JPS62160082A - Ultrasonic wave motor - Google Patents

Ultrasonic wave motor

Info

Publication number
JPS62160082A
JPS62160082A JP61001105A JP110586A JPS62160082A JP S62160082 A JPS62160082 A JP S62160082A JP 61001105 A JP61001105 A JP 61001105A JP 110586 A JP110586 A JP 110586A JP S62160082 A JPS62160082 A JP S62160082A
Authority
JP
Japan
Prior art keywords
unit
rotor
groove
elastic body
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61001105A
Other languages
Japanese (ja)
Other versions
JPH0710186B2 (en
Inventor
Tadao Takagi
忠雄 高木
Shigemasa Sato
重正 佐藤
Kazuo Hakamata
和男 袴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP61001105A priority Critical patent/JPH0710186B2/en
Publication of JPS62160082A publication Critical patent/JPS62160082A/en
Publication of JPH0710186B2 publication Critical patent/JPH0710186B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To enhance the driving efficiency of an ultrasonic wave motor by providing the groove of a predetermined depth on the pressure contacting surface of an elastic unit to be pressed with a rotor to suppress the difference of a resonance frequency due to the radial position of an elastic unit to the minimum limit. CONSTITUTION:A piezoelectric unit 2 for exciting a circular elastic unit 1 is fixed to the unit 1, and a stator is composed of the unit 1 and the unit 2. A rotor is pressed in contact with the pressure contacting surface 2a of the unit 1 of the stator, and an ultrasonic wave motor is composed of the stator and the rotor. A groove 1b is formed on the pressure contacting surface of the unit 1 to which the rotor is pressed in contact, and the depth of the groove 1b is reduced radially gradually as apart from the axis of the rotating center.

Description

【発明の詳細な説明】 （発明の技術分野） 本発明は、超音波振動を利用した超音波モーターに関す
るものである。　・ （発明の青畳） この種の装置は、本出願人による特開昭５９−２０４４
７６号公報に開示されている。この公報では、超音波モ
ーターの効率の向上を妨げる要因として、弾性体の径位
置による共振周波数の相違を挙げ、第２図のように圧電
体４が固設された弾性体３の厚みを回転中心軸から放射
方向に遠ざかるに連れて増加させることによって、この
不都合を鋳決した。ところが、この解決方法は高い面積
度を要する弾性体とローターとの圧接面３ａが平面形状
なくなる為に、製作上、大変困難になるという欠点を有
していた。DETAILED DESCRIPTION OF THE INVENTION (Technical Field of the Invention) The present invention relates to an ultrasonic motor that utilizes ultrasonic vibrations.・ (Blue Tatami of the Invention) This type of device is disclosed in Japanese Patent Application Laid-Open No. 59-2044 by the present applicant.
It is disclosed in Publication No. 76. This publication cites the difference in resonance frequency depending on the radial position of the elastic body as a factor that hinders the improvement of the efficiency of the ultrasonic motor, and as shown in Figure 2, the thickness of the elastic body 3 on which the piezoelectric body 4 is fixed is rotated. This disadvantage was solved by increasing the distance radially away from the central axis. However, this solution has the disadvantage that the pressure contact surface 3a between the elastic body and the rotor, which requires a high surface area, does not have a planar shape, making it very difficult to manufacture.

（発明の目的） 本発明は、これらの欠点を解決し、高効率でなおかつ製
作が容易な超音波モーターを提供することを目的とする
。(Objective of the Invention) An object of the present invention is to solve these drawbacks and provide an ultrasonic motor that is highly efficient and easy to manufacture.

（発明の概要） 本発明は、超音波モーターにおいて、輪帯状ローターが
圧接される輪帯状弾性体の圧接面に溝部を設け、その溝
部の深きを回転中心軸から放射方向に遠ざかるに連れて
減少させるように構成し、弾性体の径位置による共振周
波数の相違を最小限に抑え、効率を向上させたことを技
術的要点としている。(Summary of the Invention) The present invention provides an ultrasonic motor in which a groove is provided in the pressure contact surface of the ring-shaped elastic body against which the ring-shaped rotor is pressed, and the depth of the groove decreases as it moves away from the central axis of rotation in the radial direction. The technical key point is that the difference in resonance frequency due to the radial position of the elastic body is minimized and efficiency is improved.

