JPS6216451U - - Google Patents

Info

Publication number
JPS6216451U
JPS6216451U JP10691285U JP10691285U JPS6216451U JP S6216451 U JPS6216451 U JP S6216451U JP 10691285 U JP10691285 U JP 10691285U JP 10691285 U JP10691285 U JP 10691285U JP S6216451 U JPS6216451 U JP S6216451U
Authority
JP
Japan
Prior art keywords
chamber
gas
cylinder
slits
partitioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10691285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10691285U priority Critical patent/JPS6216451U/ja
Publication of JPS6216451U publication Critical patent/JPS6216451U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Alarm Systems (AREA)
JP10691285U 1985-07-15 1985-07-15 Pending JPS6216451U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10691285U JPS6216451U (enrdf_load_stackoverflow) 1985-07-15 1985-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10691285U JPS6216451U (enrdf_load_stackoverflow) 1985-07-15 1985-07-15

Publications (1)

Publication Number Publication Date
JPS6216451U true JPS6216451U (enrdf_load_stackoverflow) 1987-01-31

Family

ID=30982707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10691285U Pending JPS6216451U (enrdf_load_stackoverflow) 1985-07-15 1985-07-15

Country Status (1)

Country Link
JP (1) JPS6216451U (enrdf_load_stackoverflow)

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