JPS62167396U - - Google Patents

Info

Publication number
JPS62167396U
JPS62167396U JP5488786U JP5488786U JPS62167396U JP S62167396 U JPS62167396 U JP S62167396U JP 5488786 U JP5488786 U JP 5488786U JP 5488786 U JP5488786 U JP 5488786U JP S62167396 U JPS62167396 U JP S62167396U
Authority
JP
Japan
Prior art keywords
heat
ceramic heater
generating resistor
pattern
heat generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5488786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5488786U priority Critical patent/JPS62167396U/ja
Publication of JPS62167396U publication Critical patent/JPS62167396U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)
JP5488786U 1986-04-11 1986-04-11 Pending JPS62167396U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5488786U JPS62167396U (de) 1986-04-11 1986-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5488786U JPS62167396U (de) 1986-04-11 1986-04-11

Publications (1)

Publication Number Publication Date
JPS62167396U true JPS62167396U (de) 1987-10-23

Family

ID=30882287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5488786U Pending JPS62167396U (de) 1986-04-11 1986-04-11

Country Status (1)

Country Link
JP (1) JPS62167396U (de)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11251040A (ja) * 1998-02-27 1999-09-17 Kyocera Corp セラミックヒータ及びその製造方法
JP2000294547A (ja) * 1999-04-07 2000-10-20 Japan Science & Technology Corp 基板加熱装置
WO2000069219A1 (fr) * 1999-05-07 2000-11-16 Ibiden Co., Ltd. Plaque chauffante et son procede de fabrication
WO2001039551A1 (fr) * 1999-11-19 2001-05-31 Ibiden Co., Ltd. Plaque chauffante en ceramique
JP2001223257A (ja) * 2000-02-10 2001-08-17 Ibiden Co Ltd 半導体製造・検査装置用セラミック基板
WO2001063972A1 (fr) * 2000-02-25 2001-08-30 Ibiden Co., Ltd. Substrat en ceramique et son procede de production
JP2001244059A (ja) * 2000-02-28 2001-09-07 Kyocera Corp セラミックヒーター及びこれを用いたウエハ加熱装置
JP2001342071A (ja) * 2000-05-26 2001-12-11 Shin Etsu Chem Co Ltd セラミックスヒータ
JP2006228713A (ja) * 2005-01-20 2006-08-31 Ngk Spark Plug Co Ltd セラミックヒータ、熱交換ユニット、温水洗浄便座、及びセラミックヒータの製造方法
JP2012071440A (ja) * 2010-09-28 2012-04-12 Seiko Epson Corp 液体噴射ヘッド
JP2017041421A (ja) * 2015-08-21 2017-02-23 日本碍子株式会社 セラミックスヒータ，センサ素子及びガスセンサ
US9651517B2 (en) 2014-02-11 2017-05-16 Denso Corporation Ceramic heater and gas sensor element using the same
WO2017159144A1 (ja) * 2016-03-16 2017-09-21 日本特殊陶業株式会社 セラミックヒータ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5038846B1 (de) * 1970-11-25 1975-12-12
JPS57162283A (en) * 1981-03-31 1982-10-06 Ngk Spark Plug Co Panel ceramic heater

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5038846B1 (de) * 1970-11-25 1975-12-12
JPS57162283A (en) * 1981-03-31 1982-10-06 Ngk Spark Plug Co Panel ceramic heater

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11251040A (ja) * 1998-02-27 1999-09-17 Kyocera Corp セラミックヒータ及びその製造方法
JP2000294547A (ja) * 1999-04-07 2000-10-20 Japan Science & Technology Corp 基板加熱装置
US6967313B1 (en) 1999-05-07 2005-11-22 Ibiden Company, Ltd. Hot plate and method of producing the same
WO2000069219A1 (fr) * 1999-05-07 2000-11-16 Ibiden Co., Ltd. Plaque chauffante et son procede de fabrication
WO2001039551A1 (fr) * 1999-11-19 2001-05-31 Ibiden Co., Ltd. Plaque chauffante en ceramique
JP2001223257A (ja) * 2000-02-10 2001-08-17 Ibiden Co Ltd 半導体製造・検査装置用セラミック基板
WO2001063972A1 (fr) * 2000-02-25 2001-08-30 Ibiden Co., Ltd. Substrat en ceramique et son procede de production
JP2001244059A (ja) * 2000-02-28 2001-09-07 Kyocera Corp セラミックヒーター及びこれを用いたウエハ加熱装置
JP2001342071A (ja) * 2000-05-26 2001-12-11 Shin Etsu Chem Co Ltd セラミックスヒータ
JP2006228713A (ja) * 2005-01-20 2006-08-31 Ngk Spark Plug Co Ltd セラミックヒータ、熱交換ユニット、温水洗浄便座、及びセラミックヒータの製造方法
JP2012071440A (ja) * 2010-09-28 2012-04-12 Seiko Epson Corp 液体噴射ヘッド
US9651517B2 (en) 2014-02-11 2017-05-16 Denso Corporation Ceramic heater and gas sensor element using the same
JP2017041421A (ja) * 2015-08-21 2017-02-23 日本碍子株式会社 セラミックスヒータ，センサ素子及びガスセンサ
WO2017159144A1 (ja) * 2016-03-16 2017-09-21 日本特殊陶業株式会社 セラミックヒータ
JPWO2017159144A1 (ja) * 2016-03-16 2018-03-22 日本特殊陶業株式会社 セラミックヒータ
CN108781482A (zh) * 2016-03-16 2018-11-09 日本特殊陶业株式会社 陶瓷加热器

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