JPS6216872U - - Google Patents
Info
- Publication number
- JPS6216872U JPS6216872U JP10861685U JP10861685U JPS6216872U JP S6216872 U JPS6216872 U JP S6216872U JP 10861685 U JP10861685 U JP 10861685U JP 10861685 U JP10861685 U JP 10861685U JP S6216872 U JPS6216872 U JP S6216872U
- Authority
- JP
- Japan
- Prior art keywords
- plunger
- diaphragm
- fluid
- control valve
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims 2
Description
第1図、第2図1,2及び第3図1,2は本考
案の実施例を示す断面図、第4図1,2は従来例
を示す断面図である。
1……圧電制御バルブ本体、2……圧電セラミ
ツク、3……リンク機構、4……プランジヤ、5
……バネ、6……NOポート(ノーマリオープン
ポート)、7……COMポート(コモンポート)
、8……NCポート(ノーマリクローズポート)
、9……ピストン、10……ダイヤフラム。
1, 2 and 3 are sectional views showing an embodiment of the present invention, and FIGS. 4, 1 and 2 are sectional views showing a conventional example. 1... Piezoelectric control valve body, 2... Piezoelectric ceramic, 3... Link mechanism, 4... Plunger, 5
...Spring, 6...NO port (normally open port), 7...COM port (common port)
, 8...NC port (normally closed port)
, 9...Piston, 10...Diaphragm.
Claims (1)
ンジヤまたはダイヤフラムから成る圧電制御バル
ブにおいて、前記プランジヤまたはダイヤフラム
を駆動するアクチユエータに積層型圧電セラミツ
クを用いたことを特徴とする圧電制御バルブ。 1. A piezoelectric control valve comprising a plunger or a diaphragm for controlling a fluid passage of gas or other fluid, characterized in that a laminated piezoelectric ceramic is used as an actuator for driving the plunger or diaphragm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10861685U JPS6216872U (en) | 1985-07-16 | 1985-07-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10861685U JPS6216872U (en) | 1985-07-16 | 1985-07-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6216872U true JPS6216872U (en) | 1987-01-31 |
Family
ID=30985975
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10861685U Pending JPS6216872U (en) | 1985-07-16 | 1985-07-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6216872U (en) |
-
1985
- 1985-07-16 JP JP10861685U patent/JPS6216872U/ja active Pending
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