JPS6216520B2 - - Google Patents
Info
- Publication number
- JPS6216520B2 JPS6216520B2 JP52154602A JP15460277A JPS6216520B2 JP S6216520 B2 JPS6216520 B2 JP S6216520B2 JP 52154602 A JP52154602 A JP 52154602A JP 15460277 A JP15460277 A JP 15460277A JP S6216520 B2 JPS6216520 B2 JP S6216520B2
- Authority
- JP
- Japan
- Prior art keywords
- wave
- plate
- phase
- wave beam
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005684 electric field Effects 0.000 claims description 33
- 239000013598 vector Substances 0.000 claims description 27
- 230000010363 phase shift Effects 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 15
- 239000013077 target material Substances 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 239000002245 particle Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000010453 quartz Substances 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21B—FUSION REACTORS
- G21B1/00—Thermonuclear fusion reactors
- G21B1/11—Details
- G21B1/23—Optical systems, e.g. for irradiating targets, for heating plasma or for plasma diagnostics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3083—Birefringent or phase retarding elements
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/16—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using polarising devices, e.g. for obtaining a polarised beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- General Physics & Mathematics (AREA)
- Plasma Technology (AREA)
- Lasers (AREA)
- Optical Elements Other Than Lenses (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7638960A FR2385241A1 (fr) | 1976-12-23 | 1976-12-23 | Convertisseurs de mode de polarisation pour faisceaux laser et generateurs de plasma les utilisant |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5382370A JPS5382370A (en) | 1978-07-20 |
| JPS6216520B2 true JPS6216520B2 (en:Method) | 1987-04-13 |
Family
ID=9181485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15460277A Granted JPS5382370A (en) | 1976-12-23 | 1977-12-23 | Lazer beam guiding mode change and |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4175830A (en:Method) |
| JP (1) | JPS5382370A (en:Method) |
| DE (1) | DE2757263A1 (en:Method) |
| FR (1) | FR2385241A1 (en:Method) |
| GB (1) | GB1592690A (en:Method) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2413678A1 (fr) * | 1977-12-28 | 1979-07-27 | Marie G R P | Convertisseurs de mode d'une onde non confinante en une onde confinante dans l'infrarouge lointain |
| FR2450518A1 (fr) * | 1979-03-02 | 1980-09-26 | Marie G R P | Convertisseur de mode tmo-teo |
| FR2466119A2 (fr) * | 1979-09-26 | 1981-03-27 | France Etat | Laser a rayons x a plasma |
| US4496518A (en) * | 1980-02-27 | 1985-01-29 | Marie G R P | TMO and TEO cavity resonator for projecting plasma confining TEO mode components |
| US4440714A (en) * | 1981-01-29 | 1984-04-03 | The United States Of America As Represented By The United States Department Of Energy | Inertial confinement fusion method producing line source radiation fluence |
| DE3532416A1 (de) * | 1985-09-11 | 1987-03-12 | Diehl Gmbh & Co | Verfahren und einrichtung zur erhoehung der leistungsdichte in einem fokussierten hochenergie-laserstrahl |
| US4740983A (en) * | 1987-08-28 | 1988-04-26 | General Electric Company | Laser apparatus for minimizing wavefront distortion |
| US4849761A (en) * | 1988-05-23 | 1989-07-18 | Datron Systems Inc. | Multi-mode feed system for a monopulse antenna |
| JPH04502061A (ja) * | 1988-12-05 | 1992-04-09 | ユーロピーアン アトミック エナージー コンミュニティ (ユーラトム) | ガウス形分布のミリ波ビームを生ずるアンテナ |
| FR2740898B1 (fr) | 1995-11-06 | 1998-01-30 | Marie G R P | Dispositif provoquant et utilisant la "microfusion" thermonuclaire |
