JPS62156425U - - Google Patents
Info
- Publication number
- JPS62156425U JPS62156425U JP4599186U JP4599186U JPS62156425U JP S62156425 U JPS62156425 U JP S62156425U JP 4599186 U JP4599186 U JP 4599186U JP 4599186 U JP4599186 U JP 4599186U JP S62156425 U JPS62156425 U JP S62156425U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- surface plate
- movable
- movable guides
- stage section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4599186U JPS62156425U (enExample) | 1986-03-27 | 1986-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4599186U JPS62156425U (enExample) | 1986-03-27 | 1986-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62156425U true JPS62156425U (enExample) | 1987-10-05 |
Family
ID=30865240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4599186U Pending JPS62156425U (enExample) | 1986-03-27 | 1986-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62156425U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0530547U (ja) * | 1991-09-30 | 1993-04-23 | 京セラ株式会社 | Ｘ−ｙテーブル |
| JP2006309654A (ja) * | 2005-05-02 | 2006-11-09 | Psc Kk | 気体制御回転移動装置及び気体制御アクチュエータ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5617341A (en) * | 1979-07-23 | 1981-02-19 | Nippon Telegr & Teleph Corp <Ntt> | Alignment stage for step and repeat exposure |
| JPS6039044A (ja) * | 1983-08-09 | 1985-02-28 | Citizen Watch Co Ltd | 微細送り機構を備えたｘｙテ−ブル |
-
1986
- 1986-03-27 JP JP4599186U patent/JPS62156425U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5617341A (en) * | 1979-07-23 | 1981-02-19 | Nippon Telegr & Teleph Corp <Ntt> | Alignment stage for step and repeat exposure |
| JPS6039044A (ja) * | 1983-08-09 | 1985-02-28 | Citizen Watch Co Ltd | 微細送り機構を備えたｘｙテ−ブル |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0530547U (ja) * | 1991-09-30 | 1993-04-23 | 京セラ株式会社 | Ｘ−ｙテーブル |
| JP2006309654A (ja) * | 2005-05-02 | 2006-11-09 | Psc Kk | 気体制御回転移動装置及び気体制御アクチュエータ |