JPS62157968U - - Google Patents

Info

Publication number

JPS62157968U

JPS62157968U JP4491186U JP4491186U JPS62157968U JP S62157968 U JPS62157968 U JP S62157968U JP 4491186 U JP4491186 U JP 4491186U JP 4491186 U JP4491186 U JP 4491186U JP S62157968 U JPS62157968 U JP S62157968U

Authority

JP

Japan

Prior art keywords

ion

electrode

thin film

irradiate

electrodes

Prior art date

1986-03-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010884 ion-beam technique Methods 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 239000010409 thin film Substances 0.000 claims description 2
• 238000004519 manufacturing process Methods 0.000 claims 1
• 238000007740 vapor deposition Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000005566 electron beam evaporation Methods 0.000 description 1

Cited By (1)