JPS62156513A - Three-dimensional measuring machine - Google Patents

Abstract

PURPOSE:To accurately move relatively an object to be measured and a detector to the desired positions by adjusting a moving distance with a value of a holding circuit to hold a moving distance command value of an operating device as a set value. CONSTITUTION:A moving direction command and a moving distance command from a pulse generator 28B for an X axis are held in a target value holding circuit 55 as a target value. A speed adjuster 57 discriminates the rotational direction of a pulse motor 11 for the X axis from the target value of the target value holding circuit 55 and sets the moving speed corresponding to the moving distance and gives these rotational direction command, moving distance command and moving command to a comparator 58. The comparator 58 calculates a difference between the moving distance command value and a value of a counter 61 and gives the difference, the rotational direction command and the moving speed command to a driving circuit 53 via a changing-over circuit 52. In this way, the driving circuits 53 rotates and drives the pulse motor 11.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a coordinate measuring machine. In detail, this article relates to a three-dimensional measuring machine that moves the object to be measured and the detector relatively by remote control, and is capable of commanding the relative movement direction and distance in addition to the relative movement direction and speed. Technology and its problems] The object to be measured and the detector are formed to be able to move relative to each other in three-dimensional directions, and based on the relative movement between the two, the amount of relative movement and displacement when both are involved is detected, and this amount of displacement is detected. There are three-dimensional measuring machines that perform predetermined processing on a data processing device to obtain the shape, dimensions, etc. of an object to be measured.

This type of measuring device can be broadly classified according to the above-mentioned relative movement method, that is, the drive method.The manual type, in which a person moves the probe while holding it by hand, and the manual type, in which the relative movement mechanism of each axis is equipped with an electric drive device, There are two types: semi-automatic type, in which the electric drive device is operated by a person, and automatic type, in which the electric drive device is completely automatically driven based on a measurement drive program. Among them,
Automatic types often have semi-automatic functions.

When considering a semi-automatic type, the three-dimensional measuring machine has X,
Since the coordinate concept is introduced and measured from the amount of movement displacement in the Y and Z directions, the operating device should be a so-called joystick type, which commands the movement direction by the inclination direction of the operating rod and the movement speed by the inclination angle. It's convenient.

Conventionally, among the semi-automatic three-dimensional measuring machines of this joytic type, for example, it was used as a detector.

In a coordinate measuring machine that uses a child signal probe and the detector side moves in the three-dimensional direction with respect to the object to be measured, first move the joystick and the operation lever in the direction of movement of the touch signal probe (tilt it). The touch signal probe was moved in the direction of inclination of the operating rod at a speed corresponding to the inclination angle of the operating rod, and when the touch signal probe reached the front of the measurement surface of the object to be measured, the operating rod was returned to the neutral position. Later, a working mode was adopted in which the touch signal probe was brought into contact with the measurement surface of the object to be measured at low speed by tilting the operating rod little by little in the same direction.

However, in today's world where a variety of small and large models are desired, as well as higher speed and higher precision, the conventional joystick type has the following problems. In other words, since it commands the direction and speed at the same time, when the touch signal probe approaches the object to be measured from a distance,
If it continued at high speed, it would not be possible to stop suddenly, and the collision between the two would cause damage to the measuring machine or the object to be measured. In particular, since detectors are sophisticated and expensive, they have a large impact.

(2) On the other hand, in order to avoid the above-mentioned (2), if the vehicle was driven at a low speed from a distance, the measurement efficiency would be extremely poor.

■Therefore, if you want to avoid the inconveniences described in ■ and ■ above, you must drive carefully while always considering the speed and relative positional relationship between the two, but this is an intuitive and experiential matter. Required a high degree of skill. For example, if you stop it before it gets too hot, you will have to make a backward movement and then move it forward again. Since these differ greatly from worker to worker, it has been difficult to standardize the work, and as a result, this has also hindered the spread of this type of measuring device.