| WO2001048520A1 (en) * | 1999-12-29 | 2001-07-05 | Metrologic Instruments, Inc. | Illumination apparatus with polarizing elements for beam shaping |
| WO2002068918A1 (en) * | 2001-02-23 | 2002-09-06 | Telefonaktiebolaget L.M. Ericsson | Monochromator arrangement |
| DE10148167A1 (de) * | 2001-09-28 | 2003-04-17 | Zeiss Carl Jena Gmbh | Beleuchtungsanordnung |
| KR101532824B1 (ko) | 2003-04-09 | 2015-07-01 | 가부시키가이샤 니콘 | 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
| TWI609409B (zh) | 2003-10-28 | 2017-12-21 | 尼康股份有限公司 | 照明光學裝置、曝光裝置、曝光方法以及元件製造方法 |
| TWI519819B (zh) | 2003-11-20 | 2016-02-01 | 尼康股份有限公司 | 光束變換元件、光學照明裝置、曝光裝置、以及曝光方法 |
| US8279524B2 (en) * | 2004-01-16 | 2012-10-02 | Carl Zeiss Smt Gmbh | Polarization-modulating optical element |
| US20070019179A1 (en) | 2004-01-16 | 2007-01-25 | Damian Fiolka | Polarization-modulating optical element |
| US8270077B2 (en) * | 2004-01-16 | 2012-09-18 | Carl Zeiss Smt Gmbh | Polarization-modulating optical element |
| TWI609410B (zh) | 2004-02-06 | 2017-12-21 | 尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法以及元件製造方法 |
| US7324280B2 (en) * | 2004-05-25 | 2008-01-29 | Asml Holding N.V. | Apparatus for providing a pattern of polarization |
| US7196797B2 (en) * | 2004-05-28 | 2007-03-27 | Agilent Technologies, Inc. | Differential interferometer with improved cyclic nonlinearity |
| US7760431B2 (en) * | 2005-05-05 | 2010-07-20 | Intel Corporation | Method of and apparatus for modifying polarity of light |
| US20080137189A1 (en) * | 2006-12-12 | 2008-06-12 | Northrop Grumman Space & Mission Systems Corporation | Conversion of the polarization of light via a composite half-wave plate |
| US9389519B2 (en) * | 2010-02-25 | 2016-07-12 | Nikon Corporation | Measuring method and measuring apparatus of pupil transmittance distribution, exposure method and exposure apparatus, and device manufacturing method |
| US20110205519A1 (en) * | 2010-02-25 | 2011-08-25 | Nikon Corporation | Polarization converting unit, illumination optical system, exposure apparatus, and device manufacturing method |
| GB2497761A (en) * | 2011-12-20 | 2013-06-26 | Univ Antwerpen | Generation of charged particle vortex waves |
| KR101915139B1 (ko) * | 2012-05-08 | 2018-11-05 | 한국전자통신연구원 | 양성자 빔 발생장치 |
| US9330878B2 (en) * | 2014-06-18 | 2016-05-03 | Los Alamos National Security, Llc. | Electromechanical x-ray generator |
| EP3365721B1 (en) * | 2015-10-19 | 2022-04-27 | Deutsches Krebsforschungszentrum | Chromatic phase plate |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3877789A (en) * | 1972-11-08 | 1975-04-15 | Marie G R P | Mode transformer for light or millimeter electromagnetic waves |
| US3892470A (en) * | 1974-02-01 | 1975-07-01 | Hughes Aircraft Co | Optical device for transforming monochromatic linearly polarized light to ring polarized light |
| US3892469A (en) * | 1974-02-01 | 1975-07-01 | Hughes Aircraft Co | Electro-optical variable focal length lens using optical ring polarizer |
-
1976
- 1976-12-23 FR FR7638960A patent/FR2385241A1/fr active Granted
-
1977
- 1977-12-22 US US05/863,235 patent/US4175830A/en not_active Expired - Lifetime
- 1977-12-22 DE DE19772757263 patent/DE2757263A1/de not_active Withdrawn
- 1977-12-23 GB GB53842/77A patent/GB1592690A/en not_active Expired
- 1977-12-23 JP JP15460277A patent/JPS5382370A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5382370A (en) | 1978-07-20 |
| GB1592690A (en) | 1981-07-08 |
| DE2757263A1 (de) | 1978-06-29 |
| US4175830A (en) | 1979-11-27 |
| FR2385241B1 (en:Method) | 1979-10-12 |
| FR2385241A1 (fr) | 1978-10-20 |
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