JPS62168067A - Measuring method for resistance value - Google Patents

Measuring method for resistance value

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Publication number
JPS62168067A
JPS62168067A JP899986A JP899986A JPS62168067A JP S62168067 A JPS62168067 A JP S62168067A JP 899986 A JP899986 A JP 899986A JP 899986 A JP899986 A JP 899986A JP S62168067 A JPS62168067 A JP S62168067A
Authority
JP
Japan
Prior art keywords
terminal
constant current
resistor
voltage
network
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP899986A
Other languages
Japanese (ja)
Inventor
Hajime Oota
肇 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP899986A priority Critical patent/JPS62168067A/en
Publication of JPS62168067A publication Critical patent/JPS62168067A/en
Pending legal-status Critical Current

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  • Measurement Of Resistance Or Impedance (AREA)

Abstract

PURPOSE:To easily measure the resistance values of resistances of a one-chip resistance network by varying a current value and changing connection terminals for a circuit to be measured and supplying a constant current twice, and measuring voltage devel oped between respective terminals during the supply of the constant current. CONSTITUTION:A constant current source 5 is connected between terminals 1 and 3. A constant current I1 is supplied from the constant current source 5 and conducted in a network as shown by arrows A and B. At this time, voltages V12, V23, and V13 developed between terminals 1 and 2, 2 and 3, and 1 and 3, are measured respectively. Then, the constant current source 5 is disconnected and a constant current source 6 is connected between the terminals 2 and 3. A constant current I2 is supplied from the constant current source 6 and conducted in the network as shown by arrows C and D. At this time, voltages V23' and a V13' developed between the terminals 2 and 3, and 1 and 3 are measured. Then, the current values I1 and I2 of the constant current sources 5 and 6 and measured voltages V12, V23, V13, V23', and V13' are substituted in a specific expression to calculate resistance values R1 and R2. Thus, the resistance values of respective resistances of the one-chip network are easily measured.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は抵抗回路網中の各抵抗の抵抗値を測定する方法
に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of measuring the resistance value of each resistor in a resistor network.

〔従来の技術〕[Conventional technology]

抵抗回路網中の各抵抗の抵抗値測定は、通常各抵抗を個
々に切り離して行われる。
The resistance value of each resistor in the resistor network is usually measured by separating each resistor individually.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、たとえばシリコン基板中に拡散技術によって抵
抗回路網が形成されているような1チ・ノブ抵抗回路網
の場合には、抵抗を個々に切り離すことができないため
、各抵抗の抵抗値を個々に測定することは極めて困難で
あった。
However, in the case of a single-chnob resistor network, such as one in which the resistor network is formed in a silicon substrate by diffusion technology, it is not possible to separate the resistors individually, so the resistance value of each resistor cannot be determined individually. It was extremely difficult to measure.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の抵抗値測定方法は上記問題点に鑑みてなされた
ものであり、第1の端子と第3の端子との間に第1の抵
抗および第2の抵抗とからなる直列回路と第3の抵抗と
が並列に接続され第1の抵抗と第2の抵抗との接続点に
第2の端子が接続されている三端子抵抗回路網において
、第1の端子と第3の端子との間に第1の定電流を供給
する第1の定電流源を接続して各端子間の電圧を測定し
、ついで第2の端子と第3の端子との間に第2の定電流
を供給する第2の定電流源を接続して各端子間の電圧を
測定し、第1および第2の定電流値および各端子間電圧
値から第1および第2の抵抗の抵抗値を演算により算出
するものである。また、第1の端子と第3の端子との間
に第1の抵抗および第2の抵抗とからなる直列回路と第
3の抵抗および第4の抵抗からなる直列回路とが並列に
接続され第1の抵抗と第2の抵抗との接続点に第2の端
子が接続され第3の抵抗と第4の抵抗との接続点に第4
の端子が接続されている四端子抵抗回路網において、第
1の端子と第3の端子との間に第1の定電流を供給する
第1の定電流源を接続して各端子間の電圧を測定し、つ
いで第2の端子と第4の端子との間に第2の定電流を供
給する第2の定電流源を接続して各端子間の電圧を測定
し、第1および第2の定電流値および各端子間電圧値か
ら第1および第2の抵抗の抵抗値を演算により算出する
ものである。
The resistance value measuring method of the present invention has been made in view of the above problems, and includes a series circuit consisting of a first resistor and a second resistor, and a third resistor connected between the first terminal and the third terminal. between the first terminal and the third terminal in a three-terminal resistance network in which the resistors are connected in parallel and the second terminal is connected to the connection point of the first resistor and the second resistor. A first constant current source supplying a first constant current is connected to measure the voltage between each terminal, and then a second constant current is supplied between the second terminal and the third terminal. A second constant current source is connected to measure the voltage between each terminal, and the resistance values of the first and second resistors are calculated from the first and second constant current values and the voltage values between each terminal. It is something. Further, a series circuit including a first resistor and a second resistor and a series circuit including a third resistor and a fourth resistor are connected in parallel between the first terminal and the third terminal. A second terminal is connected to the connection point between the first resistor and the second resistor, and a fourth terminal is connected to the connection point between the third resistor and the fourth resistor.
In a four-terminal resistor network in which the terminals of are connected, a first constant current source that supplies a first constant current is connected between the first terminal and the third terminal to determine the voltage between each terminal. Then, a second constant current source that supplies a second constant current is connected between the second terminal and the fourth terminal to measure the voltage between each terminal, and the voltage between the first and second terminals is measured. The resistance values of the first and second resistors are calculated from the constant current value and the voltage value between each terminal.

〔作用〕[Effect]

定電流源の電流値および接続端子に応じた電圧が各端子
間に発生する。
A voltage is generated between each terminal depending on the current value of the constant current source and the connection terminal.

〔実施例〕〔Example〕

以下、実施例と共に本発明の詳細な説明する。 Hereinafter, the present invention will be described in detail along with examples.

