまたはダイヤフラム
を駆動するアクチユエータに積層型圧電セラミツ
クを用いたことを特徴とする圧電制御バルブ。
1. A piezoelectric control valve comprising a plunger or a diaphragm for controlling a fluid passage of gas or other fluid, characterized in that a laminated piezoelectric ceramic is used as an actuator for driving the plunger or diaphragm.
JP10861685U 1985-07-16 1985-07-16 Pending JPS6216872U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10861685U JPS6216872U (en) 1985-07-16 1985-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10861685U JPS6216872U (en) 1985-07-16 1985-07-16

Publications (1)

Publication Number Publication Date
JPS6216872U true JPS6216872U (en) 1987-01-31

Family

ID=30985975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10861685U Pending JPS6216872U (en) 1985-07-16 1985-07-16

Country Status (1)

Country Link
JP (1) JPS6216872U (en)

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