JPS62167059U - - Google Patents
Info
- Publication number
- JPS62167059U JPS62167059U JP5564186U JP5564186U JPS62167059U JP S62167059 U JPS62167059 U JP S62167059U JP 5564186 U JP5564186 U JP 5564186U JP 5564186 U JP5564186 U JP 5564186U JP S62167059 U JPS62167059 U JP S62167059U
- Authority
- JP
- Japan
- Prior art keywords
- cold head
- cooling panel
- abutting surfaces
- fixing
- cryopump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5564186U JPH0410523Y2 (enExample) | 1986-04-14 | 1986-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5564186U JPH0410523Y2 (enExample) | 1986-04-14 | 1986-04-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62167059U true JPS62167059U (enExample) | 1987-10-23 |
| JPH0410523Y2 JPH0410523Y2 (enExample) | 1992-03-16 |
Family
ID=30883726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5564186U Expired JPH0410523Y2 (enExample) | 1986-04-14 | 1986-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410523Y2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003075003A (ja) * | 2001-09-04 | 2003-03-12 | Sumitomo Heavy Ind Ltd | 低温装置 |
| JP2020190345A (ja) * | 2019-05-20 | 2020-11-26 | 住友重機械工業株式会社 | 極低温装置およびクライオスタット |
-
1986
- 1986-04-14 JP JP5564186U patent/JPH0410523Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003075003A (ja) * | 2001-09-04 | 2003-03-12 | Sumitomo Heavy Ind Ltd | 低温装置 |
| JP2020190345A (ja) * | 2019-05-20 | 2020-11-26 | 住友重機械工業株式会社 | 極低温装置およびクライオスタット |
| WO2020235555A1 (ja) * | 2019-05-20 | 2020-11-26 | 住友重機械工業株式会社 | 極低温装置およびクライオスタット |
| US11808504B2 (en) | 2019-05-20 | 2023-11-07 | Sumitomo Heavy Industries, Ltd. | Cryogenic device and cryostat |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0410523Y2 (enExample) | 1992-03-16 |