JPS62165849U - - Google Patents
Info
- Publication number
- JPS62165849U JPS62165849U JP1986052529U JP5252986U JPS62165849U JP S62165849 U JPS62165849 U JP S62165849U JP 1986052529 U JP1986052529 U JP 1986052529U JP 5252986 U JP5252986 U JP 5252986U JP S62165849 U JPS62165849 U JP S62165849U
- Authority
- JP
- Japan
- Prior art keywords
- top ring
- pressing surface
- plate
- turntable
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986052529U JPS62165849U (de) | 1986-04-08 | 1986-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986052529U JPS62165849U (de) | 1986-04-08 | 1986-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62165849U true JPS62165849U (de) | 1987-10-21 |
Family
ID=30877775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986052529U Pending JPS62165849U (de) | 1986-04-08 | 1986-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62165849U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000047368A1 (fr) * | 1999-02-12 | 2000-08-17 | Shin-Etsu Handotai Co., Ltd. | Disque de maintien de piece pour polissage, appareil de maintien de piece et procede de polissage de piece |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5444299A (en) * | 1977-09-13 | 1979-04-07 | Uingoo Kk | Grinding method and apparatus |
-
1986
- 1986-04-08 JP JP1986052529U patent/JPS62165849U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5444299A (en) * | 1977-09-13 | 1979-04-07 | Uingoo Kk | Grinding method and apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000047368A1 (fr) * | 1999-02-12 | 2000-08-17 | Shin-Etsu Handotai Co., Ltd. | Disque de maintien de piece pour polissage, appareil de maintien de piece et procede de polissage de piece |
| US6422922B1 (en) | 1999-02-12 | 2002-07-23 | Shin-Etsu Handotai Co., Ltd. | Workpiece holder for polishing, apparatus for polishing workpiece and method for polishing workpiece |