JPS62168472U - - Google Patents
Info
- Publication number
- JPS62168472U JPS62168472U JP5650786U JP5650786U JPS62168472U JP S62168472 U JPS62168472 U JP S62168472U JP 5650786 U JP5650786 U JP 5650786U JP 5650786 U JP5650786 U JP 5650786U JP S62168472 U JPS62168472 U JP S62168472U
- Authority
- JP
- Japan
- Prior art keywords
- spring
- utility
- scope
- inspection device
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は、この考案にかかる半導体検査装置の
断面図、第２図は、従来の半導体検査装置を示す
断面図である。 １……プローブ、２……金属電極、３……スプ
リング、４……プローブ支持板、５……梁。
断面図、第２図は、従来の半導体検査装置を示す
断面図である。 １……プローブ、２……金属電極、３……スプ
リング、４……プローブ支持板、５……梁。
Claims (1)
- プローブをスプリングを介して垂直に取り付け
たことを特徴とする半導体検査装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5650786U JPS62168472U (ja) | 1986-04-15 | 1986-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5650786U JPS62168472U (ja) | 1986-04-15 | 1986-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62168472U true JPS62168472U (ja) | 1987-10-26 |
Family
ID=30885372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5650786U Pending JPS62168472U (ja) | 1986-04-15 | 1986-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62168472U (ja) |
-
1986
- 1986-04-15 JP JP5650786U patent/JPS62168472U/ja active Pending