JPS62168439U - - Google Patents
Info
- Publication number
- JPS62168439U JPS62168439U JP5723386U JP5723386U JPS62168439U JP S62168439 U JPS62168439 U JP S62168439U JP 5723386 U JP5723386 U JP 5723386U JP 5723386 U JP5723386 U JP 5723386U JP S62168439 U JPS62168439 U JP S62168439U
- Authority
- JP
- Japan
- Prior art keywords
- recess
- conductivity type
- semiconductor substrate
- resistance layer
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5723386U JPS62168439U (da) | 1986-04-16 | 1986-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5723386U JPS62168439U (da) | 1986-04-16 | 1986-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62168439U true JPS62168439U (da) | 1987-10-26 |
Family
ID=30886754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5723386U Pending JPS62168439U (da) | 1986-04-16 | 1986-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62168439U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011065250A1 (ja) * | 2009-11-25 | 2011-06-03 | アルプス電気株式会社 | フォースセンサ |
-
1986
- 1986-04-16 JP JP5723386U patent/JPS62168439U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011065250A1 (ja) * | 2009-11-25 | 2011-06-03 | アルプス電気株式会社 | フォースセンサ |
| JPWO2011065250A1 (ja) * | 2009-11-25 | 2013-04-11 | アルプス電気株式会社 | フォースセンサ |