■Furthermore, although the amount of displacement of the detector is grasped as an integral value of the velocity diagram, the rise and fall characteristics of the velocity also vary depending on the structure of the movement mechanism of the main body, the type of detector adopted, etc. Not only does the angle of inclination of the rod uniquely determine its speed, but the normally operated rod is tilted in the composite direction of the two plane directions and moved in the X and Y directions at the same time. The handling has become even more complicated, and it has become extremely difficult to operate while solving the above-mentioned problems (1) to (2).

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a three-dimensional measuring machine that solves these problems.

c.Means and actions for solving problems] Therefore,
The present invention is solved by the fact that each of the above problems is solved only with a joystick type that adjusts the direction and speed at the same time, so the moving distance and stopping position are adjusted only secondarily and qualitatively. On the other hand, the slower the interaction between the detector and the object to be measured, the better for measurement accuracy and safety, and it is important to note that this function cannot be lost.
Based on this knowledge, we focused on the technical matters unique to measuring machines, such as the fact that the positioning of NC machine tools is controlled by measuring machines (there is no need to ensure accuracy for positioning on the order of 1 μm). An operating device for simultaneously commanding direction and distance while maintaining functionality is provided, and these are configured to be switchable, thereby dramatically improving measurement efficiency.

Furthermore, the present invention solves the problem when the operating device that generates command signals for the moving direction and moving distance has a joystick type structure.

In other words, if a joystick type structure is used in which the direction of movement is commanded by the direction of inclination of the operating rod, and the distance to be moved is commanded by the angle of inclination, when the operating rod is returned to the neutral position during driving, the movement distance command value changes in the direction of decreasing. It is possible that the feedback signal becomes larger and returns in the opposite direction.

In order to solve this problem, a target value hold circuit is provided to hold the moving distance command value of the operating device, and the moving distance is adjusted using the value of this hold circuit as a set value.

Specifically, the detector is supported by a main body so as to be movable relative to the object to be measured in three-dimensional directions, a drive device that electrically drives the relative movement in at least two plane directions, and a movement direction in the inclination direction of the operating rod. and a joystick that generates a command signal for the movement speed at the tilt angle, and controls the drive device to change the direction and speed to tJ.
, a directional speed adjustment device that adjusts the speed, and data that detects the amount of relative movement displacement between the two when the detector is involved in the object to be measured, and processes this amount of displacement in a predetermined manner to determine the shape, dimensions, etc. of the object to be measured. A processing device, an operating device that generates a command signal for a moving direction and a moving distance when activated, and an operating device for holding a moving distance command value from this operating device as a target value. a target value hold circuit; an initial signal setting circuit that forcibly sets a signal corresponding to the amount of relative movement displacement between the detector and the object to be measured detected from the main body or the drive 'AM as a reference value; and the target value. is set as a set value, and an increase/decrease in a signal corresponding to the relative movement displacement amount from the reference value is used as a feedback signal, and the drive device is controlled to adjust the relative movement direction and distance between the detector and the object to be measured. The present invention is characterized in that it is provided with a directional position adjusting device for adjusting the directional position, and a switching device for selecting either the directional position adjusting device or the directional speed adjusting device and connecting it to the drive device.

C Example] FIG. 1 shows the external appearance of the three-dimensional measuring machine of this embodiment.

In the figure, the measurement target W is i! On the surface plate 1 to be placed,
Round shaft-shaped rails (2A and 2B are supported parallel to each other along the longitudinal direction (Y-axis direction) of the surface plate 1 on both sides thereof, and a feed screw shaft 3 is mounted on the rails on the -side side. It is rotatably supported in parallel with the member 2B.A Y-axis pulse smoke 4 is connected to the feed screw shaft 3.

The support frame 6 that supports the touch signal probe 5 as a detector includes support columns 7A and 7B on both sides and both branches 7A and 7B.
A hook between the upper parts of the crossbeam member 8 is formed into a concave shape. The lower end of one support 7A is slidable relative to the two rail members, and the lower end of the other support 7B is slidable relative to the rail member 2B and threaded relative to the feed screw shaft 3. They are each supported in the same state.

