JPS62164875A - Continuous film forming device - Google Patents

Abstract

PURPOSE:To simplify the inside of a film forming chamber and to improve the quality of formed films by transferring disks by means of a pair of transfer arms, jigs, jig rotating and holding part and swiveling arm and successively subjecting the disks to a film forming treatment. CONSTITUTION:The disk 28 on the outside of the 1st vacuum chamber 12 is held by the transfer arm 22 of said chamber and is transferred to a disk receiver of the 2nd vacuum chamber 13 via the 1st vacuum chamber 12. The disk 28 is then received by the transfer arm 24 of the 3rd vacuum chamber 14 and is held to the swiveling arm 27 of the film forming chamber 15 via the 3rd vacuum chamber 14. The disk 28 is then held by the jigs 25 of the jig rotating and holding part 26 from the arm 27 and the film formation is executed by a film formation generator 20. The disk 28 subjected to the film formation is again held by the swiveling arm 27 and is transferred to the transfer arm 23 of the 3rd vacuum chamber 14 from which the disk is transferred to the disk receiver of the 2nd vacuum chamber. The disk is held by the transfer arm 21 of the 1st vacuum chamber and is taken out of the chamber via the 1st vacuum chamber 12. The cleaning and maintenance of the film forming chamber are made easy and the film formation of good quality is executed if such operation is continuously made.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a continuous film forming apparatus for forming a film on the surface of a disk serving as a recording medium for electronic equipment.

2. Description of the Related Art A conventional continuous film forming apparatus has vacuum chambers 1, 2, . The film forming chamber 3 and the vacuum chamber 4 are connected via gate valves 5, and the disk 7 is attached to the transport jig 8 from outside the film forming apparatus body 6, and transferred from the vacuum chamber to the film forming chamber by the transport device 9. The disks that have been sequentially transported and have a film formed thereon are transported outside the main body through the vacuum chamber 4, and are manually removed from the transport jig. Note that 10 is a film deposition generator.

Problems to be Solved by the Invention However, with the above configuration, the transport jig from which the disk has been removed from the main body of the film-forming apparatus must be returned to its original position. It requires a lot of work, and if an automatic return device is installed, the device becomes complicated, and the installation space of the equipment becomes large. In addition, the transport jig is used when the film is attached to the film during film formation, and if this returns from the vacuum chamber to the atmosphere, dust is likely to scatter, impairing the quality of the disc film formation. requires cleaning of the transport jig. Furthermore, since the transport drive device is located directly above the film deposition generator 1o in the film forming chamber 3, dust from the film forming process adheres to the transport drive device, and if this peels off and adheres to the disk, it may cause quality deterioration. .

In view of the above-mentioned drawbacks, the present invention simplifies the transport path of the disk, the transport jig is not removed from the film forming apparatus during normal operation, and the continuous film forming method has a configuration that hardly requires cleaning of the jig. It provides equipment.

Means for Solving the Problems The continuous film forming apparatus of the present invention includes a pair of transfer arms that are located in a vacuum chamber adjacent to a film forming chamber and that transfer the disk to the film forming chamber while holding the outer periphery of the disk. It has a jig that is located in the membrane chamber and enters the disk center hole, a jig rotation holding part that holds the upper end of the jig and presses it against the lower surface of the continuously rotating disk, and a receiving part for the lower end of the jig at the tip. It consists of a rotating arm that has the functions of lifting, rotating, and locking the jig receiving part.

action The above device of the present invention has the following effects.

(1) Only the disk enters the vacuum chamber or film-forming chamber from the outside of the film-forming equipment, and there are no transport jigs, etc., so during film-forming in the film-forming chamber, the part where dust adheres is the disk and the jig. Since the dust does not return to the atmosphere, there is no chance of dust falling and scattering, which improves the quality of film formation. At the same time, cleaning the numerous transport jigs and complex transport drive parts in the film formation chamber. will be significantly reduced.

(2) The transport jig does not require any work or equipment to return it to its original location, which reduces the workload and the installation area of the device, reducing the cost of the device.

(3) Since the loading and unloading of disks into the continuous film forming apparatus are close to each other, work efficiency improves when the operator performs the process;
Even if automatic loading and unloading of discs is provided, this problem can be implemented.

EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings. FIG. 1 is a plan view of a continuous film forming apparatus according to an embodiment of the present invention, FIG. 2 is a front view thereof, and FIG. 3 is a detailed view of a film forming chamber. 1, 2, and 3, 11 is the main body of the continuous film forming apparatus, 12, 13.14 are each a vacuum chamber, 15 is a film forming chamber, and 16, 17, 18, 19 are each of the above-mentioned vacuum chambers. , a gate valve that can be opened and closed to connect the film forming chambers, 2o is a film forming generator, and 21 and 22 are a pair of transfer units located in the first vacuum chamber and capable of being transferred to outside the apparatus and to the second vacuum chamber. Arms 23 and 24 are a pair of transfer arms that are located in the third vacuum chamber and can be transferred to the adjacent second vacuum chamber and film forming chamber, 25 is a jig, 26 is a jig rotation holding part, 27 28 is a rotating arm, and 28 is a disk during film formation. 29 is a chuck claw that holds the upper part of the jig; 30 is a shaft that transmits vertical movement from the air cylinder 31 to the chuck claw; 32 is a rotating disk that rotates in contact with the upper surface of the disk; 33 is a pair of motors 34.1 that drive the rotation. Spur gear 35.
36 is the intermediate shaft that transmits information to the rotating disk, 37 is the housing 3
8 is a bearing that supports the rotation of the intermediate shaft, 39 is an upper plate of the film forming chamber, 40 is a jig receiving part that receives and holds the lower part of the jig, 41 is a jig receiving lock, and 42 is a jig. The horizontal connecting shaft, 43, which transmits the motion to the receiving lock, is also a vertical connecting shaft and is driven by the upper air cylinder 44. 46 is a lever that transmits motion from the vertical connecting shaft to the horizontal connecting shaft; 46 is an intermediate shaft that is connected to the swing arm 27 and transmits lifting and turning motions; and motor 47 is responsible for rotational motion.
From spur gear 48.49 to arm 50. It is transmitted to the intermediate shaft via the bottle 61 and arm 62. Further, the lifting and lowering operation is performed from an external drive source (not shown) from the roller 63 to the guide 5.
4 to the intermediate shaft. 55 is a bearing located in the first housing 66 and supports the vertical movement of the intermediate shaft; 57
A bearing is located in the second housing 68 and supports the rotational movement of the first housing, and 69 is a regulating pin that fits into a regulating hole of the arm 5o, is driven by an air cylinder 60, and is guided by a guide 61 for sliding movement. Note that 62 and 63 are disk receivers which are located in the second vacuum chamber and lift and lower the disk to receive it.

The operation of the continuous film forming apparatus configured as above will be explained below.