第9図は一般的な抵抗回路網を示す回路図であり、この
抵抗回路網は注目している抵抗以外を合成抵抗で表わす
ことにより、第10図の回路図のような最小単位に置き
換えることができる。すなわち、注目している抵抗をR
LR2とし、それ以外の抵抗による合成抵抗をRとし、
端子1と端子3との間に抵抗R1,l!:R2からなる
直接回路と抵抗Rとが並列に接続され、抵抗R1とR2
の接続点に端子2が接続されている三端子回路網となっ
ている。
Figure 9 is a circuit diagram showing a general resistor network, and this resistor network can be replaced with the minimum unit as shown in the circuit diagram in Figure 10 by representing the resistor other than the resistor of interest as a composite resistance. I can do it. In other words, the resistance of interest is R
Let LR2 be the combined resistance of other resistances,
A resistor R1,l! is connected between terminal 1 and terminal 3! :The direct circuit consisting of R2 and the resistor R are connected in parallel, and the resistors R1 and R2
The terminal 2 is connected to the connection point of the three-terminal circuit network.

この三端子回路網において、まず、第1図に示すように
端子1と端子3との間に定電流源5を接続する。定電流
源5からは定電流■、が供給され、矢印A、Bのように
回路網内を流れる。そして、このときの端子1と端子2
の間に発生する電圧(V+z)+、端子2と端子3との
間に発生する電圧(VZ:l)lおよび端子1と端子3
との間に発生する電圧(■13)lをそれぞれ測定する
。ついで、定電流源5を取り外し、第2図に示すように
端子2と端子3との間に定電流源6を接続する。定電流
源6からは定電流1□が供給され、矢印C,Dのように
回路網内を流れる。そして、このときの端子2と端子3
との間に発生する電圧(VZ3)2および端子1と端子
3との間に発生する電圧(V13)2をそれぞれ測定す
る。なお、以後随時記載される「(Vab)cJの表示
はc(=1or2)回目における端子aと端子すとの間
の電圧を示す。
In this three-terminal circuit network, first, a constant current source 5 is connected between terminals 1 and 3 as shown in FIG. A constant current (2) is supplied from the constant current source 5 and flows through the circuit network as indicated by arrows A and B. Then, terminal 1 and terminal 2 at this time
(V+z)+, the voltage generated between terminals 2 and 3 (VZ:l)l, and the voltage generated between terminals 1 and 3.
Measure the voltage (13)l generated between the two. Next, the constant current source 5 is removed, and a constant current source 6 is connected between the terminals 2 and 3 as shown in FIG. A constant current 1□ is supplied from the constant current source 6 and flows through the circuit network as shown by arrows C and D. Then, terminal 2 and terminal 3 at this time
The voltage (VZ3) 2 generated between terminals 1 and 3 and the voltage (V13) 2 generated between terminals 1 and 3 are respectively measured. Note that "(Vab)cJ", which will be described from time to time, indicates the voltage between terminal a and terminal S at the c (=1 or 2)th time.

つぎに、定電流源5.6の電流値ILI2および測定電
圧(V+□L、(Vz+)+、(V+z)+、(Vz:
+)z。
Next, the current value ILI2 of the constant current source 5.6 and the measured voltage (V+□L, (Vz+)+, (V+z)+, (Vz:
+)z.

(VI3)2を、下記の(7)式および(8)式に代入
して抵抗値R,およびR2を算出する。
(VI3) 2 is substituted into the following equations (7) and (8) to calculate the resistance values R and R2.

ここで、(7)式および(8)式の導入について説明す
る。
Here, introduction of equations (7) and (8) will be explained.

まず、第1ステツプの測定から が成り立つ。したがって、(1)式および(2)弐から
、 が成り立つ。
First, the first step is the measurement. Therefore, from equation (1) and (2), the following holds true.

また、第2ス、テップの測定から が成り立ち、(4)弐および(5)式から、R,R が成り立つ。Also, from the second step, the measurement holds true, and from equations (4) and (5), R, R holds true.

(2)  X  (Vlz)z   (5)  X  
(VI3Lより1+  X  (V++)z   Iz
 X (Vl:IL=   [(Vlz)zX (V2
3L  (Vl3)IX (Vzz)zlゆえに、 (3)式と(7)式より (V+□)I (VZ3L (Vls>t×(VZ3)l   (Vlff)IX 
 (VZ3)2なお、本実施例では(Vl3)Iを実測
したが、(V l:l) I = (V I□L+ (
Vz+)+の関係から算出することができる。
(2) X (Vlz)z (5) X
(1+ X (V++)z Iz from VI3L
X (Vl:IL= [(Vlz)zX (V2
3L (Vl3)IX (Vzz)zl Therefore, from equations (3) and (7), (V+□)I (VZ3L (Vls>t×(VZ3)l (Vlff)IX
(VZ3)2 In this example, (Vl3)I was actually measured, but (V l:l) I = (V I□L+ (
It can be calculated from the relationship of Vz+)+.

また、(Vlz)zの測定に代えて(Vlz)zを測定
すれば、 (Vlz)z= (VZ3)2  (Vl2)2の関係
から算出することができる。
Moreover, if (Vlz)z is measured instead of measuring (Vlz)z, it can be calculated from the relationship (Vlz)z=(VZ3)2 (Vl2)2.

