JPS62162255U - - Google Patents

Info

Publication number
JPS62162255U
JPS62162255U JP5075386U JP5075386U JPS62162255U JP S62162255 U JPS62162255 U JP S62162255U JP 5075386 U JP5075386 U JP 5075386U JP 5075386 U JP5075386 U JP 5075386U JP S62162255 U JPS62162255 U JP S62162255U
Authority
JP
Japan
Prior art keywords
sputtering
opening
film thickness
shutter
control plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5075386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5075386U priority Critical patent/JPS62162255U/ja
Publication of JPS62162255U publication Critical patent/JPS62162255U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5075386U 1986-04-04 1986-04-04 Pending JPS62162255U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5075386U JPS62162255U (enrdf_load_stackoverflow) 1986-04-04 1986-04-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5075386U JPS62162255U (enrdf_load_stackoverflow) 1986-04-04 1986-04-04

Publications (1)

Publication Number Publication Date
JPS62162255U true JPS62162255U (enrdf_load_stackoverflow) 1987-10-15

Family

ID=30874397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5075386U Pending JPS62162255U (enrdf_load_stackoverflow) 1986-04-04 1986-04-04

Country Status (1)

Country Link
JP (1) JPS62162255U (enrdf_load_stackoverflow)

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