JPS62157051U - - Google Patents

Info

Publication number
JPS62157051U
JPS62157051U JP4393486U JP4393486U JPS62157051U JP S62157051 U JPS62157051 U JP S62157051U JP 4393486 U JP4393486 U JP 4393486U JP 4393486 U JP4393486 U JP 4393486U JP S62157051 U JPS62157051 U JP S62157051U
Authority
JP
Japan
Prior art keywords
cooling pad
silicone rubber
ion implanter
aluminum foil
platen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4393486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4393486U priority Critical patent/JPS62157051U/ja
Publication of JPS62157051U publication Critical patent/JPS62157051U/ja
Pending legal-status Critical Current

Links

JP4393486U 1986-03-27 1986-03-27 Pending JPS62157051U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4393486U JPS62157051U (enrdf_load_stackoverflow) 1986-03-27 1986-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4393486U JPS62157051U (enrdf_load_stackoverflow) 1986-03-27 1986-03-27

Publications (1)

Publication Number Publication Date
JPS62157051U true JPS62157051U (enrdf_load_stackoverflow) 1987-10-06

Family

ID=30861263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4393486U Pending JPS62157051U (enrdf_load_stackoverflow) 1986-03-27 1986-03-27

Country Status (1)

Country Link
JP (1) JPS62157051U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01244637A (ja) * 1988-03-25 1989-09-29 Bando Chem Ind Ltd 半導体ウエハー固定用マウントテーブル及び半導体ウエハーのダイシング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01244637A (ja) * 1988-03-25 1989-09-29 Bando Chem Ind Ltd 半導体ウエハー固定用マウントテーブル及び半導体ウエハーのダイシング方法

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