JPS62164347U - - Google Patents

Info

Publication number
JPS62164347U
JPS62164347U JP1986052919U JP5291986U JPS62164347U JP S62164347 U JPS62164347 U JP S62164347U JP 1986052919 U JP1986052919 U JP 1986052919U JP 5291986 U JP5291986 U JP 5291986U JP S62164347 U JPS62164347 U JP S62164347U
Authority
JP
Japan
Prior art keywords
cleaning liquid
support shaft
passage
liquid injection
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986052919U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334750Y2 (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986052919U priority Critical patent/JPH0334750Y2/ja
Publication of JPS62164347U publication Critical patent/JPS62164347U/ja
Application granted granted Critical
Publication of JPH0334750Y2 publication Critical patent/JPH0334750Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1986052919U 1986-04-09 1986-04-09 Expired JPH0334750Y2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986052919U JPH0334750Y2 (US20090163788A1-20090625-C00002.png) 1986-04-09 1986-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986052919U JPH0334750Y2 (US20090163788A1-20090625-C00002.png) 1986-04-09 1986-04-09

Publications (2)

Publication Number Publication Date
JPS62164347U true JPS62164347U (US20090163788A1-20090625-C00002.png) 1987-10-19
JPH0334750Y2 JPH0334750Y2 (US20090163788A1-20090625-C00002.png) 1991-07-23

Family

ID=30878511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986052919U Expired JPH0334750Y2 (US20090163788A1-20090625-C00002.png) 1986-04-09 1986-04-09

Country Status (1)

Country Link
JP (1) JPH0334750Y2 (US20090163788A1-20090625-C00002.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009194167A (ja) * 2008-02-14 2009-08-27 Tokyo Electron Ltd 液処理装置
JP2012169572A (ja) * 2011-02-17 2012-09-06 Tokyo Electron Ltd 基板洗浄装置
JP2016111302A (ja) * 2014-12-10 2016-06-20 株式会社Screenホールディングス 基板処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009194167A (ja) * 2008-02-14 2009-08-27 Tokyo Electron Ltd 液処理装置
JP2012169572A (ja) * 2011-02-17 2012-09-06 Tokyo Electron Ltd 基板洗浄装置
JP2016111302A (ja) * 2014-12-10 2016-06-20 株式会社Screenホールディングス 基板処理装置

Also Published As

Publication number Publication date
JPH0334750Y2 (US20090163788A1-20090625-C00002.png) 1991-07-23

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