つぎに、第2の実施例を説明する。第9図の一般的な抵
抗回路網は第3図の回路図のようにも置き換えることが
できる。すなわち、注目している抵抗をR1,R2,R
3とし、それ以外の抵抗による合成抵抗をR4とし、端
子lと端子3との間に抵抗R1およびR2からなる直列
回路と抵抗R3および抵抗R4とからなる直列回路とが
並列に接続され、抵抗R,とR2の接続点に端子2が接
続され、抵抗R3と抵抗R4の接続点に端子4が接続さ
れている四端子抵抗回路網となっている。
Next, a second embodiment will be explained. The general resistor network shown in FIG. 9 can also be replaced with the circuit diagram shown in FIG. In other words, the resistances of interest are R1, R2, R
3, and the combined resistance of other resistors is R4, and a series circuit consisting of resistors R1 and R2 and a series circuit consisting of resistors R3 and R4 are connected in parallel between terminal l and terminal 3, and the resistor Terminal 2 is connected to the connection point between R and R2, and terminal 4 is connected to the connection point between resistor R3 and resistor R4, forming a four-terminal resistance network.

この四端子抵抗回路網において、まず、第4図に示すよ
うに端子1と端子3との間に定電流源5を接続する。定
電流源5からは定電流I、が供給され、矢印A、Bのよ
うに回路網内を流れるので、このときの端子1と端子2
の間に発生する電圧(V+□)1、端子2と端子3との
間に発生する電圧(VZ:l)I、端子3と端子4との
間に発生する電圧(■14Lおよび端子1と端子4との
間に発生する電圧(Vl4)lをそれぞれ測定する。つ
いで、定電流源5を取り外し、第5図に示すように端子
2と端子4との間に定電流源6を接続する。定電流源6
からは定電流■2が供給され、矢印C,Dのように回路
網内を流れる。そして、このときの端子1と端子2の間
に発生する電圧(V+□)2、端子2と端子3との間に
発生する電圧(Vz3)z、端子3と端子4との間に発
生する電圧(V34)!および端子1と端子4との間に
発生する電圧(Vl4)2をそれぞれ測定する。
In this four-terminal resistance network, first, a constant current source 5 is connected between terminals 1 and 3 as shown in FIG. A constant current I is supplied from the constant current source 5 and flows through the circuit network as shown by arrows A and B.
Voltage generated between (V+□) 1, voltage generated between terminal 2 and terminal 3 (VZ:l) I, voltage generated between terminal 3 and terminal 4 (■14L and terminal 1 and Measure the voltage (Vl4)l generated between terminal 4. Next, remove constant current source 5 and connect constant current source 6 between terminal 2 and terminal 4 as shown in FIG. . Constant current source 6
A constant current (2) is supplied from the circuit and flows through the circuit network as shown by arrows C and D. At this time, the voltage (V+□)2 generated between terminals 1 and 2, the voltage (Vz3)z generated between terminals 2 and 3, and the voltage generated between terminals 3 and 4. Voltage (V34)! and the voltage (Vl4)2 generated between terminal 1 and terminal 4 are measured.

つぎに、定電流[5,6の電流値ILI2および測定電
圧(V+□)I、(VZ3)l、(V34)I、(Vl
4)l。
Next, constant current [5, 6 current value ILI2 and measurement voltage (V+□)I, (VZ3)l, (V34)I, (Vl
4)l.

(Vl2)2.(VZ3)2.(V:+4)2.(Vl
4)Zを、下記の(11)式ないしく14)弐に代入し
て抵抗値R,〜R4を算出する。
(Vl2)2. (VZ3)2. (V:+4)2. (Vl
4) Substitute Z into equations (11) to 14) 2 below to calculate resistance values R, to R4.

導かれる。すなわち、まず、第1ステツプの測定RI 
      R4 R2R3 R2R4 が成り立つ。したがって、(16)式および(17)式
から、 が成り立ち、 (15)式および(17)式から、 が成り立つ。
be guided. That is, first, the measurement RI of the first step is
R4 R2R3 R2R4 holds true. Therefore, from equations (16) and (17), the following holds true, and from equations (15) and (17), the following holds true.

また、第2ステツプの測定から が成り立つ。したがって、(22)式および(23)式
から、 が成り立ち、 (21)式および(23)式から、 が成り立つ。
It also consists of the second step of measurement. Therefore, from equations (22) and (23), the following holds true, and from equations (21) and (23), the following holds true.

(17)X  (V:+a)z   (23)X  (
V:14LよりIt X (v+4−)z  −Iz 
X (V34Lゆえに、 It X (V34)2 −12 X (V34)1こ
れは、上述の(11)式に他ならない。同様にして(1
2)弐〜(14)式も導くことができる。
(17)X (V:+a)z (23)X (
V: From 14L It X (v+4-)z -Iz
X (V34L, so It X (V34)2 −12
2) Equations (14) can also be derived.

なお、R2は(19)式と(11)式より、(V+zL (Vz+L と書ける。また、R4は(20)式と(13)式より、
(V14L (V 34) 1 と書ける。したがって、(12)式および(14)式に
代えて(27)式および(28)式を用いれば、電圧(
VZ3)!および電圧(VI4)2の測定を省略するこ
とができる。
In addition, R2 can be written as (V+zL (Vz+L) from equations (19) and (11). Also, R4 can be written as (Vz+L) from equations (20) and (13).
(V14L (V 34) 1 ) Therefore, if we use formulas (27) and (28) in place of formulas (12) and (14), the voltage (
VZ3)! and measurement of voltage (VI4)2 can be omitted.

