JPS62163937U - - Google Patents
Info
- Publication number
- JPS62163937U JPS62163937U JP1986052087U JP5208786U JPS62163937U JP S62163937 U JPS62163937 U JP S62163937U JP 1986052087 U JP1986052087 U JP 1986052087U JP 5208786 U JP5208786 U JP 5208786U JP S62163937 U JPS62163937 U JP S62163937U
- Authority
- JP
- Japan
- Prior art keywords
- cleaned
- reflecting member
- reflected light
- ultraviolet
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986052087U JPS62163937U (enExample) | 1986-04-09 | 1986-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986052087U JPS62163937U (enExample) | 1986-04-09 | 1986-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62163937U true JPS62163937U (enExample) | 1987-10-17 |
Family
ID=30876942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986052087U Pending JPS62163937U (enExample) | 1986-04-09 | 1986-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62163937U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008053560A (ja) * | 2006-08-25 | 2008-03-06 | Meidensha Corp | 基板の表面処理方法とその装置 |
-
1986
- 1986-04-09 JP JP1986052087U patent/JPS62163937U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008053560A (ja) * | 2006-08-25 | 2008-03-06 | Meidensha Corp | 基板の表面処理方法とその装置 |