JPS62163739U - - Google Patents
Info
- Publication number
- JPS62163739U JPS62163739U JP5303486U JP5303486U JPS62163739U JP S62163739 U JPS62163739 U JP S62163739U JP 5303486 U JP5303486 U JP 5303486U JP 5303486 U JP5303486 U JP 5303486U JP S62163739 U JPS62163739 U JP S62163739U
- Authority
- JP
- Japan
- Prior art keywords
- pedestal
- silicon chip
- pressure sensor
- diaphragm
- inner diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5303486U JPS62163739U (enExample) | 1986-04-09 | 1986-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5303486U JPS62163739U (enExample) | 1986-04-09 | 1986-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62163739U true JPS62163739U (enExample) | 1987-10-17 |
Family
ID=30878731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5303486U Pending JPS62163739U (enExample) | 1986-04-09 | 1986-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62163739U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0177935U (enExample) * | 1987-11-12 | 1989-05-25 |
-
1986
- 1986-04-09 JP JP5303486U patent/JPS62163739U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0177935U (enExample) * | 1987-11-12 | 1989-05-25 |