JPS62156448U - - Google Patents
Info
- Publication number
- JPS62156448U JPS62156448U JP4437586U JP4437586U JPS62156448U JP S62156448 U JPS62156448 U JP S62156448U JP 4437586 U JP4437586 U JP 4437586U JP 4437586 U JP4437586 U JP 4437586U JP S62156448 U JPS62156448 U JP S62156448U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- rotary
- cutting blade
- grinding machine
- support means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003754 machining Methods 0.000 claims 1
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Description
図は何れも本考案の一実施例を示し、第１図は
、同実施例に係る三軸立型平面研削盤の第３軸回
転砥石の縦断面図、第２図は、同第３軸回転砥石
の底面図、第３図は、前記三軸立型平面研削盤の
概略構成を示す斜視図、第４図は、第３軸回転砥
石による研削状態を説明する要部拡大断面図であ
る。
３：回転テーブル、１３：第１軸回転砥石、２
３：第２軸回転砥石、３３：第３軸回転砥石、３
６：外周側回転砥石、３９：内周側回転砥石、４
６：切込量調整ボルト、Ｗ……Ｗ：ウエハ、Ｓ０
，Ｓ１，Ｓ２：加工面。
Each figure shows an embodiment of the present invention, and FIG. 1 is a vertical cross-sectional view of the third-axis rotary grindstone of a three-axis vertical surface grinder according to the same embodiment, and FIG. A bottom view of the rotary grindstone, FIG. 3 is a perspective view showing the schematic configuration of the three-axis vertical surface grinder, and FIG. 4 is an enlarged cross-sectional view of the main part illustrating the grinding state by the third-axis rotary grindstone. . 3: Rotating table, 13: First axis rotating grindstone, 2
3: 2nd axis rotating grindstone, 33: 3rd axis rotating grindstone, 3
6: Outer rotating grindstone, 39: Inner rotating grindstone, 4
6: Cutting depth adjustment bolt, W...W: Wafer, S0
, S1, S2: processed surface.
Claims (1)
ク支持手段に支持されるワークの加工面と対峙し
て設けられる１又は２以上の回転砥石を備えてな
る平面研削盤において、 前記回転砥石のうち少なくとも一つは、複数の
端面切刃回転砥石を同心状に組合わせてなる組合
わせ回転砥石とし、これら端面切刃回転砥石のワ
ーク加工面に対する切込量を独立に調整可能とす
る切込量調整手段を設けたことを特徴とする平面
研削盤。[Claims for Utility Model Registration] In a surface grinding machine comprising a workpiece support means for supporting a workpiece, and one or more rotating grindstones provided facing the machining surface of the workpiece supported by the workpiece support means. , at least one of the rotary grindstones is a combination rotary whetstone formed by concentrically combining a plurality of end face cutting blade rotary whetstones, and the amount of cut of these end face cutting blade rotary whetstones into the workpiece processing surface is independently adjusted. A surface grinding machine characterized by being provided with a depth of cut adjustment means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4437586U JPS62156448U (en) | 1986-03-25 | 1986-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4437586U JPS62156448U (en) | 1986-03-25 | 1986-03-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62156448U true JPS62156448U (en) | 1987-10-05 |
Family
ID=30862125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4437586U Pending JPS62156448U (en) | 1986-03-25 | 1986-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62156448U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012187655A (en) * | 2011-03-09 | 2012-10-04 | Disco Corp | Grinding apparatus |
-
1986
- 1986-03-25 JP JP4437586U patent/JPS62156448U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012187655A (en) * | 2011-03-09 | 2012-10-04 | Disco Corp | Grinding apparatus |