JPS62156957U - - Google Patents

Info

Publication number
JPS62156957U
JPS62156957U JP1986044335U JP4433586U JPS62156957U JP S62156957 U JPS62156957 U JP S62156957U JP 1986044335 U JP1986044335 U JP 1986044335U JP 4433586 U JP4433586 U JP 4433586U JP S62156957 U JPS62156957 U JP S62156957U
Authority
JP
Japan
Prior art keywords
sides
adhesive layers
elastic body
plastic film
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986044335U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986044335U priority Critical patent/JPS62156957U/ja
Publication of JPS62156957U publication Critical patent/JPS62156957U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の実例を示す側面図、第２図は
第１図の使用状態を示す側面図である。 １…多孔質弾性体、２，２′…接着剤層、３…
プラスチツクフイルム、４１…カバー。

Claims (1)

    【実用新案登録請求の範囲】
  1. 多孔質弾性体とプラスチツクフイルムとが貼り
    合されてなる支持体の両面に感圧接着剤層が形成
    されていると共に、両面に形成した前記接着剤層
    の接着力が異なることを特徴とするウエハ用回路
    図原板カバーの固定材。
JP1986044335U 1986-03-25 1986-03-25 Pending JPS62156957U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986044335U JPS62156957U (ja) 1986-03-25 1986-03-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986044335U JPS62156957U (ja) 1986-03-25 1986-03-25

Publications (1)

Publication Number Publication Date
JPS62156957U true JPS62156957U (ja) 1987-10-05

Family

ID=30862046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986044335U Pending JPS62156957U (ja) 1986-03-25 1986-03-25

Country Status (1)

Country Link
JP (1) JPS62156957U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010026938A1 (ja) * 2008-09-08 2010-03-11 電気化学工業株式会社 半導体製品の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6075835A (ja) * 1983-10-03 1985-04-30 Hitachi Ltd ペリクル

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6075835A (ja) * 1983-10-03 1985-04-30 Hitachi Ltd ペリクル

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010026938A1 (ja) * 2008-09-08 2010-03-11 電気化学工業株式会社 半導体製品の製造方法
JPWO2010026938A1 (ja) * 2008-09-08 2012-02-02 電気化学工業株式会社 半導体製品の製造方法

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