JPS62163937U - - Google Patents
Info
- Publication number
- JPS62163937U JPS62163937U JP5208786U JP5208786U JPS62163937U JP S62163937 U JPS62163937 U JP S62163937U JP 5208786 U JP5208786 U JP 5208786U JP 5208786 U JP5208786 U JP 5208786U JP S62163937 U JPS62163937 U JP S62163937U
- Authority
- JP
- Japan
- Prior art keywords
- cleaned
- reflecting member
- reflected light
- ultraviolet
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の一実施例を説明する模式断面
図、第２図は従来例を説明する模式断面図である
。 １１…処理槽、１２…被洗浄体（マスク）、１
３…支持台、１４…紫外線照射手段（低圧水銀灯
）、１５…第１の反射部材、１８…第２の反射部
材。
図、第２図は従来例を説明する模式断面図である
。 １１…処理槽、１２…被洗浄体（マスク）、１
３…支持台、１４…紫外線照射手段（低圧水銀灯
）、１５…第１の反射部材、１８…第２の反射部
材。
Claims (1)
- 処理槽内の被洗浄体を載置する支持台に対応す
る片方のサイドに紫外線照射手段と、反射光を上
記被洗浄体表面に照射する第１の反射部材を配設
すると共に、他のサイドには上記被洗浄体裏面に
反射光を照射する、上記被洗浄体外寸より大きい
第２の反射部材を配設し、酸素を含む雰囲気中で
紫外線洗浄を施すようにした事を特徴とする紫外
線洗浄装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5208786U JPS62163937U (ja) | 1986-04-09 | 1986-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5208786U JPS62163937U (ja) | 1986-04-09 | 1986-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62163937U true JPS62163937U (ja) | 1987-10-17 |
Family
ID=30876942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5208786U Pending JPS62163937U (ja) | 1986-04-09 | 1986-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62163937U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008053560A (ja) * | 2006-08-25 | 2008-03-06 | Meidensha Corp | 基板の表面処理方法とその装置 |
-
1986
- 1986-04-09 JP JP5208786U patent/JPS62163937U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008053560A (ja) * | 2006-08-25 | 2008-03-06 | Meidensha Corp | 基板の表面処理方法とその装置 |