JPS62154649U - - Google Patents
Info
- Publication number
- JPS62154649U JPS62154649U JP4326886U JP4326886U JPS62154649U JP S62154649 U JPS62154649 U JP S62154649U JP 4326886 U JP4326886 U JP 4326886U JP 4326886 U JP4326886 U JP 4326886U JP S62154649 U JPS62154649 U JP S62154649U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer carrier
- aligner
- guides
- open end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4326886U JPS62154649U (enExample) | 1986-03-24 | 1986-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4326886U JPS62154649U (enExample) | 1986-03-24 | 1986-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62154649U true JPS62154649U (enExample) | 1987-10-01 |
Family
ID=30859966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4326886U Pending JPS62154649U (enExample) | 1986-03-24 | 1986-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62154649U (enExample) |
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1986
- 1986-03-24 JP JP4326886U patent/JPS62154649U/ja active Pending