Therefore, when the feed shaft 3 is rotated by the drive of the Y-axis pulse motor 4, the support frame 6 to which the support column 7B is screwed is moved in the Y-axis direction.

A feed screw shaft 9 parallel to the cross beam member 8 is rotatably supported along the width direction (X-axis direction) of the surface plate 1 between the support columns 7A and 7B. A slider 10 slidably provided along the cross beam member 8 is screwed onto the feed shaft 9, and an X-axis peripheral pulse motor 11 fixed to the support column 7B is attached to one end. connected. Therefore, when the feed screw shaft 9 is rotated by the drive of the X-axis circumferential pulse motor 11, the slider 10 screwed therewith is moved in the X-axis direction.

The slider 10 has a Z-axis 13, which is provided with the touch signal probe 5 at its lower end via an X-axis holding block 12, connected to the surface plate 1.
It is supported so as to be movable in the vertical direction (X-axis direction).

Although not shown in the Z-axis holding block 12, there is a Z-axis
A motor is built in to move the shaft 13 in the X-axis direction. Thereby, the touch signal probe 5 as a detector can be moved in three-dimensional directions with respect to the measurement target W, that is, in
It is supported movably in the Y and X axis directions.

Among the moving directions of the seven touch signal probes 5, the touch signal probes 5 are moved in two plane directions, that is, the X-axis direction and the Y-axis direction.
Pulse motors 11 and 4 as driving devices for moving the first joystick 2IA and the second joystick as an operating device
It is designed to be rotated based on commands from the joystick 21B. This pulse motor 11.4
The touch signal probe 5 is moved in a three-dimensional direction by driving the motor that raises and lowers the Z-axis 13, and the touch signal probe 5 is moved in a three-dimensional direction.
When the touch signal probe 5 comes into contact with the touch signal probe 5 , the amount of displacement of the touch signal probe 5 in the three-dimensional direction at that time is detected by a detection device (not shown) and then taken into the data processing device 14 . The data processing device 14 performs predetermined processing on the captured movement displacement amount to obtain the shape, dimensions, etc. of the measurement target object W, and displays this on the display section 15.
to be displayed.

FIGS. 2 and 3 show each joystick 21A,
21B is shown. In the same figure, each of the joysticks 21A and 21B has two rotating arms 23 and 24 in the shape of semicircular rings perpendicular to each other inside a base body 22 and a shaft 25.
．． 26 in mutually orthogonal directions, and can be returned to a neutral position (the position shown in FIG. 3) by a spring (not shown). One rotating arm 23 has a sliding chamber groove 27 formed along the longitudinal direction of its curved surface, and a shaft 25 at one end corresponds to the rotating direction and rotation angle of the rotating arm 23. An X-axis circumferential pulse generator 28 that outputs a pulse signal is connected thereto. The other rotating arm 24 is formed with a sliding guide groove 29 that is perpendicular to the sliding guide groove 27 along the longitudinal direction of its curved surface, and a shaft 26 of the rotating arm 24 is formed on the shaft 26 at one end. A Y-axis circumferential pulse generator 30 is connected to output a pulse signal corresponding to the rotation direction and rotation angle.

These pulse generators 28.30 are arranged such that, in the case of the first joystick 21A, the number of output pulses (command movement speed) per unit time changes in accordance with the rotation angle of each rotation arm 23.24. Furthermore, in the case of the first joystick 21B, the number of output pulses (command movement path M) is configured to change in accordance with the rotation angle of each rotation arm 23, 24. For example, in the X-axis circumferential pulse generator 28 of the first joystick 21A, the number of output pulses per unit time gradually increases in proportion to the angle at which the rotating arm 23 is rotated from the neutral position in the +X or -X direction. It is supposed to be done.

