JPS62167059U - - Google Patents

Info

Publication number
JPS62167059U
JPS62167059U JP5564186U JP5564186U JPS62167059U JP S62167059 U JPS62167059 U JP S62167059U JP 5564186 U JP5564186 U JP 5564186U JP 5564186 U JP5564186 U JP 5564186U JP S62167059 U JPS62167059 U JP S62167059U
Authority
JP
Japan
Prior art keywords
cold head
cooling panel
abutting surfaces
fixing
cryopump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5564186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410523Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5564186U priority Critical patent/JPH0410523Y2/ja
Publication of JPS62167059U publication Critical patent/JPS62167059U/ja
Application granted granted Critical
Publication of JPH0410523Y2 publication Critical patent/JPH0410523Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP5564186U 1986-04-14 1986-04-14 Expired JPH0410523Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5564186U JPH0410523Y2 (enrdf_load_stackoverflow) 1986-04-14 1986-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5564186U JPH0410523Y2 (enrdf_load_stackoverflow) 1986-04-14 1986-04-14

Publications (2)

Publication Number Publication Date
JPS62167059U true JPS62167059U (enrdf_load_stackoverflow) 1987-10-23
JPH0410523Y2 JPH0410523Y2 (enrdf_load_stackoverflow) 1992-03-16

Family

ID=30883726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5564186U Expired JPH0410523Y2 (enrdf_load_stackoverflow) 1986-04-14 1986-04-14

Country Status (1)

Country Link
JP (1) JPH0410523Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003075003A (ja) * 2001-09-04 2003-03-12 Sumitomo Heavy Ind Ltd 低温装置
WO2020235555A1 (ja) * 2019-05-20 2020-11-26 住友重機械工業株式会社 極低温装置およびクライオスタット

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003075003A (ja) * 2001-09-04 2003-03-12 Sumitomo Heavy Ind Ltd 低温装置
WO2020235555A1 (ja) * 2019-05-20 2020-11-26 住友重機械工業株式会社 極低温装置およびクライオスタット
JP2020190345A (ja) * 2019-05-20 2020-11-26 住友重機械工業株式会社 極低温装置およびクライオスタット
US11808504B2 (en) 2019-05-20 2023-11-07 Sumitomo Heavy Industries, Ltd. Cryogenic device and cryostat

Also Published As

Publication number Publication date
JPH0410523Y2 (enrdf_load_stackoverflow) 1992-03-16

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