JPS62157840U - - Google Patents
Info
- Publication number
- JPS62157840U JPS62157840U JP4597786U JP4597786U JPS62157840U JP S62157840 U JPS62157840 U JP S62157840U JP 4597786 U JP4597786 U JP 4597786U JP 4597786 U JP4597786 U JP 4597786U JP S62157840 U JPS62157840 U JP S62157840U
- Authority
- JP
- Japan
- Prior art keywords
- metal bellows
- wafer
- suction
- chuck
- suction member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4597786U JPS62157840U (enExample) | 1986-03-28 | 1986-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4597786U JPS62157840U (enExample) | 1986-03-28 | 1986-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62157840U true JPS62157840U (enExample) | 1987-10-07 |
Family
ID=30865211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4597786U Pending JPS62157840U (enExample) | 1986-03-28 | 1986-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62157840U (enExample) |
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1986
- 1986-03-28 JP JP4597786U patent/JPS62157840U/ja active Pending