Furthermore, in the X-axis circumferential pulse generator 28 of the second joystick 21B, the number of output pulses gradually increases in proportion to the angle at which the rotating arm 23 is rotated from the neutral position in the +X or -X direction. ing.

The shaft 32 of the operating rod 31 is provided in both sliding guide grooves 27 and 29.
is inserted into the slider. The operating rod 3l is the shaft 32
The lower ends of the shafts 25 and 26 are supported at intersections on the extension lines of the shafts 25 and 26 via spherical bearings 33 so as to be tiltable in any direction. As a result, when the operating rod 31 is tilted in any direction using the spherical bearing 33 as a fulcrum, the rotating arms 23 and 24 are rotated by the inclination direction of the operating rod 31, and as a result, the X-axis pulse generator 28 A pulse signal corresponding to the rotation direction and rotation angle of the rotation arm 23 is output from the Y-axis circumferential pulse generator 30, and a pulse signal corresponding to the rotation direction and rotation angle of the rotation arm 24 is outputted. . Note that only the operating rod 31 on the second joystick 21B side is provided with a changeover switch button 34 at its upper end.

FIG. 4 shows the drive system for the X and Y axes.

In the same figure, the pulse signal (P/S) from the X-axis pulse generator 28A of the first joystick 21A is used as a command signal for the moving direction and speed, and the pulse signal (P/S) from the X-axis pulse generator 28A of the second joystick 21B is The pulse signal (P) from 28B is manually input to the X-axis circumference control circuit 41 as a command signal for the moving direction and moving distance. The X-axis circumference control circuit 41 drives the X-trust pulse motor 11 in the commanded movement direction and at the commanded movement speed in response to the command signals of the movement direction and movement speed, and drives the X-trust pulse motor 11 in response to the command signals of the movement direction and movement distance. The X-trusted pulse motor 11 is driven in the commanded movement direction by the commanded movement distance.

Y-axis circumferential pulse generator 3 of first joystick 21A
The pulse signal (P/S) from 0A is used as a command signal for the moving direction and moving speed, and also as a command signal for the second joystick 2.
The pulse signal from the Y-axis pulse generator 30B of 1B (P
) are manually input to the Y-axis angle:till jn circuit 42 as command signals for the moving direction and moving distance, respectively.

The Y-axis control circuit 42 drives the Y-axis peripheral pulse motor 4 in the commanded movement direction and at the commanded movement speed in response to the command signals for the movement direction and movement speed, and drives the Y-axis peripheral pulse motor 4 in response to the command signals for the movement direction and movement distance. On the other hand, the Y-axis circumferential pulse motor 4 is driven in the commanded movement direction by the commanded movement distance.

FIG. 5 shows the control circuit 41 of the X-credit pulse motor 11. In addition, the control circuit 4 of the Y-axis circumferential pulse motor 4
2 has the same configuration as that in FIG. 5, and therefore will be replaced with the following explanation. In the figure, command signals for the moving direction and moving speed from the X-axis circumferential pulse generator 28A are given to the direction discrimination circuit 5. The direction discrimination circuit 51 determines the direction of the
The drive circuit 5 of the X-credit pulse motor 11 discriminates the rotational direction of the reliable pulse motor 11 and sends the rotation direction command and movement speed command via a switching circuit 52 serving as a switching device.
Give to 3. Here, a directional speed adjustment device 54 is configured by a first joystick 21A including an X-axis circumferential pulse generator 28A (and a Y-axis circumferential pulse generator H30A) and a direction discrimination circuit 51.

The movement direction and movement distance command signals from the X-axis circumferential pulse generator 28B are held as target values in the target value hold circuit 55 when the changeover switch button 34 provided on the second joystick 21B is pressed. Ru. The target value of the target value hold circuit 55 is given to the next directional position adjustment device 56 as a set value.

