JPS62162643U - - Google Patents
Info
- Publication number
- JPS62162643U JPS62162643U JP5048386U JP5048386U JPS62162643U JP S62162643 U JPS62162643 U JP S62162643U JP 5048386 U JP5048386 U JP 5048386U JP 5048386 U JP5048386 U JP 5048386U JP S62162643 U JPS62162643 U JP S62162643U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- thin film
- sensitive thin
- sensitive
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5048386U JPS62162643U (enExample) | 1986-04-04 | 1986-04-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5048386U JPS62162643U (enExample) | 1986-04-04 | 1986-04-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62162643U true JPS62162643U (enExample) | 1987-10-16 |
Family
ID=30873890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5048386U Pending JPS62162643U (enExample) | 1986-04-04 | 1986-04-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62162643U (enExample) |
-
1986
- 1986-04-04 JP JP5048386U patent/JPS62162643U/ja active Pending