なお、第3図に示す四端子抵抗回路網に対して第1の実
施例に示した三端子抵抗回路網における抵抗値測定方法
を定電流源の接続端子の組み合わせを替えて2回路通用
しても、R1−R4を測定することができる。すなわち
、定電流源5および6をそれぞれ第6図および第7図の
ように接続すれば、R3+R4をRとして(7)式およ
び(8)式からそれぞれ抵抗R2およびR1を算出する
ことができる。同様に、定電流源5および6をそれぞれ
第6図および第8図のように接続すれば、抵抗R3およ
びR4を算出することができる。
Note that the method for measuring the resistance value in the three-terminal resistor network shown in the first embodiment can be applied to the four-terminal resistor network shown in FIG. 3 by changing the combination of the connection terminals of the constant current source for two circuits. Also, R1-R4 can be measured. That is, if the constant current sources 5 and 6 are connected as shown in FIGS. 6 and 7, respectively, the resistances R2 and R1 can be calculated from equations (7) and (8), respectively, with R3+R4 as R. Similarly, resistances R3 and R4 can be calculated by connecting constant current sources 5 and 6 as shown in FIGS. 6 and 8, respectively.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、被測定回路に対し
て電流値および接続端子を変えて定電流を2回供給し、
定電流供給時に各端子間に発生する電圧を測定するだけ
で、以後は演算により被測定回路の個々の抵抗の抵抗値
を算出することができる。したがって、抵抗を個々に切
り離すことができない1チツプ抵抗回路網のような場合
にも、各抵抗の抵抗値を容易に測定することができる。
As explained above, according to the present invention, a constant current is supplied to the circuit under test twice by changing the current value and the connection terminal,
By simply measuring the voltage generated between each terminal when a constant current is supplied, the resistance value of each resistor of the circuit under test can be calculated by calculation. Therefore, even in the case of a one-chip resistor network where the resistors cannot be separated individually, the resistance value of each resistor can be easily measured.

【図面の簡単な説明】[Brief explanation of drawings]

