JPS62166933A - Static pressure fluid bed - Google Patents

Abstract

PURPOSE:To make it possible to enhance the accuracy of slide of a static pressure fluid bed, by providing fluid supply ports opened among a slide rail, a slide bed body and a slide abutting plate so that pressure fluid streams whose flow rates are independently regulated are supplied onto the slide surface of the rail. CONSTITUTION:A slide rail 3 is formed therein with three flow passages 7 with which fluid supply ports 3a, 3b 3c opened to the slide surface of the slide rail 3 are communicated. Pressure fluid from a pressure fluid supply source is fed into gaps among the slide rail 3, a slide bed body 4 and a slide abutting plate 6 through the passages 7 and the fluid supply ports 3a, 3b, 3c. Further, the slide bed body 4 and the slide abutting plate 6 are subjected to the static pressure of the fed pressure fluid and therefore supported being floated from the slide rail 3, thereby it is possible to remarkably reduce the slide resistance thereof.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a hydrostatic fluid slide table used for ultra-precision processing such as mirror finishing of a reflecting mirror.

Prior art> A hydrostatic fluid slide is composed of a slide rail and a slide body that is slidably fitted around the slide rail. The sliding table main body is bloated and supported by the static pressure of the fluid supplied to the fitting gap between the main bodies.

So 1. This hydrostatic fluid slide table is used, for example, in a machine tool for ultra-precision machining, and a tool or workpiece is attached to the slide table body, and the machining accuracy of the machine tool depends on the slide rail and the slide table body. This largely depends on the sliding precision of the slide table body, which is determined by the balance between the amount of fitting gap between the two and the amount of pressure fluid supplied to the fitting gap.

<Problems to be Solved by the Invention> However, in the conventional hydrostatic fluid slide table, the pressure supplied to each fitting gap on each sliding surface between the slide rail and the slide table main body is Fluid 1i) independently 2gI! 1, it was difficult to improve the sliding accuracy of the slide table main body.The present invention was made in view of the above-mentioned conventional problems, and its purpose is to: It is an object of the present invention to provide a hydrostatic fluid slide table which allows easy adjustment of the flow rate of pressure fluid supplied to a gap in a sliding part and improves sliding accuracy.

Means for Solving the Problems> In order to achieve the above object, the present invention comprises a slide rail, an inverted V-shaped slide body that is slidably fitted around the slide rail, and a slide base body that is slidably fitted around the slide rail. In a hydrostatic fluid slide consisting of a slide plate fixed to a slide body, the slide rail or the slide body and the slide plate are provided with the slide rail and the slide plate. The present invention is characterized in that a fluid supply port is provided which opens at each sliding surface between the main body and the sliding contact plate and supplies pressure fluid to each sliding surface whose flow rate is adjusted independently.

Function> Since the pressure fluid whose flow rate is adjusted independently is supplied to each sliding surface of the hydrostatic fluid slide, the sliding accuracy can be improved.

Example of implementation Embodiments of the present invention will be described below based on the accompanying drawings.

FIG. 1 is a longitudinal sectional view of a hydrostatic fluid slide according to the present invention, and FIG.
The figure is a sectional view taken along the line A-A in FIG. 1, and the hydrostatic fluid slide is installed on the mounting base l. That is, a triangular prism-shaped sliding rail 3 is horizontally fixed on the mounting base l by a port 8 via mounting collars 2a and 2b. Furthermore, three channels 7 are formed inside this sliding rail 3.
These flow paths 7 have fluid supply ports 3a and 3b that open to the sliding surface of the slide rail 3.

3c is communicating. The flow path 7 also communicates with a pressure fluid supply source such as a pump (not shown).