（実施例） 第１図（Ａ）及び第１図（Ｂ）は、本発明の実施例であ
って、第１図（Ａ）はステーク−の斜視図、第１図（Ｂ
）は前記ステーターの断面図である。第１図において、
円環状弾性体１には、該弾性体１を励振させる圧電体２
が固設され、この弾′性体１と圧電体２とからステータ
ーが構成されている。このステーターの弾性体１の圧接
面１ａには、不図示のローターが圧接され、このステー
ターとローターとにより超音波モーターが構成されてい
る。不図示のローターが圧接されたステーターの弾性体
１の圧接面１ａには、圧電体２により励振されて表面波
（進行波）が発生し、その表面波によりローターは駆動
される。この弾性体１の圧接面１ａには、溝部１ｂが所
定のピッチで全周に設けられている（第１図（Ａ）は図
を簡略化して全周に設けられている溝部の一部分のみを
描き、他の部分は２点鎖線を用いて示している）。(Example) Figures 1(A) and 1(B) show examples of the present invention, in which Figure 1(A) is a perspective view of a stake, and Figure 1(B) is a perspective view of a stake.
) is a sectional view of the stator. In Figure 1,
The annular elastic body 1 includes a piezoelectric body 2 that excites the elastic body 1.
The elastic body 1 and the piezoelectric body 2 constitute a stator. A rotor (not shown) is pressed against the pressure contact surface 1a of the elastic body 1 of the stator, and the stator and rotor constitute an ultrasonic motor. A surface wave (traveling wave) is generated by the piezoelectric body 2 on the pressure contact surface 1a of the elastic body 1 of the stator, to which a rotor (not shown) is pressed, and the rotor is driven by the surface wave. Grooves 1b are provided on the pressure contact surface 1a of the elastic body 1 all around the circumference at a predetermined pitch (FIG. 1(A) simplifies the diagram and shows only a part of the grooves provided on the entire circumference). (The other parts are shown using two-dot chain lines).

そして、この溝部１ｂの圧接面１ａからの深さは、第１
図（Ｂ）に示すように、回転中心軸０−ｏ′から放射方
向に遠ざかるに連れて減少させである。The depth of this groove portion 1b from the pressure contact surface 1a is the first depth.
As shown in Figure (B), it decreases as it moves away from the rotation center axis 0-o' in the radial direction.

特開昭５９−２０４４７６号公報Ｇこ開示されている如
く、ステーターの弾性体１に発生する進行波は弾性体１
の圧接面１ａの径位置により進行波の角速度が変化する
ので、その角速度が径位置により変化することのないよ
うに、弾性体１に形成される溝部１ｂの深さを径位置の
遠いほど溝の深さを減じるように形成している。弾性体
１は、径の大きい所はど進行波の波長が長くなるが、溝
部の深さを径位置によって変えたことにより、径の大き
い所はど剛性が増す為に、弾性体１の径位置による共振
周波数の相違を最小に抑えることができる。そして、な
おかつローターとの圧接面１ａは、平面であるため、ラ
ンピング等により容易に高い面精度（この場合は平面度
及び面荒さ）を実現できる。As disclosed in Japanese Unexamined Patent Publication No. 59-204476, the traveling wave generated in the elastic body 1 of the stator is
Since the angular velocity of the traveling wave changes depending on the radial position of the pressure contact surface 1a, the depth of the groove 1b formed in the elastic body 1 is set such that the farther the radial position is, the more the groove 1b is formed in the elastic body 1. The depth is reduced. In the elastic body 1, the wavelength of the traveling wave becomes longer where the diameter is large, but by changing the depth of the groove depending on the radial position, the rigidity increases where the diameter is large, so the diameter of the elastic body 1 is Differences in resonance frequency depending on position can be minimized. Further, since the pressure contact surface 1a with the rotor is a flat surface, high surface accuracy (in this case, flatness and surface roughness) can be easily achieved by ramping or the like.

この溝部１ａの構成は弾性体１の材質、形状等により様
々に変化するので、この溝部１ａの深さの決定に当たっ
ては、例えば構造解析及び実験で求めることにより最適
な深さを選択するようにすればよい。The configuration of this groove 1a varies depending on the material, shape, etc. of the elastic body 1, so when determining the depth of this groove 1a, for example, the optimum depth may be selected by determining it through structural analysis and experiment. do it.

また、この実施例の改良例を説明する。本出願人により
出願された特開昭５９−２０４４８０号公報に開示した
ようなステーターの圧接面に溝を入れることにより、ス
テーターとローターとの加圧接触により発生する付着物
等を排除し耐久性の向上を計った超音波モーターにも適
用できる。すなわち、この超音波モーターにおいて、ス
テーターの圧接面に前述した実施例のように溝部をその
全周に設け、ステーターとローターとの加圧接触により
発生する付着物等の排除を行うように、この溝部を構成
するようにしても良い。Further, an example of improvement of this embodiment will be explained. By forming grooves on the pressure contact surface of the stator as disclosed in Japanese Patent Application Laid-open No. 59-204480 filed by the present applicant, deposits etc. generated due to pressurized contact between the stator and rotor are eliminated and durability is improved. It can also be applied to ultrasonic motors designed to improve That is, in this ultrasonic motor, grooves are provided on the pressure contact surface of the stator all around the circumference as in the above-mentioned embodiment, and this groove is designed to remove deposits generated due to pressurized contact between the stator and rotor. A groove may also be formed.

