JPS62156890A - Laser mirror holder - Google Patents

Laser mirror holder

Info

Publication number
JPS62156890A
JPS62156890A JP29688885A JP29688885A JPS62156890A JP S62156890 A JPS62156890 A JP S62156890A JP 29688885 A JP29688885 A JP 29688885A JP 29688885 A JP29688885 A JP 29688885A JP S62156890 A JPS62156890 A JP S62156890A
Authority
JP
Japan
Prior art keywords
laser mirror
laser
mirror holder
mirror
deformation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29688885A
Other languages
Japanese (ja)
Other versions
JP2657374B2 (en
Inventor
Kimiharu Yasui
公治 安井
Masaaki Tanaka
正明 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60296888A priority Critical patent/JP2657374B2/en
Publication of JPS62156890A publication Critical patent/JPS62156890A/en
Application granted granted Critical
Publication of JP2657374B2 publication Critical patent/JP2657374B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0401—Arrangements for thermal management of optical elements being part of laser resonator, e.g. windows, mirrors, lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0407—Liquid cooling, e.g. by water

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)

Abstract

PURPOSE:To reduce the deformation of a substrate and the deformation of a laser mirror by a method wherein a laser mirror holder unit which presses the laser mirror against the substrate which has an aperture on the light path of a laser beam so as to shut the aperture and hold the mirror and the laser mirror holder unit is cooled. CONSTITUTION:A laser mirror 3 is placed so as to shut an aperture 1a of an optical substrate 1 and pressed against a reference plane 2 and held by a laser mirror holder unit 4, screws 6 and springs 5. If water is circulated through a water channel 7, the holder unit 4 is cooled by the water. A part of a laser beam 8 is absorbed as heat while passing through the laser mirror 3 and the heat is transferred from the laser mirror 3 to the reference plane 2 pressed against it and to the cooled holder unit 4 so that the temperature rise of the laser mirror 3 can be suppressed. With this constitution, the temperature difference between the front surface and back surface of the laser mirror 3 is not created so that the deformation of the laser mirror 3 and the deformation of the reference plane 2 can be reduced.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は１例えば高出力レーザ装置などに用いられる
レーザミラーの保持のためのレーザミラーホルダに関す
るものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laser mirror holder for holding a laser mirror used in, for example, a high-power laser device.

〔従来の技術〕[Conventional technology]

第４図（ａ）は例えば実開昭５４−１５９９８３号明細
書に示された従来のレーザミラーホルダの断面図。FIG. 4(a) is a sectional view of a conventional laser mirror holder shown in, for example, Japanese Utility Model Application Publication No. 54-159983.

第４図中）は正面図である。図におりで、（１）は基板
で１例えば光学基板、　　（１ａ）は光学基板（１１に
設けられた開孔で、レーザビームの光路上に配置されて
いる。（２）は光学基板＋１１の表面の基準面、（３）
はレーザミラー、（４１はレーザミラーホルダ本体、　
ｔｏ＋はネジ、（８）はレーザミラー（３）を通過する
レーザビーム、　（Ｉｌ＋はバネ、　ｏｎ、　（至）は
レーザミラー（３）の表面に施されたコーティングであ
る。4) is a front view. In the figure, (1) is a substrate 1, for example, an optical substrate, (1a) is an aperture provided in the optical substrate (11), and is placed on the optical path of the laser beam. (2) is an optical substrate +11 Reference plane of the surface of (3)
is a laser mirror, (41 is a laser mirror holder body,
to+ is a screw, (8) is a laser beam passing through the laser mirror (3), (Il+ is a spring, on, and (to) is a coating applied to the surface of the laser mirror (3).

次に動作について説明する。レーザミラー（３）は光学
基板（１１０開孔（１ａ）をふさぐように配設され。Next, the operation will be explained. The laser mirror (3) is arranged so as to close the opening (1a) of the optical substrate (110).