A slide base body 4 is slidably fitted to the slide rail 3 so as to surround it. That is, the sliding surfaces 4a and 4b forming an inverted V shape formed on the sliding table main body 4 and the sliding rail 3
and a moving surface forming an inclined surface are fitted with a predetermined gap provided therebetween. And, on the lower surface of the sliding table main body 4,
A flat sliding contact plate 6 has a gap adjustment liner 5a in the middle,
5b, and is fastened by a port 9 with a predetermined gap between the upper surface (sliding surface) 6a of the sliding contact plate 6 and the lower surface (sliding surface) of the sliding rail 3 as shown in the figure. It is installed and fitted.

Pressure fluid is supplied from a pressure fluid supply source (not shown) through the flow path 7 and fluid supply ports 3a, 3b, and 3c to the gap between the slide rail 3, the slide table main body 4, and the slide plate 6. The slide table main body 4 and the slide plate 6 are supported in a floating manner relative to the slide rail 3 under the static pressure of the supplied pressure fluid, and their sliding resistance is significantly reduced. .

When the hydrostatic fluid sliding table is used, for example, in a machine tool, a predetermined tool or workpiece is attached to the Ffj sliding table main body 4. In such a case, the machining accuracy of the machine tool is determined by the balance between the amount of gap between the slide rail 3, the slide table main body 4, and the sliding plate 6, and the amount of pressure fluid supplied to this gap. It depends on the sliding accuracy of the main body 4. However, in this embodiment, since the gap adjusting liners 5a and 5b are interposed between the sliding table main body 4 and the sliding plate 6, the sliding movement can be adjusted by adjusting the thickness of the gap adjusting liners 5a and 5b. The gap between the rail 3, the slide table main body 4, and the sliding plate 6 can be easily and precisely set to a predetermined value, and the sliding accuracy of the slide table main body 4 can be maintained at a high level during machining. The machining accuracy of the machine can be improved. In addition, pressure fluid whose flow rate is adjusted separately is supplied to each gap through fluid supply ports 3a, 3.
b, supplied from 3c. Furthermore, the hydrostatic fluid slide according to this embodiment is particularly applicable to equipment with a small sliding stroke.

3 and 4 show a modified embodiment of the invention, namely:
FIG. 3 is a longitudinal cross-sectional view of a hydrostatic fluid slide according to a modified example;
FIG. 4 is a cross-sectional view taken along line B-Bvi in FIG.
, 6a are provided on the sliding table main body 4, which is the movable side. Since the other configurations are the same as those of the first embodiment, the same effects as those obtained in the first embodiment can be obtained even in this modified embodiment. The hydrostatic fluid slide according to this modified embodiment is particularly applicable to equipment with a long sliding stroke.

<Effects of the Invention> As is clear from the above description, according to the present invention, the flow rate of the pressure fluid supplied to each gap of each sliding part is adjusted independently, so that the static pressure fluid sliding table The sliding accuracy can be improved.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional view of a hydrostatic fluid slide according to the present invention, and FIG.
The figure is a sectional view taken along the line A-A in FIG. 1, FIG. 3 is a longitudinal sectional view of a hydrostatic fluid slide according to a modified embodiment of the present invention, and FIG. 4 is a sectional view taken along the line B-B in FIG. 3. It is. In the drawing, l is the mounting base, 3 is the sliding rail, 3a, 3b, 3c, 4a', 4b', fl
a is the fluid supply port, 4 is the sliding table body, and 5a and 5b are the gap adjustment liners. 6 is a sliding contact plate, and 7 is a flow path.

Claims (1)

[Claims] A static pressure fluid composed of a slide rail, an inverted V-shaped slide body that is slidably fitted to surround the slide rail, and a sliding plate that is fixed to the slide body. On the sliding table,
Openings are provided in each sliding surface between the sliding rail, the sliding table main body, and the sliding plate, and each sliding surface is provided with an opening in the sliding rail, or the sliding table main body, and the sliding plate. A hydrostatic fluid slide, characterized in that it is provided with a fluid supply port that supplies pressure fluid whose flow rate is adjusted independently.