First, the transfer arm 22 swings out of the first vacuum chamber 12 to set and hold the disk 28! Then, it moves to the first vacuum chamber 12 and the gate pulp 16 is closed. Next, when the degree of vacuum in the first vacuum chamber reaches the same value as the degree of vacuum in the second vacuum chamber 13, the gate pulp 17 opens and the transfer arm 22 holding the disk swings to move the second vacuum chamber 13. The transfer arm 22 is transferred to the disk receiver 63 and transferred to the first vacuum chamber 12.
After returning to normal state, the gate pulp 17 closes. Next, when the degree of vacuum in the second vacuum chamber 13 is raised to the same value as the degree of vacuum in the third vacuum chamber 14, the gate pulp 18 opens and the third vacuum chamber 14
The transfer arm 24 swings to receive the disk from the disk receiver in the second vacuum chamber 13, returns to the third vacuum chamber 14, and the gate pulp 18 is closed for winter. Next, when the degree of vacuum in the third vacuum chamber 14 is raised to the same value as the degree of vacuum in the film forming chamber 16, the gate pulp 19 opens and the transfer arm in the third vacuum chamber 14 swings and moves into the film forming chamber. Swivel arm 2 in
The transfer arm moves upward while holding the locked jig 26 at the tip of the disk, and the jig enters the center hole of the disk to receive it.The transfer arm returns to the original third vacuum chamber and the gate pulp 19 closes. Next, the rotation drive is applied to the rotation arm from the motor 47 to the spur gear 48, the arm 49 from 49, the pin 61, '-Muro 2,
It is transmitted via the intermediate shaft 46, rotated at a certain angle, and moved below the jig rotation holding section 26, which is provided above the film forming source 20. Next, the roller 53 is moved up and down from an external drive source, and the swing lever 27 is moved up and down via the guide 64 and the intermediate shaft 46, and the jig protruding upward from the center hole of the disk is rotated in a rotating circle. After being raised to be inserted into the plate 32, a clamping action is transmitted to the chuck claw 29 via the shaft 30 by the drive of the air cylinder 31, holding the jig, and then pulling it up further to press the disk against the rotating disk. . There, the swing arm descends, swings, and returns to its original position. The disk and the jig held in the jig rotation holding part are rotated by the motor 34 via the spur gears 35 and 36 and the intermediate shaft 33 to the jig rotation holding part to form a film by the film formation source below. The film is continuously rotated until a certain film formation condition is reached, and the film is deposited on the disk.When the film formation is completed, the rotation stops and the rotating arm, which had returned to its original position, is placed under the jig rotation holder. After the lower part of the jig is received by the jig receiving part 40 and the lock 41 is activated, the chuck claw 29 is opened and the swing arm is lowered to receive the disk received by the jig. Next, the swing arm rotates at a certain angle to the next position, comes to the transfer arm 23 that has oscillatedly moved from the third vacuum chamber into the film forming chamber, stops, and descends, leaving only the disk on the transfer arm 23. The jig is transferred while holding the outer periphery, and the jig remains held at the tip of the rotating arm. Next, the transfer arm moves to the third vacuum chamber while holding the transferred disk, the gate pulp 19 closes, and from then on the disk and transfer arm move in the opposite direction to the one used to supply the disk to the film forming chamber. This process is repeated, and the disk is transferred to the disk receiver 62 and the transfer arm 21, and then taken out of the film forming apparatus. Meanwhile, the rotating arm returns to its original position while holding the jig at its tip, and then repeats the same operation as before to rotate the transfer arm from the third vacuum chamber to the film forming chamber. It stops at the position it came from, rises, and receives the next disc via the jig.

Effects of the Invention As described above, the present invention includes a pair of transfer arms, a jig,
Providing a rotating jig holding part and a rotating arm simplifies the conveyance path for the disk, and since no conveyance jig is used, only one jig is used inside the film deposition chamber, cleaning of the jig is almost unnecessary. In addition, since there are no transport moving parts in the deposition chamber, cleaning and maintenance of the deposition chamber is easy, and the quality of the deposition can be greatly improved, which has a great practical effect. There is something.

[Brief explanation of drawings]

FIG. 1 is a plan sectional view of a continuous film forming apparatus in an actual embodiment of the present invention, FIG. 2 is a front sectional view thereof, FIG. 3 is a detailed front sectional view of a film forming chamber, and FIG. 4 is a conventional continuous film forming apparatus. FIG. 3 is a front sectional view of the membrane device. 15... Film formation chamber, 21.22, 23.24...
...Transfer arm, 26...Jig, 26...
...Jig rotation holding part, 27...Swivel arm. Name of agent: Patent attorney Toshio Nakao and one other IJ
---A, job τ 27--Lower 4 on the right @2 Figure 4

Claims (1)

[Claims] In an apparatus in which a plurality of vacuum chambers are connected via gate valves and disks are sequentially delivered by a transfer arm provided in the vacuum chamber, the outer periphery of the disk is held in the vacuum chamber in front of the film forming chamber and transferred to the film forming chamber. A pair of transfer arms that transfer up to
A jig located in the film forming chamber that enters the center hole of the disk and holds the inner periphery of the lower surface of the disk, and a jig located above the film forming generator that holds the upper end of the jig and pulls up to continuously rotate the disk. The tip has a jig rotation holding part that presses against the lower surface of the disk, and a jig receiving part that holds the lower end of the jig, and has two points at which the disk is transferred from the pair of transfer arms and the jig rotation. A continuous film forming apparatus equipped with a rotating arm that moves up and down and rotates to and from a holding part, and has a jig receiving part locking function.