レーザミラーホルダ本体（４１，ネジ（６）、及びバネ
αＢによって基準面（２１に圧接保持されてｂる。レー
ザビーム（８）のうちの一部はレーザミラー（３）を通
過する際、熱としてレーザミラー（３）に吸収される。The laser mirror holder body (41) is held in pressure contact with the reference surface (21) by the screw (6) and spring αB. A part of the laser beam (8) is heated when passing through the laser mirror (3). The laser beam is absorbed by the laser mirror (3).

この熱はレーザミラー（３）から、これに圧接されて論
る基準面＋２１　Ｋ伝熱され、光学基板（１１に放熱さ
れてレーザミラー（３）の温度上昇は押えられる。This heat is transferred from the laser mirror (3) to the reference plane +21 K by being pressed against it, and is radiated to the optical substrate (11), thereby suppressing the temperature rise of the laser mirror (3).

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

従来のレーザミラーホルダーは以上のように構成されて
いるので、レーザミラー（３）がレーザビーム１８）か
ら吸収した熱が多め時は基準面（２１の湯度変化をもだ
臥す。このため基準１ｆｉ　＋ｚ＋が変形し、レーザミ
ラー（３）の設置誤差を招くという問題点があった。例
えばこのレーザミラー（３）が共振器を構成するミラー
であれば、共振器のアライメントをくずり、レーザ出力
の低下を招く。また、放熱がレーザミラー（３）の片面
からのみ行われるため、レーザミーｊ−＋３＋の前後の
両面に著しい温度分布を生じ。Since the conventional laser mirror holder is constructed as described above, when the laser mirror (3) absorbs a large amount of heat from the laser beam 18), the reference surface (21) struggles to change the hot water temperature. There was a problem in that 1fi +z+ was deformed, leading to an error in the installation of the laser mirror (3). For example, if this laser mirror (3) is a mirror that constitutes a resonator, it would destroy the alignment of the resonator and cause the laser This results in a decrease in output.Furthermore, since heat is radiated only from one side of the laser mirror (3), a significant temperature distribution occurs on both the front and rear surfaces of the laser me j-+3+.

レーザミラー（３）自体の変形を招くなどの問題点があ
った。There were problems such as deformation of the laser mirror (3) itself.

この発明は上記のような問題点を解消するためになされ
たもので、レーザミラーの温度上昇を低下し、基板の変
形を低減し、さらにレーザミラーの変形を低減すること
のできるレーザビームホルダを得ることを目的とする。This invention was made to solve the above problems, and provides a laser beam holder that can reduce the temperature rise of the laser mirror, reduce the deformation of the substrate, and further reduce the deformation of the laser mirror. The purpose is to obtain.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係るレーザミラーホルダは、レーザビームの
光路上に開孔を有する基板に、上記開孔をふさぐように
レーザミラーを圧接保持するレーザミラーホルダ本体、
及びこのレーザミラーホルダ本体を冷却する冷却装置を
備えたものである。The laser mirror holder according to the present invention includes a laser mirror holder main body that holds a laser mirror in pressure contact with a substrate having an aperture on the optical path of the laser beam so as to close the aperture;
The laser mirror holder is also equipped with a cooling device for cooling the main body of the laser mirror holder.

〔作用〕[Effect]

この発明における冷却装置は、レーザミラーホルダ本体
を冷却し、レーザミラーはこの冷却されたホルダ本体に
よって保持されるため、レーザビームの一部を吸収する
ことによる温贋上昇を低下する。The cooling device according to the present invention cools the laser mirror holder body, and the laser mirror is held by the cooled holder body, thereby reducing the temperature increase due to absorption of a portion of the laser beam.

〔実施例〕〔Example〕

以下、この発明の一実施例を図について説明する。第１
図（ａ）はレーザミラーホルダの断面図、（ｂ）は正面
図である。図において、（１１は基板で１例えば光学基
板、（２）は光学基板（１）の表面の基準面、（３）は
レーザミラー、（４）はレーザミラーホルダ本体。An embodiment of the present invention will be described below with reference to the drawings. 1st
Figure (a) is a sectional view of the laser mirror holder, and Figure (b) is a front view. In the figure, (11 is a substrate, for example, an optical substrate, (2) is a reference plane on the surface of the optical substrate (1), (3) is a laser mirror, and (4) is a laser mirror holder main body.