第1図および第2図はそれぞれ本発明の第1の実施例を
説明するための回路図、第3図、第4図および第5図は
それぞれ本発明の第2の実施例を説明するための回路図
、第6図、第7図および第8図はそれぞれ第3の実施例
を説明するための回路図、第9図は一般的な抵抗回路網
を示す回路図、第10図は第1の実施例における三端子
回路網を示す回路図である。 1〜4・・・端子、5,6・・・定電流源、R1−R4
およびR・・・抵抗。 特許出願人 山武ハネウェル株式会社 代 理 人 山川 政権(ばか2名) 第1図       第2図 第3図 第4図       第5図 第6図     第7図 第8図     第9図 第10図 手続補正書(自発) 1、事件の表示 昭和61年 特 許 願第8999号 2、発明の名称 抵抗値測定方法 3、補正をする者 事件との関係     特 許  出願人名称(氏名)
 (666)山武ハネウェル株式会社(2)図面のWc
3図を別紙の通り補正する。 明   細   書 1、発明の名称 抵抗値測定方法 2、特許請求の範囲 (1)第1の端子と第3の端子との間に第1の抵抗およ
び第2の抵抗とからなる直列回路と第3の抵抗とが並列
に接続され第1の抵抗と第2の抵抗との接続点に第2の
端子が接続されている三端子抵抗回路網において、第1
の端子と第3の端子との間に第1の定電流を供給する第
1の定電流源を接続して各端子間の電圧を測定し、つい
で第2の端子と第3の端子との間に第2の定電流を供給
する第2の定電流源を接続して各端子間の電圧を測定し
、第1および第2の定電流値および各端子間電圧値から
第1および第2の抵抗の抵抗値を演算により算出するこ
とを特徴とする抵抗値測定方法。 (2)第1の端子と第3の端子との間に第1の抵抗およ
び第2の抵抗とからなる直列回路と第3の抵抗および第
4の抵抗からなる直列回路とが並列に接続され第1の抵
抗と第2の抵抗との接続点に第2の端子が接続され第3
の抵抗と第4の抵抗との接続点に第4の端子が接続され
ている四端子抵抗回路網において、第1の端子と第3の
端子との間に第1の定電流を供給する第1の定電流源を
接続して各端子間の電圧を測定し、ついで第2の端子と
第4の端子との間に第2の定電流を供給する第2の定電
流源を接続して各端子間の電圧を測定し、第1および第
2の定電流値および各端子間電圧値から第1および第2
の抵抗の抵抗値を演算により算出することを特徴とする
抵抗値測定方法。 3、発明の詳細な説明 〔産業上の利用分野〕 本発明は抵抗回路網中の各抵抗の抵抗値を測定する方法
に関するものである。 〔従来の技術〕 抵抗回路網中の各抵抗の抵抗値測定は、通常各抵抗を個
々に切り離して行われる。 〔発明が解決しようとする問題点〕 しかし、たとえばシリコン基板中に拡散技術によって抵
抗回路網が形成されているような1チツプ抵抗回路網の
場合には、抵抗を個々に切り離すことができないため、
各抵抗の抵抗値を個々に測定することは極めて困難であ
った。 〔問題点を解決するための手段〕 本発明の抵抗値測定方法は上記問題点に鑑みてなされた
ものであり、第1の端子と第3の端子との間に第1の抵
抗および第2の抵抗とからなる直列回路と第3の抵抗と
が並列に接続され第1の抵抗と第2の抵抗との接続点に
第2の端子が接続されている三端子抵抗回路網において
、第1の端子と第3の端子との間に第1の定電流を供給
する第1の定電流源を接続して各端子間の電圧を測定し
、ついで第2の端子と第3の端子との間に第2の定電流
を供給する第2の定電流源を接続して各端子間の電圧を
測定し、第1および第2の定電流値および各端子間電圧
値から第1および第2の抵抗の抵抗値を演算により算出
するものである。また、第1の端子と第3の端子との間
に第1の抵抗および第2の抵抗とからなる直列回路と第
3の抵抗および第4の抵抗からなる直列回路とが並列に
接続され第1の抵抗と第2の抵抗との接続点に第2の端
子が接続され第3の抵抗と第4の抵抗との接続点に第4
の端子が接続されている四端子抵抗回路網において、第
1の端子と第3の端子との間に第1の定電流を供給する
第1の定電流源を接続して各端子間の電圧を測定し、つ
いで第2の端子と第4の端子との間に第2の定電流を供
給する第2の定電流源を接続して各端子間の電圧を測定
し、第1および第2の定電流値および各端子間電圧値か
ら第1および第2の抵抗の抵抗値を演算により算出する
ものである。 〔作用〕 定電流源の電流値および接続端子に応じた電圧が各端子
間に発生する。 〔実施例〕 以下、実施例と共に本発明の詳細な説明する。 第9図は一般的な抵抗回路網を示す回路図であり、この
抵抗回路網は注目している抵抗以外を合成抵抗で表わす
ことにより、第10図の回路図のような最小単位に置き
換えることができる。すなわち、注目している抵抗をR
1,Rzとし、それ以外の抵抗による合成抵抗をRとし
、端子1と端子3との間に抵抗R1とR2からなる直列
回路と抵抗Rとが並列に接続され、抵抗RIとR2の接
続点に端子2が接続されている三端子回路網となってい
る。 この三端子回路網において、まず、第1図に示すように
端子1と端子3との間に定電流源5を接続する。定電流
源5からは定電流Itが供給され、矢印A、Bのように
回路網内を流れる。そして、このときの端子1と端子2
の間に発生する電圧(V+□)8、端子2と端子3との
間に発生する電圧(VZ3)Iおよび端子1と端子3と
の間に発生する電圧(V+ffLをそれぞれ測定する。 ついで、定電流源5を取り外し、第2図に示すように端
子2と端子3との間に定電流源6を接続する。定電流源
6からは定電流I2が供給され、矢印C,Dのように回
路網内を流れる。そして、このときの端子2と端子3と
の間に発生する電圧(Vz+)zおよび端子1と端子3
との間に発生する電圧(’l/++)zをそれぞれ測定
する。なお、以後随時記載される「(Vab)clの表
示はc(−1or2)回目の測定における端子すに対す
る端子aの電位を示す。 つぎに、定電流源5,6の電流値11+I2および測定
電圧(V+□L+(Vz3)+、(V+z)+、(Vz
z)z+(V+s)zを、下記の(7)式および(8)
式に代入して抵抗値R3およびR2を算出する。 ここで、(7)式および(8)式の導入について説明す
る。 まず、第1ステツプの測定から が成り立つ。したがって、(1)式および(2)式から
、 R,Rz が成り立つ。 また、第2ステツプの測定から が成り立ち、(4)式および(5)式から、R,R が成り立つ。 (2)  x  (VI3)Z  −(5)  x  
(V+zLより1+ X  (V13)2   I2 
X  (VI3)Iゆえに、 (3)式と(7)式より (V+z)+ (V 23) 1 (V+1)iX  (VZ3)l   (V13LX 
 (Vz+)zなお、本実施例では(VI3Lを実測し
たが、(v+:tL= (V+□)+ + (VZ:I
Lの関係から算出することができる。 また、(VI3)Zの測定に代えて(Vz+)zを測定
すれば、 (VI3)2= (VZ3)2  (Vz+)zの関係
から算出することができる。 つぎに、第2の実施例を説明する。第9図の一般的な抵
抗回路網は第3図の回路図のようにも置き換えることが
できる。すなわち、注目している抵抗をRLR2,R3
とし、それ以外の抵抗による合成抵抗をR4とし、端子
1と端子3との間に抵抗R1およびR2からなる直列回
路と抵抗R3および抵抗R4とからなる直列回路とが並
列に接続され、抵抗R1とR2の接続点に端子2が接続
され、抵抗R3と抵抗R4の接続点に端子4が接続され
ている四端子抵抗回路網となっている。 この四端子抵抗回路網において、まず、第4図に示すよ
うに端子1と端子3との間に定電流源5を接続する。定
電流源5からは定電流I、が供給され、矢印A、Bのよ
うに回路網内を流れるので、このときの端子1と端子2
の間に発生する電圧(V+□)い端子2と端子3との間
に発生する電圧(VZ3)い端子4と端子3との間に発
生する電圧(V4:ILおよび端子1と端子4との間に
発生する電圧(VI4)Iをそれぞれ測定する。ついで
、定電流源5を取り外し、第5図に示すように端子2と
端子4との間に定電流源6を接続する。定電流源6から
は定電流I2が供給され、矢印C,Dのように回路網内
を流れる。そして、このときの端子2と端子1の間に発
生する電圧(V Zυ2、端子2と端子3との間に発生
する電圧(Vzz)z、端子3と端子4との間に発生す
る電圧(V:+4)z#よび端子1と端子4との間に発
生する電圧(■+a)zをそれぞれ測定する。 つぎに、定電流源5,6の電流値1t、Izおよび測定
電圧(V +z)、(Vzz)、(V<1L、(V+<
L。 (Vz+)z、(Vz+)z、(、V:+4)z、(V
+n)zを、下記の(11)式ないしく14)式に代入
して抵抗値R1〜R4を算出する。 導かれる。すなわち、まず、第1ステツプの測定R2R
4 が成り立つ。したがって、(16)式および(17)式
から、 が成り立ち、 (15)式および(17)式から、 が成り立つ。 また、第2ステツプの測定から が成り立つ。したがって、(22)式および(23)式
から、 R,R。 が成り立ち、 (21)式および(23)式から、 Rz     R:1 が成り立つ。 (17) X  (V34L   (23) X  (
V43LよりIIX (V34)2   It X (
V41)1=  [(v+□)+ X (V:+4)z
  (V21)ZX (V4:l)l]ゆえに、 これは、上述の(11)式に他ならない。同様にして(
12)弐〜(14)式も導くことができる。 なお、R2は(19)式と(11)式より、(V+z)
+ (V zs) + と書ける。また、R4は(20)式と(13)式より、
(VI4L (V43)+ と書ける。したがって、(12)式および(14)式に
代えて(27)式および(28)式を用いれば、電圧(
Vx:+)zおよび電圧(VI4)2の測定を省略する
ことができる。 なお、第3図に示す四端子抵抗回路網に対して第1の実
施例に示した三端子抵抗回路網における抵抗値測定方法
を定電流源の接続端子の組み合わせを替えて2回路適用
しても、R1−R4を測定することができる。すなわち
、定電流源5および6をそれぞれ第6図および第7図の
ように接続すれば、R8+R4をRとして(7)式およ
び(8)式からそれぞれ抵抗R2およびR,を算出する
ことができる。同様に、定電流源5および6をそれぞれ
第6図および第8図のように接続すれば、抵抗R3およ
びR4を算出することができる。 〔発明の効果〕 以上説明したように本発明によれば、被測定回路に対し
て電流値および接続端子を変えて定電流を2回供給し、
定電流供給時に各端子間に発生する電圧を測定するだけ
で、以後は演算により被測定回路の個々の抵抗の抵抗値
を算出することができる。したがって、抵抗を個々に切
り離すことができない1チツプ抵抗回路網のような場合
にも、各抵抗の抵抗値を容易に測定することができる。 4、図面の簡単な説明 第1図および第2図はそれぞれ本発明の第1の実施例を
説明するための回路図、第3図、第4図および第5図は
それぞれ本発明の第2の実施例を説明するための回路図
、第6図、第7図および第8図はそれぞれ第3の実施例
を説明するための回路図、第9図は一般的な抵抗回路網
を示す回路図、第10図は第1の実施例における三端子
回路網を示す回路図である。 1〜4・・・端子、5.6・・・定電流源、R1−R4
およびR・・・抵抗。 特許出願人 山武ハネウェル株式会社 代 理 人 山川 政権(ばか2名) 第3図
1 and 2 are circuit diagrams for explaining a first embodiment of the present invention, and FIGS. 3, 4, and 5 are circuit diagrams for explaining a second embodiment of the present invention, respectively. , FIG. 6, FIG. 7, and FIG. 8 are circuit diagrams for explaining the third embodiment, respectively, FIG. 9 is a circuit diagram showing a general resistance circuit network, and FIG. 1 is a circuit diagram showing a three-terminal circuit network in the first embodiment; FIG. 1-4...terminal, 5,6...constant current source, R1-R4
and R...resistance. Patent Applicant Yamatake Honeywell Co., Ltd. Agent Yamakawa Administration (2 idiots) Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7 Figure 8 Figure 9 Figure 10 Procedural Amendment (Spontaneous) 1. Indication of the case 1986 Patent Application No. 8999 2. Name of the invention Resistance value measurement method 3. Person making the amendment Relationship to the case Patent Applicant name (name)
(666) Yamatake Honeywell Co., Ltd. (2) Drawing Wc
Correct Figure 3 as shown in the attached sheet. Description 1, Title of the invention: Resistance value measuring method 2, Claims (1) A series circuit consisting of a first resistor and a second resistor and a series circuit between the first terminal and the third terminal. In the three-terminal resistance network, the first
A first constant current source that supplies a first constant current is connected between the terminal and the third terminal, the voltage between each terminal is measured, and then the voltage between the second terminal and the third terminal is A second constant current source that supplies a second constant current is connected in between, and the voltage between each terminal is measured, and the first and second A resistance value measuring method characterized by calculating the resistance value of a resistor by calculation. (2) A series circuit consisting of a first resistor and a second resistor and a series circuit consisting of a third resistor and a fourth resistor are connected in parallel between the first terminal and the third terminal. A second terminal is connected to the connection point between the first resistor and the second resistor, and a third terminal is connected to the connection point between the first resistor and the second resistor.
In a four-terminal resistance network, the fourth terminal is connected to the connection point between the resistor and the fourth resistor, the first constant current is supplied between the first terminal and the third terminal. A constant current source is connected to measure the voltage between each terminal, and then a second constant current source is connected between the second terminal and the fourth terminal to supply a second constant current. Measure the voltage between each terminal, and calculate the first and second constant current values from the first and second constant current values and the voltage values between each terminal.
A resistance value measuring method characterized by calculating the resistance value of a resistor by calculation. 3. Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a method for measuring the resistance value of each resistor in a resistor network. [Prior Art] The resistance value of each resistor in a resistor network is usually measured by separating each resistor individually. [Problems to be Solved by the Invention] However, in the case of a one-chip resistor network in which the resistor network is formed in a silicon substrate by diffusion technology, it is not possible to separate the resistors individually.
