JPS62167059U - - Google Patents
Info
- Publication number
- JPS62167059U JPS62167059U JP5564186U JP5564186U JPS62167059U JP S62167059 U JPS62167059 U JP S62167059U JP 5564186 U JP5564186 U JP 5564186U JP 5564186 U JP5564186 U JP 5564186U JP S62167059 U JPS62167059 U JP S62167059U
- Authority
- JP
- Japan
- Prior art keywords
- cold head
- cooling panel
- abutting surfaces
- fixing
- cryopump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 7
- 230000003993 interaction Effects 0.000 claims 1
- 229910000634 wood's metal Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図はこの考案に係る冷却パネルとコールド
ヘツドの固定構造を示す断面図、第２図は接合部
付近の拡大断面図、第３図は従来の冷却パネルと
コールドヘツドの固定構造を示す断面図である。
１０，１１…冷却パネル、１２…極低温容器、
１５，１６…コールドヘツド、２５，２６，３２
，３３…突き合わせ面、３０…ウツドメタル。
Fig. 1 is a sectional view showing the fixing structure of the cooling panel and cold head according to this invention, Fig. 2 is an enlarged sectional view of the vicinity of the joint, and Fig. 3 is a sectional view showing the conventional fixing structure of the cooling panel and cold head. It is a diagram. 10, 11...Cooling panel, 12...Cryogenic container,
15, 16...cold head, 25, 26, 32
, 33... Butt surface, 30... Wooden metal.
Claims (1)
却パネルを、冷凍機のコールドヘツドに固定する
冷却パネルとコールドヘツドの固定構造において
、 冷却パネルとコールドヘツドとの相互の突き合
わせ面を凹凸状に形成し、各突き合わせ面の間に
介在されたウツドメタルにより、冷却パネルとコ
ールドヘツドとが接合されて成る冷却パネルとコ
ールドヘツドの固定構造。[Scope of Claim for Utility Model Registration] In a structure for fixing a cooling panel housed in a cryogenic container of a cryopump to a cold head of a refrigerator, mutual interaction between the cooling panel and the cold head is provided. A cooling panel and cold head fixing structure in which the abutting surfaces are formed into an uneven shape and the cooling panel and the cold head are joined by wood metal interposed between the abutting surfaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5564186U JPH0410523Y2 (en) | 1986-04-14 | 1986-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5564186U JPH0410523Y2 (en) | 1986-04-14 | 1986-04-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62167059U true JPS62167059U (en) | 1987-10-23 |
| JPH0410523Y2 JPH0410523Y2 (en) | 1992-03-16 |
Family
ID=30883726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5564186U Expired JPH0410523Y2 (en) | 1986-04-14 | 1986-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410523Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003075003A (en) * | 2001-09-04 | 2003-03-12 | Sumitomo Heavy Ind Ltd | Cryogenic apparatus |
| WO2020235555A1 (en) * | 2019-05-20 | 2020-11-26 | 住友重機械工業株式会社 | Cryogenic device and cryostat |
-
1986
- 1986-04-14 JP JP5564186U patent/JPH0410523Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003075003A (en) * | 2001-09-04 | 2003-03-12 | Sumitomo Heavy Ind Ltd | Cryogenic apparatus |
| WO2020235555A1 (en) * | 2019-05-20 | 2020-11-26 | 住友重機械工業株式会社 | Cryogenic device and cryostat |
| JP2020190345A (en) * | 2019-05-20 | 2020-11-26 | 住友重機械工業株式会社 | Cryogenic device and cryostat |
| US11808504B2 (en) | 2019-05-20 | 2023-11-07 | Sumitomo Heavy Industries, Ltd. | Cryogenic device and cryostat |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0410523Y2 (en) | 1992-03-16 |