JPS62162835U - - Google Patents
Info
- Publication number
- JPS62162835U JPS62162835U JP5006486U JP5006486U JPS62162835U JP S62162835 U JPS62162835 U JP S62162835U JP 5006486 U JP5006486 U JP 5006486U JP 5006486 U JP5006486 U JP 5006486U JP S62162835 U JPS62162835 U JP S62162835U
- Authority
- JP
- Japan
- Prior art keywords
- furnace core
- core tube
- slope
- varied
- give
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000002791 soaking Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5006486U JPS62162835U (it) | 1986-04-03 | 1986-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5006486U JPS62162835U (it) | 1986-04-03 | 1986-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62162835U true JPS62162835U (it) | 1987-10-16 |
Family
ID=30873075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5006486U Pending JPS62162835U (it) | 1986-04-03 | 1986-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62162835U (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0289826U (it) * | 1988-12-28 | 1990-07-17 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52131454A (en) * | 1976-04-28 | 1977-11-04 | Hitachi Ltd | Thermal treating method of wafer |
| JPS5453961A (en) * | 1977-10-07 | 1979-04-27 | Hitachi Ltd | Heat treatment method of wafer and wafer fastening tool used for it |
-
1986
- 1986-04-03 JP JP5006486U patent/JPS62162835U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52131454A (en) * | 1976-04-28 | 1977-11-04 | Hitachi Ltd | Thermal treating method of wafer |
| JPS5453961A (en) * | 1977-10-07 | 1979-04-27 | Hitachi Ltd | Heat treatment method of wafer and wafer fastening tool used for it |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0289826U (it) * | 1988-12-28 | 1990-07-17 |