It was extremely difficult to measure the resistance value of each resistor individually. [Means for Solving the Problems] The resistance value measuring method of the present invention has been made in view of the above problems, and includes a first resistor and a second resistor between the first terminal and the third terminal. In a three-terminal resistance network, a series circuit consisting of a resistor and a third resistor are connected in parallel, and a second terminal is connected to a connection point between the first resistor and the second resistor. A first constant current source that supplies a first constant current is connected between the terminal and the third terminal, the voltage between each terminal is measured, and then the voltage between the second terminal and the third terminal is A second constant current source that supplies a second constant current is connected in between, and the voltage between each terminal is measured, and the first and second The resistance value of the resistor is calculated by calculation. Further, a series circuit including a first resistor and a second resistor and a series circuit including a third resistor and a fourth resistor are connected in parallel between the first terminal and the third terminal. A second terminal is connected to the connection point between the first resistor and the second resistor, and a fourth terminal is connected to the connection point between the third resistor and the fourth resistor.
In a four-terminal resistor network in which the terminals of are connected, a first constant current source that supplies a first constant current is connected between the first terminal and the third terminal to determine the voltage between each terminal. Then, a second constant current source that supplies a second constant current is connected between the second terminal and the fourth terminal to measure the voltage between each terminal, and the voltage between the first and second terminals is measured. The resistance values of the first and second resistors are calculated from the constant current value and the voltage value between each terminal. [Function] A voltage is generated between each terminal according to the current value of the constant current source and the connection terminal. [Examples] Hereinafter, the present invention will be described in detail along with Examples. Figure 9 is a circuit diagram showing a general resistor network, and this resistor network can be replaced with the minimum unit as shown in the circuit diagram in Figure 10 by representing the resistor other than the resistor of interest as a composite resistance. I can do it. In other words, the resistance of interest is R
1, Rz, and the combined resistance of other resistors is R. A series circuit consisting of resistors R1 and R2 and resistor R are connected in parallel between terminals 1 and 3, and the connection point of resistors RI and R2 is It is a three-terminal circuit network in which terminal 2 is connected to. In this three-terminal circuit network, first, a constant current source 5 is connected between terminals 1 and 3 as shown in FIG. A constant current It is supplied from the constant current source 5 and flows within the circuit network as shown by arrows A and B. Then, terminal 1 and terminal 2 at this time
Measure the voltage (V+□) 8 generated between terminals, the voltage (VZ3) I generated between terminals 2 and 3, and the voltage (V+ffL) generated between terminals 1 and 3. Next, Remove the constant current source 5 and connect the constant current source 6 between the terminals 2 and 3 as shown in Fig. 2.The constant current source 6 supplies a constant current I2, and the current flows as shown by arrows C and D. flows through the circuit network.Then, the voltage (Vz+)z generated between terminals 2 and 3 at this time and the voltage (Vz+)z generated between terminals 1 and 3
The voltage ('l/++)z generated between the two is measured. Note that the display of "(Vab)cl" described from time to time indicates the potential of the terminal a with respect to the terminal in the c (-1 or 2)th measurement. Next, the current value 11+I2 of the constant current sources 5 and 6 and the measured voltage (V+□L+(Vz3)+, (V+z)+, (Vz
z)z+(V+s)z using the following equations (7) and (8)
By substituting into the equation, resistance values R3 and R2 are calculated. Here, introduction of equations (7) and (8) will be explained. First, the first step is the measurement. Therefore, from equations (1) and (2), R, Rz hold true. Furthermore, the measurement in the second step holds true, and from equations (4) and (5), R and R hold. (2) x (VI3)Z - (5) x
(1+ X (V13)2 I2 from V+zL
X (VI3)I Therefore, from equations (3) and (7), (V+z)+ (V 23) 1 (V+1)iX (VZ3)l (V13LX
(Vz+)zIn this example, (VI3L was actually measured, but (v+:tL= (V+□)+ + (VZ:I
It can be calculated from the relationship of L. Furthermore, if (Vz+)z is measured instead of measuring (VI3)Z, calculation can be made from the relationship (VI3)2=(VZ3)2(Vz+)z. Next, a second embodiment will be explained. The general resistor network shown in FIG. 9 can also be replaced with the circuit diagram shown in FIG. In other words, the resistors of interest are RLR2, R3
Let R4 be the combined resistance of other resistors, and a series circuit consisting of resistors R1 and R2 and a series circuit consisting of resistors R3 and R4 are connected in parallel between terminal 1 and terminal 3, and resistor R1 Terminal 2 is connected to the connection point between and R2, and terminal 4 is connected to the connection point between resistor R3 and resistor R4, forming a four-terminal resistance network. In this four-terminal resistance network, first, a constant current source 5 is connected between terminals 1 and 3 as shown in FIG. A constant current I is supplied from the constant current source 5 and flows through the circuit network as shown by arrows A and B.
(V+□) Voltage generated between terminals 2 and 3 (VZ3) Voltage generated between terminals 4 and 3 (V4: IL and between terminals 1 and 4) Measure the voltages (VI4) and I generated between the two.Then, remove the constant current source 5 and connect the constant current source 6 between the terminals 2 and 4 as shown in FIG. A constant current I2 is supplied from the source 6 and flows through the circuit network as shown by arrows C and D. At this time, the voltage (V Zυ2) generated between terminals 2 and 1, The voltage generated between (Vzz)z, the voltage generated between terminals 3 and 4 (V: +4)z#, and the voltage generated between terminals 1 and 4 (■+a)z are respectively Next, the current values 1t and Iz of the constant current sources 5 and 6 and the measurement voltages (V +z), (Vzz), (V<1L, (V+<
L. (Vz+)z, (Vz+)z, (,V:+4)z, (V
+n)z is substituted into the following equations (11) to 14) to calculate the resistance values R1 to R4. be guided. That is, first, the first step measurement R2R
4 holds true. Therefore, from equations (16) and (17), the following holds true, and from equations (15) and (17), the following holds true. It also consists of the second step of measurement. Therefore, from formulas (22) and (23), R, R. From equations (21) and (23), Rz R:1 holds true. (17) X (V34L (23) X (
From V43L IIX (V34)2 It X (
V41) 1= [(v+□)+X (V:+4)z
(V21)ZX (V4:l)l] Therefore, this is nothing but the above-mentioned equation (11). Similarly (
12) Equations 2 to (14) can also be derived. Furthermore, from equations (19) and (11), R2 is (V+z)
It can be written as + (V zs) +. Also, R4 is from equations (20) and (13),
It can be written as (VI4L (V43)+. Therefore, if formulas (27) and (28) are used in place of formulas (12) and (14), the voltage (
The measurement of Vx:+)z and voltage (VI4)2 can be omitted. In addition, the resistance value measurement method for the three-terminal resistance network shown in the first embodiment was applied to two circuits by changing the combination of the connection terminals of the constant current sources to the four-terminal resistance network shown in FIG. Also, R1-R4 can be measured. That is, if the constant current sources 5 and 6 are connected as shown in FIGS. 6 and 7, respectively, the resistances R2 and R can be calculated from equations (7) and (8), respectively, with R8+R4 as R. . Similarly, resistances R3 and R4 can be calculated by connecting constant current sources 5 and 6 as shown in FIGS. 6 and 8, respectively. [Effects of the Invention] As explained above, according to the present invention, a constant current is supplied to the circuit under test twice by changing the current value and the connection terminal,
By simply measuring the voltage generated between each terminal when a constant current is supplied, the resistance value of each resistor of the circuit under test can be calculated by calculation. Therefore, even in the case of a one-chip resistor network where the resistors cannot be separated individually, the resistance value of each resistor can be easily measured. 4. Brief description of the drawings FIGS. 1 and 2 are circuit diagrams for explaining the first embodiment of the present invention, and FIGS. 3, 4, and 5 are circuit diagrams for explaining the second embodiment of the present invention, respectively. FIG. 6, FIG. 7, and FIG. 8 are circuit diagrams for explaining the third embodiment, and FIG. 9 is a circuit diagram showing a general resistor network. 10 are circuit diagrams showing a three-terminal circuit network in the first embodiment. 1-4...terminal, 5.6...constant current source, R1-R4
and R...resistance. Patent applicant Yamatake Honeywell Co., Ltd. Agent Yamakawa administration (two idiots) Figure 3

