JPS62158334A - 開閉装置 - Google Patents

開閉装置

Info

Publication number
JPS62158334A
JPS62158334A JP29881385A JP29881385A JPS62158334A JP S62158334 A JPS62158334 A JP S62158334A JP 29881385 A JP29881385 A JP 29881385A JP 29881385 A JP29881385 A JP 29881385A JP S62158334 A JPS62158334 A JP S62158334A
Authority
JP
Japan
Prior art keywords
opening
furnace
closing
reaction tube
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29881385A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03772B2 (enrdf_load_stackoverflow
Inventor
Seishirou Satou
佐藤　征史郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TERU SAAMUKO KK
Tokyo Electron Sagami Ltd
Original Assignee
TERU SAAMUKO KK
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TERU SAAMUKO KK, Tokyo Electron Sagami Ltd filed Critical TERU SAAMUKO KK
Priority to JP29881385A priority Critical patent/JPS62158334A/ja
Publication of JPS62158334A publication Critical patent/JPS62158334A/ja
Publication of JPH03772B2 publication Critical patent/JPH03772B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Vessels And Lids Thereof (AREA)
  • Transmission Devices (AREA)
JP29881385A 1985-12-28 1985-12-28 開閉装置 Granted JPS62158334A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29881385A JPS62158334A (ja) 1985-12-28 1985-12-28 開閉装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29881385A JPS62158334A (ja) 1985-12-28 1985-12-28 開閉装置

Publications (2)

Publication Number Publication Date
JPS62158334A true JPS62158334A (ja) 1987-07-14
JPH03772B2 JPH03772B2 (enrdf_load_stackoverflow) 1991-01-08

Family

ID=17864553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29881385A Granted JPS62158334A (ja) 1985-12-28 1985-12-28 開閉装置

Country Status (1)

Country Link
JP (1) JPS62158334A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03230092A (ja) * 1990-02-02 1991-10-14 Ngk Insulators Ltd 外部加熱装置
JP2002174562A (ja) * 2000-12-07 2002-06-21 Isao Kikuchi 空気圧機器の検査装置
JP2011091386A (ja) * 2009-09-24 2011-05-06 Semiconductor Energy Lab Co Ltd 熱処理装置、熱処理方法及び半導体装置の作製方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5166507U (enrdf_load_stackoverflow) * 1974-11-18 1976-05-26
JPS5526715A (en) * 1978-08-16 1980-02-26 Kokusai Denshin Denwa Co Ltd <Kdd> Data string rearrangement unit
JPS5674746A (en) * 1979-11-22 1981-06-20 Fuji Electric Co Ltd Data processing unit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5166507U (enrdf_load_stackoverflow) * 1974-11-18 1976-05-26
JPS5526715A (en) * 1978-08-16 1980-02-26 Kokusai Denshin Denwa Co Ltd <Kdd> Data string rearrangement unit
JPS5674746A (en) * 1979-11-22 1981-06-20 Fuji Electric Co Ltd Data processing unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03230092A (ja) * 1990-02-02 1991-10-14 Ngk Insulators Ltd 外部加熱装置
JP2002174562A (ja) * 2000-12-07 2002-06-21 Isao Kikuchi 空気圧機器の検査装置
JP2011091386A (ja) * 2009-09-24 2011-05-06 Semiconductor Energy Lab Co Ltd 熱処理装置、熱処理方法及び半導体装置の作製方法

Also Published As

Publication number Publication date
JPH03772B2 (enrdf_load_stackoverflow) 1991-01-08

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