（５）はバネ、（６）はネジ、（）１は冷却装置で１例
えば水路を構成する管、（８）けレーザビーム、　３１
１．　ｃ３３はレーザミ７−＋３１の表面に施されたコ
ーティングであ込。水路（７１はレーザミラーホルダ本
体（４！に１例えば貫通するように設けられ、ホルダ本
体（４）を水により冷却する。(5) is a spring, (6) is a screw, ()1 is a cooling device, for example, a pipe forming a waterway, (8) is a laser beam, 31
1. c33 is a coating applied to the surface of Lasermi 7-+31. The water channel (71) is provided, for example, to penetrate through the laser mirror holder body (4), and cools the holder body (4) with water.

次に動作について説明する。レーザミラー（３１は光学
基板（１１の開孔（１ａ）をふさぐように配設され。Next, the operation will be explained. The laser mirror (31) is arranged so as to close the opening (1a) of the optical substrate (11).

レーザミラーホルダ本体（４）、ネジ（６１１及びバネ
（５）によって基準面Ｃ２１に圧接保持されている。こ
の水路（７）に水を循環させると、ホルダ本体（４１は
水により冷却される。レーザビーム（８１のうちの一部
はレーザミラー（３）を通過する際、熱として吸収され
る。The laser mirror holder body (4) is held in pressure contact with the reference surface C21 by screws (611 and springs (5). When water is circulated through this water channel (7), the holder body (41) is cooled by the water. A portion of the laser beam (81) is absorbed as heat when passing through the laser mirror (3).

この熱はレーザミラー（３）から、これに圧接されて因
る基準面（２）、及び冷却されたホルダ本体（４）に伝
熱し、レーザミラー（３）の温度上昇は押えられる。This heat is transferred from the laser mirror (3) to the reference surface (2) pressed against it and to the cooled holder body (4), thereby suppressing the temperature rise of the laser mirror (3).

例えば高出力ＣＯ２レーザにＰｆ４ｔｍられるＺｎＳθ
を母体とした厚み３Ｈのレーザミラーの場合には１通常
レーザミラー（３１の内伸のコーティングＯ１１は存在
せず、レーザビーム＋８１の吸収のうちの約ＴＯ％は外
側のコーティング（至）によって行なわれる。この外側
のコーティング（至）によってレーザビーム＋８１が吸
収されて発生した熱は、ただちにこのコーティング（至
）と接？！ｌｔしているホルダ本体（４）に伝わる。ホ
ルダ本体（４）は冷却されているため、レーザミラー（
３）の前、後面に温度差をもたらさず、レーザミラー（
３１の変形を低減する。さらに、光学基板の基準面（２
）の温度上昇を防ぐことができ、基準面（２）の変形を
低減する。For example, ZnSθ subjected to Pf4tm by a high-power CO2 laser
In the case of a laser mirror with a thickness of 3H with a base material of The heat generated when the laser beam +81 is absorbed by this outer coating is immediately transferred to the holder body (4) which is in contact with this coating.The holder body (4) Because it is cooled, the laser mirror (
3) without creating a temperature difference between the front and rear surfaces of the laser mirror (
31 deformation is reduced. Furthermore, the reference plane of the optical substrate (2
) can be prevented from increasing in temperature, reducing deformation of the reference surface (2).

なお、上記実施例では、ホルダ本体（４！を冷却するＩ
？即装置は、ホルダ本体（４）内に設けちれた水路（７
１によ＃）構成［て込るが、第２図（ａ）、　（ｂ）に
示すように、水路（７１をホルダ本体（４）に設けられ
たモジュール（９）内を貫通するように構成し、モジュ
ール（９１を介してホルダ本体（４）を冷却するように
してもよい。In addition, in the above embodiment, the I cooling the holder body (4!
? The instant device has a water channel (7) provided in the holder body (4).
As shown in Fig. 2 (a) and (b), the water channel (71) is made to pass through the module (9) provided in the holder body (4). The holder body (4) may be cooled via the module (91).

