JPS62154649U - - Google Patents

Info

Publication number
JPS62154649U
JPS62154649U JP4326886U JP4326886U JPS62154649U JP S62154649 U JPS62154649 U JP S62154649U JP 4326886 U JP4326886 U JP 4326886U JP 4326886 U JP4326886 U JP 4326886U JP S62154649 U JPS62154649 U JP S62154649U
Authority
JP
Japan
Prior art keywords
wafer
wafer carrier
aligner
guides
open end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4326886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4326886U priority Critical patent/JPS62154649U/ja
Publication of JPS62154649U publication Critical patent/JPS62154649U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP4326886U 1986-03-24 1986-03-24 Pending JPS62154649U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4326886U JPS62154649U (enrdf_load_stackoverflow) 1986-03-24 1986-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4326886U JPS62154649U (enrdf_load_stackoverflow) 1986-03-24 1986-03-24

Publications (1)

Publication Number Publication Date
JPS62154649U true JPS62154649U (enrdf_load_stackoverflow) 1987-10-01

Family

ID=30859966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4326886U Pending JPS62154649U (enrdf_load_stackoverflow) 1986-03-24 1986-03-24

Country Status (1)

Country Link
JP (1) JPS62154649U (enrdf_load_stackoverflow)

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