Claims (2)

【特許請求の範囲】[Claims] (1)第1の端子と第3の端子との間に第1の抵抗およ
び第2の抵抗とからなる直列回路と第3の抵抗とが並列
に接続され第1の抵抗と第2の抵抗との接続点に第2の
端子が接続されている三端子抵抗回路網において、第1
の端子と第3の端子との間に第1の定電流を供給する第
1の定電流源を接続して各端子間の電圧を測定し、つい
で第2の端子と第3の端子との間に第2の定電流を供給
する第2の定電流源を接続して各端子間の電圧を測定し
、第1および第2の定電流値および各端子間電圧値から
第1および第2の抵抗の抵抗値を演算により算出するこ
とを特徴とする抵抗値測定方法。
(1) A series circuit consisting of a first resistor and a second resistor and a third resistor are connected in parallel between the first terminal and the third terminal, and the first resistor and the second resistor are connected in parallel. In a three-terminal resistor network, the second terminal is connected to the connection point with the first
A first constant current source that supplies a first constant current is connected between the terminal and the third terminal, the voltage between each terminal is measured, and then the voltage between the second terminal and the third terminal is A second constant current source that supplies a second constant current is connected in between, and the voltage between each terminal is measured, and the first and second A resistance value measuring method characterized by calculating the resistance value of a resistor by calculation.
(2)第1の端子と第3の端子との間に第1の抵抗およ
び第2の抵抗とからなる直列回路と第3の抵抗および第
4の抵抗からなる直列回路とが並列に接続され第1の抵
抗と第2の抵抗との接続点に第2の端子が接続され第3
の抵抗と第4の抵抗との接続点に第4の端子が接続され
ている四端子抵抗回路網において、第1の端子と第3の
端子との間に第1の定電流を供給する第1の定電流源を
接続して各端子間の電圧を測定し、ついで第2の端子と
第4の端子との間に第2の定電流を供給する第2の定電
流源を接続して各端子間の電圧を測定し、第1および第
2の定電流値および各端子間電圧値から第1および第2
の抵抗の抵抗値を演算により算出することを特徴とする
抵抗値測定方法。
(2) A series circuit consisting of a first resistor and a second resistor and a series circuit consisting of a third resistor and a fourth resistor are connected in parallel between the first terminal and the third terminal. A second terminal is connected to the connection point between the first resistor and the second resistor, and a third terminal is connected to the connection point between the first resistor and the second resistor.
In a four-terminal resistance network, the fourth terminal is connected to the connection point between the resistor and the fourth resistor, the first constant current is supplied between the first terminal and the third terminal. A constant current source is connected to measure the voltage between each terminal, and then a second constant current source is connected between the second terminal and the fourth terminal to supply a second constant current. Measure the voltage between each terminal, and calculate the first and second constant current values from the first and second constant current values and the voltage values between each terminal.
A resistance value measuring method characterized by calculating the resistance value of a resistor by calculation.
JP899986A 1986-01-21 1986-01-21 Measuring method for resistance value Pending JPS62168067A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP899986A JPS62168067A (en) 1986-01-21 1986-01-21 Measuring method for resistance value

