JPS62163930U - - Google Patents
Info
- Publication number
- JPS62163930U JPS62163930U JP5315186U JP5315186U JPS62163930U JP S62163930 U JPS62163930 U JP S62163930U JP 5315186 U JP5315186 U JP 5315186U JP 5315186 U JP5315186 U JP 5315186U JP S62163930 U JPS62163930 U JP S62163930U
- Authority
- JP
- Japan
- Prior art keywords
- cap
- reaction tube
- clevis
- boat
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5315186U JPS62163930U (hu) | 1986-04-08 | 1986-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5315186U JPS62163930U (hu) | 1986-04-08 | 1986-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62163930U true JPS62163930U (hu) | 1987-10-17 |
Family
ID=30878948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5315186U Pending JPS62163930U (hu) | 1986-04-08 | 1986-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62163930U (hu) |
-
1986
- 1986-04-08 JP JP5315186U patent/JPS62163930U/ja active Pending