さらに、第３図（ａ）、Φ）に示すように、ホルダ本体
（４１の周辺にフィンα１を設け、フィンα１単独、も
１（はフィンａ１にファンにより風を吹きつけるように
冷却装置を構成し、空冷によってホルダ本体（４）を冷
却してもより０ また、ホルダ本体（４１は、バネ（５）によりレーザミ
ラー（３）を基板（１）に圧接保持するものを示したが
。Furthermore, as shown in FIG. 3(a), Φ), a fin α1 is provided around the holder body (41), and a cooling device is installed so that the fin α1 alone or the fin α1 (also 1) blows wind onto the fin a1. Even if the holder main body (4) is cooled by air cooling, the holder main body (41) is shown in which the laser mirror (3) is held in pressure contact with the substrate (1) by a spring (5).

これに限るものではなく、バネ（５）と同等の弾性力を
発揮する弾性体であれば、何でもよい。The material is not limited to this, and any elastic material may be used as long as it exhibits an elastic force equivalent to that of the spring (5).

また、レーザミラー（３）とホルダ本体（４１，あるい
はレーザミラー（３）と基進面（２１間には例えば熱伝
導グリス、あるいは熱伝導性ゴム、クールシート等を設
ければ、さらに伝熱効果が増す。In addition, if thermally conductive grease, thermally conductive rubber, cool sheet, etc. are provided between the laser mirror (3) and the holder body (41, or between the laser mirror (3) and the base plane (21), heat transfer can be further improved. The effect increases.

また、ホルダ本体（４）のレーザミラー（３）と接触す
る面やレーザミラー（３）と接触する基準面（２１を鏡
面加工してもよい。Further, the surface of the holder body (4) that contacts the laser mirror (3) and the reference surface (21) that contacts the laser mirror (3) may be mirror-finished.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば、レーザビームの光路
上に開孔を有する基板に、上記開孔をふさぐようにレー
ザミラーを圧接保持するレーザミラーホルダ本体、及び
このレーザミラーホルダ本体を冷却する冷却装置を備え
ることによシ、レーザミラーの温度上昇を低下し、基板
の変形を低減Ｉ、さらにレーザミラーの変形を低減する
ことのできるレーザビームホルダを得られる効果がある
。As described above, according to the present invention, there is provided a laser mirror holder main body that holds a laser mirror in pressure contact with a substrate having an aperture on the optical path of the laser beam so as to close the aperture, and a laser mirror holder main body that is cooled. By providing a cooling device, it is possible to obtain a laser beam holder that can reduce the temperature rise of the laser mirror, reduce the deformation of the substrate, and further reduce the deformation of the laser mirror.

【図面の簡単な説明】[Brief explanation of drawings]

第１　図（ａ）はこの発明の一実施例によるレーザミラ
ーホルダを示す断面図、（ｂ）はその正面図、第２図（
ａ）、　（ｂ）はこの発明の他の実施例によるレーザミ
ラーホルダを示す断面図、及び正面図、第３図０）。 （ｂ）けさちに他の実施例によるレーザミラーホルダを
示す断面図、及び正面図、第４図（＆）、　（１））は
従来のレーザミラーホルダを示す断面図、及び正面図で
ある。 図において、（１）は基板、（３）はレーザミラー、（
４）はレーザミラーホルダ本体、（７）は冷却装置、（
８）はレーザビームである。 なお１図中、同一符号は同一、又は相当部分を示す。FIG. 1(a) is a sectional view showing a laser mirror holder according to an embodiment of the present invention, FIG. 1(b) is a front view thereof, and FIG.
a) and (b) are a sectional view and a front view showing a laser mirror holder according to another embodiment of the present invention, FIG. 30). (b) A cross-sectional view and a front view showing a laser mirror holder according to another embodiment of the present invention, and Figures 4 (&) and (1) are a cross-sectional view and a front view showing a conventional laser mirror holder. . In the figure, (1) is the substrate, (3) is the laser mirror, (
4) is the laser mirror holder body, (7) is the cooling device, (
8) is a laser beam. In addition, in FIG. 1, the same reference numerals indicate the same or equivalent parts.