The direction position adjustment device 56 has a speed adjustment H57 and a comparator 58.
including. The speed regulator 57 is connected to the target value hold circuit 55
Based on the target value held in
, and sets a speed corresponding to the moving distance, and provides these rotational direction commands, moving distance commands, and moving speed commands to the comparator 58. The comparator 58 has
In addition to the command from the speed regulator 57, the counter 61
data are given. The counter 61 is provided with a number 13 of displacement detectors 59 and the like for detecting the amount of displacement of the slider 10 after being waveform-shaped by a waveform shaping circuit 60 . Therefore, the contents of the counter 61 are as follows:
Although the movement displacement amount is 0, when the changeover switch button 34 is pressed, the initial signal setting circuit 62 sets it to the reference value (here, zero).

The comparator 58 uses the shift IJI distance command value of the target value hold circuit 55 as a set value through the speed regulator 57, and uses the reference (increase amount from the direct) of the counter 61 as a feedback signal, and calculates the difference between the two. This difference is given to the drive circuit 53 via the switching circuit 52 along with the circuit direction command and the movement speed command.

The switching circuit 52 selects either the directional speed adjusting device 54 or the directional position adjusting device 56 and switches the driving circuit 5
3, the second joystick 21
The direction position adjustment device 56 is connected to the drive circuit 53 on the condition that the changeover switch 5034 provided at B is pressed. When the directional speed adjusting device 54 is connected, the drive circuit 53 controls the X-credit pulse motor 1 according to the rotational direction command and the moving speed command from the directional speed adjusting device 54.
When the direction position adjustment device 56 is connected, the X-credit pulse motor 11 is driven in accordance with the rotation direction command, movement distance command, and movement speed command from the direction position adjustment device 56.

When the X-trusted pulse motor 11 is driven, the feed screw shaft 9 connected thereto rotates, so that the slider IO screwed onto the feed screw shaft 9 is moved in the X-axis direction.

Next, the operation of this embodiment will be explained.

During measurement, the touch signal probe 5 touches the measurement target W.
When the touch signal probe 5 is located far from the measurement surface, first, the second joystick 21B is used to command the moving direction and moving distance of the touch signal probe 5.

At this time, the movement direction command is applied to the second joystick so as to match the movement direction of the touch signal probe 5.

The operating rod 31 of the sensor 21B may be tilted, but for the movement distance command, roughly measure the distance from the touch signal probe 5 to the front of the measurement surface of the object W to be measured, and then adjust the movement distance according to the measured movement distance data. second joystick 2
Set the inclination angle of the operating rod 31 of 1B.

In the second joystick 21B, after setting the movement direction of the touch signal probe 5 by the inclination direction of the operation rod 31 and setting the movement distance of the touch signal probe 5 by the inclination angle of the operation rod 31, press the changeover switch button 34. , the direction position adjustment device 56 is switched and connected to the drive circuit 53, and the counter 61 is set to zero, and
The movement direction command and movement distance command in the Y-axis direction are each held in target value hold circuits in the control circuits 41 and 42 for each axis.

For example, the moving direction command and moving distance command from the X-axis circumferential pulse generator 28B are held as target values in the target value holding circuit 55. Then, the speed regulator 57 discriminates the rotation direction of the X-credible pulse motor 11 from the target value of the target value hold circuit 55, sets the travel speed corresponding to the travel distance, and sets these rotation direction commands and the travel distance 1.
The command and moving speed command are given to the comparator 58. The comparator 58 determines the difference between the movement distance command value and the value of the counter 61 among these commands, and supplies the difference, the rotation direction command, and the movement speed command to the drive circuit 53 through the switching circuit 52. Thereby, the drive circuit 53 rotationally drives the pulse motor 11 based on the rotation direction command, movement distance command, and movement speed command given.