尚、実施例では、ステーターの圧接面１ａの溝部１ｂの
構成、即ち各溝部の間隔の取り方及び溝部の深さ、幅等
の構成によっては、超音波モーターの駆動源である振動
を複合化したり、また通常の単一の振動としたりするこ
とが簡単にでき、例えば後金共振を用いた超音波モータ
ーとするにはステーターに溝部を等間隔で狭い間隔で多
数構成すれば良（、また華−の振動を用いた超音波モー
ターとするにはステーターに溝部をその各溝部間にある
凸部の剛性が大きくなるような等間隔で構成するば良い
。In the embodiment, depending on the configuration of the grooves 1b of the pressure contact surface 1a of the stator, that is, the configuration of the spacing between the grooves, the depth and width of the grooves, etc., the vibration that is the driving source of the ultrasonic motor may be compounded. For example, to create an ultrasonic motor using rear metal resonance, it is sufficient to construct a stator with a large number of equally spaced and narrowly spaced grooves. In order to obtain an ultrasonic motor using the vibrations of flowers, grooves may be formed in the stator at equal intervals such that the rigidity of the convex portions between the grooves is increased.

（発明の効果） 以上のように本発明によれば、ローターが圧接される弾
性体の圧接面に溝部を設け、その溝部の深さを回転中心
軸から放射方向に遠ざかるに連れて減少させ、弾性体の
径位置による共振周波数の相違を最小限に抑えたことに
より、ローターとの圧接面に困難な加工法を強いること
なく、駆動効率の高いものを得ることができる。(Effects of the Invention) As described above, according to the present invention, a groove is provided in the pressure contact surface of the elastic body against which the rotor is pressed, and the depth of the groove decreases as it moves away from the rotation center axis in the radial direction, By minimizing the difference in resonance frequency depending on the radial position of the elastic body, it is possible to obtain high drive efficiency without requiring difficult machining methods for the pressure contact surface with the rotor.

【図面の簡単な説明】[Brief explanation of drawings]

第１図（Ａ）は本発明による超音波モーターの実施例の
斜視図、第１図（Ｂ）は前記超音波モーターの断面図で
ある。 第２図は従来の超音波モーターの断面図である。 （主要部分の符号の説明） １．３・・弾性体、２．４・・圧電体 １ａ・・圧接面、１ｂ・・溝部FIG. 1(A) is a perspective view of an embodiment of an ultrasonic motor according to the present invention, and FIG. 1(B) is a sectional view of the ultrasonic motor. FIG. 2 is a sectional view of a conventional ultrasonic motor. (Explanation of symbols of main parts) 1.3: Elastic body, 2.4: Piezoelectric body 1a: Pressure contact surface, 1b: Groove

Claims (1)

【特許請求の範囲】[Claims] （１）　輪帯状弾性体と、該弾性体を励振させる圧電体
と、該弾性体に圧接された輪帯状ローターとを有する超
音波モーターにおいて、 前記輪帯状ローターが圧接される前記輪帯状弾性体の圧
接面に溝部を設け、該溝部の深さを回転中心軸から放射
方向に遠ざかるに連れて減少させたことを特徴とする超
音波モーター。(1) An ultrasonic motor having a ring-shaped elastic body, a piezoelectric body that excites the elastic body, and a ring-shaped rotor pressed against the elastic body, wherein the ring-shaped elastic body is pressed against the ring-shaped rotor. An ultrasonic motor characterized in that a groove is provided on the pressure contact surface of the motor, and the depth of the groove decreases as the distance from the central axis of rotation increases in the radial direction.
JP61001105A 1986-01-07 1986-01-07 Ultrasonic motor Expired - Fee Related JPH0710186B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61001105A JPH0710186B2 (en) 1986-01-07 1986-01-07 Ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61001105A JPH0710186B2 (en) 1986-01-07 1986-01-07 Ultrasonic motor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6170866A Division JPH07147787A (en) 1994-07-22 1994-07-22 Ultrasonic motor

Publications (2)

Publication Number Publication Date
JPS62160082A true JPS62160082A (en) 1987-07-16
JPH0710186B2 JPH0710186B2 (en) 1995-02-01

Family

ID=11492199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61001105A Expired - Fee Related JPH0710186B2 (en) 1986-01-07 1986-01-07 Ultrasonic motor

Country Status (1)

Country Link
JP (1) JPH0710186B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5298829A (en) * 1990-02-05 1994-03-29 Canon Kabushiki Kaisha Vibration wave driven motor
JPH07147787A (en) * 1994-07-22 1995-06-06 Nikon Corp Ultrasonic motor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5298829A (en) * 1990-02-05 1994-03-29 Canon Kabushiki Kaisha Vibration wave driven motor
JPH07147787A (en) * 1994-07-22 1995-06-06 Nikon Corp Ultrasonic motor

Also Published As

Publication number Publication date
JPH0710186B2 (en) 1995-02-01

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