JPS62160455U - - Google Patents
Info
- Publication number
- JPS62160455U JPS62160455U JP4884586U JP4884586U JPS62160455U JP S62160455 U JPS62160455 U JP S62160455U JP 4884586 U JP4884586 U JP 4884586U JP 4884586 U JP4884586 U JP 4884586U JP S62160455 U JPS62160455 U JP S62160455U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample chamber
- gate valve
- charged particle
- particle beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4884586U JPH0548357Y2 (en:Method) | 1986-03-31 | 1986-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4884586U JPH0548357Y2 (en:Method) | 1986-03-31 | 1986-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62160455U true JPS62160455U (en:Method) | 1987-10-12 |
| JPH0548357Y2 JPH0548357Y2 (en:Method) | 1993-12-24 |
Family
ID=30870757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4884586U Expired - Lifetime JPH0548357Y2 (en:Method) | 1986-03-31 | 1986-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0548357Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006123437A1 (ja) * | 2005-05-20 | 2006-11-23 | Advantest Corporation | 荷電粒子ビーム装置、コンタミネ－ションの除去方法及び試料の観察方法 |
-
1986
- 1986-03-31 JP JP4884586U patent/JPH0548357Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006123437A1 (ja) * | 2005-05-20 | 2006-11-23 | Advantest Corporation | 荷電粒子ビーム装置、コンタミネ－ションの除去方法及び試料の観察方法 |
| JPWO2006123437A1 (ja) * | 2005-05-20 | 2008-12-25 | 株式会社アドバンテスト | 荷電粒子ビーム装置、コンタミネーションの除去方法及び試料の観察方法 |
| JP4580982B2 (ja) * | 2005-05-20 | 2010-11-17 | 株式会社アドバンテスト | 荷電粒子ビーム装置、コンタミネーションの除去方法及び試料の観察方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0548357Y2 (en:Method) | 1993-12-24 |