JPS62162854U - - Google Patents
Info
- Publication number
- JPS62162854U JPS62162854U JP5004486U JP5004486U JPS62162854U JP S62162854 U JPS62162854 U JP S62162854U JP 5004486 U JP5004486 U JP 5004486U JP 5004486 U JP5004486 U JP 5004486U JP S62162854 U JPS62162854 U JP S62162854U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- semiconductor
- pressure sensor
- type gauge
- stress generated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5004486U JPS62162854U (un) | 1986-04-03 | 1986-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5004486U JPS62162854U (un) | 1986-04-03 | 1986-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62162854U true JPS62162854U (un) | 1987-10-16 |
Family
ID=30873036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5004486U Pending JPS62162854U (un) | 1986-04-03 | 1986-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62162854U (un) |
-
1986
- 1986-04-03 JP JP5004486U patent/JPS62162854U/ja active Pending