When the slider 10 moves in the X-axis direction by driving the pulse motor 11, the displacement amount of the slider 10 is detected by the displacement amount detector 59 and then provided to the counter 61 through the waveform shaping circuit 60. Then, the comparator 58 provides the drive circuit 53 with the difference between the movement displacement amount of the counter 61 and the movement distance command value given from the target value hold circuit 55 through the speed regulator 57. At this time, even if the operating rod 31 of the second joystick 21B is returned to the neutral position, the initially set movement distance command value is held in the target value hold circuit 55, so the feed bank signal is larger than the target value. This prevents the slider 10 from returning in the opposite direction. When the value of the counter 61 eventually matches the movement distance command value, the drive circuit 53 stops driving the pulse motor 11. As a result, the slider 10 is moved by a distance corresponding to the movement distance command value and then stopped.

In this way, the touch signal probe 5 is connected to the measurement target W.
After reaching in front of the measurement surface, the first joystick 21A commands the moving direction and speed of the touch signal probe 5, and the touch signal probe 5 is brought into contact with the measurement surface at a low speed.

At this time, for the movement direction command, it is sufficient to tilt the operation rod 31 of the first joystick 21A in the direction that matches the movement direction of the touch signal probe 5, but for the movement speed command, it depends on the inclination angle of the operation rod 31. Set.

As a result, when a moving direction command and a moving speed command are given to the direction discrimination circuit 51 from the X-axis circumference pulse generator 28A, for example, the direction discrimination circuit 51 determines the rotation direction of the X-axis circumference pulse motor 11 from the movement direction 1 instruction. The rotational direction command and the moving speed command are given to the drive circuit 53 via the switching circuit 52. Then, the drive circuit 53 rotates the X-axis circumferential pulse motor 11 in the commanded rotation direction and at the commanded movement speed. When the pulse motor 11 is driven, the slider 10 is moved in the X-axis direction, and the touch signal probe 5
is brought into contact with the measurement surface of the measurement object W.

When the touch signal probe 5 comes into contact with the measurement surface of the object W to be measured, a touch signal from the touch signal probe 5 is provided to the data processing device 14 . Then, data processing W H
14 indicates the amount of movement of the touch signal probe in the three-dimensional direction, that is, the amount of displacement of the slider 10 in the X-axis direction, the amount of displacement of the support frame 6 in the Y-axis direction, and Z! +111
3 in the Z-axis direction, these displacement amounts are processed in a predetermined manner to determine the shape, dimensions, etc. of the object to be measured W, and this is displayed on the display unit 15.

In this way, first, the second joystick 21B moves the touch signal probe 5 to the front of the measurement surface of the measurement object W, and then the first joystick 21
A, the touch signal probe 5 is brought into contact with the measurement surface at low speed, and the amount of displacement in the three-dimensional direction at this time is processed in a predetermined manner to determine the shape, dimensions, etc. of the object W to be measured.

Therefore, according to this embodiment, in addition to the direction and speed adjusting device 54 that commands the moving direction and moving speed, a direction position 2Ii1 adjusting device 56 that commands the moving direction and moving distance is provided, and these are controlled by the switching circuit 52. Since it can be selectively switched, first, the direction and position adjustment device 56 commands the moving direction and moving distance to accurately and quickly move the touch signal probe 5 to the front of the measurement surface of the object W to be measured.
Next, the touch signal probe 5 can be brought into contact with the measurement surface at a low speed while adjusting the moving direction and moving speed by the direction speed adjusting device 54. Therefore, even when the touch signal probe 5 approaches the object W to be measured from a distance, there are no problems of the conventional methods (1) to (4) described above. In other words, the touch signal probe 5 can be accurately moved to a desired position without requiring any skill, efficiently, and without problems such as collision between the two.

Further, a target value hold circuit 55 is provided to hold the movement distance command value set by the second joystick 21B, and the drive is performed based on the difference between this target value and the increase/decrease amount of the counter 61 with respect to the base value. Therefore, even if the operating rod 31 is returned to the neutral position midway, it can be accurately driven to the target value without returning to the neutral position.

Also, as a command means for the direction speed adjustment device 54, a joystick 21 which issues a command for the movement direction according to the inclination direction of the operating rod 31 and a command for the movement speed according to the inclination angle of the inclined rod 31, respectively.
Since A is used, the moving direction and moving speed can be commanded at the same time with one operation, and the moving direction and moving speed of the touch signal probe 5 can be commanded with an extremely simple operation.