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP899986A JPS62168067A (en) 1986-01-21 1986-01-21 Measuring method for resistance value

Publications (1)

Publication Number Publication Date
JPS62168067A true JPS62168067A (en) 1987-07-24

Family

ID=11708379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP899986A Pending JPS62168067A (en) 1986-01-21 1986-01-21 Measuring method for resistance value

Country Status (1)

Country Link
JP (1) JPS62168067A (en)

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* Cited by examiner, † Cited by third party
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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011151856A1 (en) * 2010-05-31 2011-12-08 株式会社アドバンテスト Measurement device and measurement method
JPWO2011151856A1 (en) * 2010-05-31 2013-07-25 株式会社アドバンテスト Measuring apparatus and measuring method
CN103913639A (en) * 2013-01-04 2014-07-09 凌力尔特公司 Method and system for measuring the resistance of a resistive structure
EP2752672A1 (en) * 2013-01-04 2014-07-09 Linear Technology Corporation Method and system for measuring the resistance of a resistive structure
US8947101B2 (en) 2013-01-04 2015-02-03 Linear Technology Corporation Method and system for measuring the resistance of a resistive structure
CN103913639B (en) * 2013-01-04 2018-05-18 凌力尔特公司 Measure the method and system of resistive structures resistance
WO2017140589A1 (en) * 2016-02-18 2017-08-24 Continental Automotive Gmbh Method for determining a calibration current pulse
WO2017186410A1 (en) * 2016-04-25 2017-11-02 Continental Automotive Gmbh Method for determining a load current and battery sensor
CN109073683A (en) * 2016-04-25 2018-12-21 大陆汽车有限公司 For determining the method and battery sensor of load current
US10473724B2 (en) 2016-04-25 2019-11-12 Continental Automotive Gmbh Method for determining a load current and battery sensor
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