Claims (4)

【特許請求の範囲】[Claims] （１）レーザビームの光路上に開孔を有する基板に、上
記開孔をふさぐようにレーザミラーを圧接保持するレー
ザミラーホルダ本体、及びこのレーザミラーホルダ本体
を冷却する冷却装置を備えたことを特徴とするレーザミ
ラーホルダ。(1) A substrate having an aperture on the optical path of the laser beam is equipped with a laser mirror holder body that holds a laser mirror under pressure so as to close the aperture, and a cooling device that cools the laser mirror holder body. Features a laser mirror holder. （２）冷却装置は、レーザミラーホルダ本体に設けられ
た管内を水が循環するように構成されていることを特徴
とする特許請求の範囲第１項記載のレーザミラーホルダ
。(2) The laser mirror holder according to claim 1, wherein the cooling device is configured so that water circulates within a tube provided in the laser mirror holder main body. （３）冷却装置は、レーザミラーホルダ本体に設けられ
たフィンにより上記レーザミラーホルダ本体を空冷する
ように構成されていることを特徴とする特許請求の範囲
第１項記載のレーザミラーホルダ。(3) The laser mirror holder according to claim 1, wherein the cooling device is configured to air-cool the laser mirror holder body using fins provided on the laser mirror holder body. （４）レーザミラーは透過型であることを特徴とする特
許請求の範囲第１項ないし第３項のいずれかに記載のレ
ーザミラーホルダ。(4) The laser mirror holder according to any one of claims 1 to 3, wherein the laser mirror is of a transmission type.
JP60296888A 1985-12-28 1985-12-28 Laser mirror holder Expired - Fee Related JP2657374B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60296888A JP2657374B2 (en) 1985-12-28 1985-12-28 Laser mirror holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60296888A JP2657374B2 (en) 1985-12-28 1985-12-28 Laser mirror holder

Publications (2)

Publication Number Publication Date
JPS62156890A true JPS62156890A (en) 1987-07-11
JP2657374B2 JP2657374B2 (en) 1997-09-24

Family

ID=17839458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60296888A Expired - Fee Related JP2657374B2 (en) 1985-12-28 1985-12-28 Laser mirror holder

Country Status (1)

Country Link
JP (1) JP2657374B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01130572U (en) * 1988-02-29 1989-09-05
DE102006055738A1 (en) * 2006-11-25 2008-05-29 Trumpf Laser- Und Systemtechnik Gmbh Method and device for changing the beam diameter of a laser beam passing through an optical element by means of temperature change
JP2010135852A (en) * 2010-03-15 2010-06-17 Mitsubishi Electric Corp Laser oscillator
WO2012026228A1 (en) * 2010-08-27 2012-03-01 Gigaphoton Inc. Window unit, window device, laser apparatus, and extreme ultraviolet light generation system
JP2013115176A (en) * 2011-11-28 2013-06-10 Gigaphoton Inc Holder device, chamber device, and extreme-ultraviolet light generating device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917989A (en) * 1972-06-06 1974-02-16
JPS60178680A (en) * 1984-02-27 1985-09-12 Toshiba Corp Instability type laser device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917989A (en) * 1972-06-06 1974-02-16
JPS60178680A (en) * 1984-02-27 1985-09-12 Toshiba Corp Instability type laser device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01130572U (en) * 1988-02-29 1989-09-05
DE102006055738A1 (en) * 2006-11-25 2008-05-29 Trumpf Laser- Und Systemtechnik Gmbh Method and device for changing the beam diameter of a laser beam passing through an optical element by means of temperature change
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