Furthermore, since the command speed is configured to increase as the inclination angle of the operating rod 31 increases, the speed can be varied smoothly and easily.

In addition, as the direction and distance command means, the joystick 21B is used, which commands the movement direction by the inclination direction of the operation rod 31, and the movement distance by the inclination angle of the slope rod 31. and can be commanded at the same time, and the Touch No. 13 probe 5 can be accurately moved to a desired position with extremely simple IT operations.

Also, direction position adjustment! Since the A position 56 is provided with a speed adjuster 57 that selects the optimum speed corresponding to the moving distance, the touch signal probe 5 can be moved at the optimum speed corresponding to the moving distance. You can move quickly.

Further, the configuration of the switching circuit 52 is such that the direction position adjustment device 56 is switched and connected to the drive circuit 53 only while the changeover switch 5 port 34 provided on the second joystick 21B is pressed, and the direction and speed adjustment device 56 is normally connected to the drive circuit 53. The device 54 is driven by the circuit 5
3, it is only necessary to press the changeover switch button 34 when operating the second joystick 21B, making the changeover operation simple and easy.

In the above embodiment, the pulse motor 4 is used as the drive device.
, 11 was shown, but 1fJ of each axis system = +h
As the H position, not only a digitally controlled motor but also an analog controlled motor such as a DC servo motor can be used.

FIG. 6 shows an example of a circuit using an analog-controlled motor. This uses a potentiometer 70 in place of the pulse generators 28A, 30A of the first joystick 21A that command the moving direction and moving speed. The potentiometer 70 generates a voltage corresponding to the rotation direction and rotation angle of each rotation arm 23, 24, and the output voltage ■ is applied from the direction discrimination circuit 71 to the drive circuit 73 through the switching circuit 52, while the pulse generator After the pulse signal from 28B is converted into analog No. 13 by the D/A converter 82, it is held in the target value hold circuit 75. The target value of the target value hold circuit 75 is given to the comparator 7 through the speed regulator 77, and then the displacement of the displacement amount detector 59 is determined. jt(
It is provided through a waveform shaping circuit 60, a D/A converter 83, and an initial signal setting circuit 84. ), and the difference is provided to the drive circuit 73 through the switching circuit 52.

In FIG. 6, in addition to this, the rotation speed of the motor 81 is detected by a speed detector 85, and a value obtained by multiplying this by a constant K of a circuit 86 is fed to the drive circuit 73. This has the advantage that the speed of the motor 81 can be controlled accurately.

Furthermore, in each of the above embodiments, an example was shown in which the joystick 21B was used as a command means for direction and distance.
These command means do not necessarily have to be a joystick, but may be any means that can command the moving direction and the moving distance at the same time.

For example, a sphere is provided so as to be rotatable within a predetermined range relative to the base, and the direction of rotation of the sphere is configured to issue a command signal for the movement direction, and the rotation angle of the sphere is configured to issue a command signal for the distance to be moved. It can be anything.

Further, in the switching circuit 52 of the above embodiment, the direction position adjustment device 56 is connected to the drive circuit 53 only when the changeover switch 5134 provided on the second joystick 21B is pressed. The configuration may be reversed, that is, a changeover switch button may be provided only on the first joystick 21A side, and the directional speed adjustment device 54 may be connected to the drive circuit 53 only when this switch button is pressed. In this case, it is necessary to separately provide a switch or the like on the second joystick 21B side to issue a hold command signal to the target value hold circuit 55.75 and a reset signal to the initial signal setting circuit 62.84.

Further, the switching operation command for the switching circuit 52 is not limited to one switch 34. Normally, when a joystick is released, the operating lever returns to a neutral position, and in this state, the output is zero.

Therefore, if the operating device of the present invention is configured so that it returns to the neutral position when the hand is released and the output is zero, the switching circuit 52 automatically switches to the directional speed adjusting device 54 when the output is generated. Alternatively, the directional position adjustment device 56 can be switched to be coupled to the drive circuit 53.

