JPS61186829U - - Google Patents
Info
- Publication number
- JPS61186829U JPS61186829U JP6987085U JP6987085U JPS61186829U JP S61186829 U JPS61186829 U JP S61186829U JP 6987085 U JP6987085 U JP 6987085U JP 6987085 U JP6987085 U JP 6987085U JP S61186829 U JPS61186829 U JP S61186829U
- Authority
- JP
- Japan
- Prior art keywords
- guide surface
- stage
- air
- bearing guide
- control means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6987085U JPS61186829U (enExample) | 1985-05-10 | 1985-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6987085U JPS61186829U (enExample) | 1985-05-10 | 1985-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61186829U true JPS61186829U (enExample) | 1986-11-21 |
Family
ID=30605949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6987085U Pending JPS61186829U (enExample) | 1985-05-10 | 1985-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61186829U (enExample) |
-
1985
- 1985-05-10 JP JP6987085U patent/JPS61186829U/ja active Pending