Further, in the above embodiment, a type of coordinate measuring machine in which the touch signal probe 5 moves in a three-dimensional direction with respect to the measurement target object W has been described. In other words, it may be of a type that moves in a direction, as long as the object to be measured and the touch signal probe 5 move in a three-dimensional direction.Furthermore, although the body structure has been described as a semi-automatic type, it may be a fully automatic type (CNC). However, they can be used together.

〔Effect of the invention〕

As described above, according to the present invention, it is possible to accurately move the object to be measured and the detector relative to the desired position without requiring skill, efficiently, and without problems such as contact between the two.
Moreover, there is no problem in operation even when the operating device has a joystick structure.

[Brief explanation of drawings]

Fig. 1 is an overall perspective view showing an embodiment of the present invention, Fig. 2 is a perspective view showing the external appearance of the joystick, Fig. 3 is a perspective view showing the internal structure of the joystick, and Fig. 4 is the overall circuit configuration. FIG. 5 is a block diagram showing the configuration of the X-axis circumference control circuit, and FIG. 6 is a block diagram showing another embodiment of the control circuit. 4... Y-axis circumference pulse motor, 5... Touch signal probe, 11... X-axis circumference pulse motor, 14... Data processing device, 21A, 21B... Joystick,
30... Operating rod, 34... Selector switch button, 52...
...Switching circuit, 53.73...Drive circuit, 54...
Directional speed RI8 adjustment device, 55.75... Target value hold circuit, 56... Directional position adjustment device, 57.77...
・Speed regulator, 62.84...Initial signal setting circuit, W
...Measurement object. Figure 1 Figure 2 Figure 3 Figure 4

Claims (5)

[Claims] (1) A detector supported by a main body so as to be movable relative to the object to be measured in three-dimensional directions, a drive device that electrically drives the relative movement in at least two plane directions, and a direction of movement commanded by an inclination direction of an operating rod. a direction and speed adjustment device that controls the drive device and adjusts the direction and speed, the device including a joystick that generates a signal and a command signal of the movement speed at the inclination angle of the joystick; A coordinate measuring machine that includes a data processing device that detects the amount of relative displacement between the two when the object is moved, and processes this amount of displacement in a predetermined manner to obtain the shape, dimensions, etc. of the object to be measured. an operating device that generates command signals for the moving direction and moving distance; a target value hold circuit for holding the moving distance command value from the operating device as a target value; and the detector detected from the main body or the drive device. an initial signal setting circuit that forcibly sets a signal corresponding to the amount of relative movement displacement between the object and the object to be measured as a reference value; a directional position adjustment device that uses the increase or decrease as a feedback signal to control the drive device to adjust the relative movement direction and distance between the detector and the object to be measured; and the directional position adjustment device and the directional speed adjustment device. A three-dimensional measuring machine, comprising: a switching device for selecting one of the two and connecting it to the drive device. (2) In claim 1, the directional position adjustment device includes a speed regulator that outputs a speed command signal to the drive device in accordance with a movement distance command signal output by the operating device. A three-dimensional measuring machine featuring: (3) In claim 1 or 2, the operating device is configured to generate a command signal for the movement direction in the direction of inclination of the operating rod, and also to generate a command signal for the movement distance in the direction of inclination of the operating rod. A coordinate measuring machine characterized in that it consists of a shaped joystick. (4) In claim 1 or 2, the operating device generates a command signal in the direction of movement of a sphere that is rotatable within a predetermined range with respect to the base body, and A three-dimensional measuring machine characterized in that it is configured to generate a command signal for a moving distance at the rotation angle. (5) In any one of claims 1 to 4, the switching device is configured to control the switching device when a changeover switch button provided on either the joystick or the operating device is pressed. A three-dimensional measuring machine, characterized in that either one of both adjustment devices is connected to the drive device.