JPS62154648U - - Google Patents

Info

Publication number
JPS62154648U
JPS62154648U JP4239386U JP4239386U JPS62154648U JP S62154648 U JPS62154648 U JP S62154648U JP 4239386 U JP4239386 U JP 4239386U JP 4239386 U JP4239386 U JP 4239386U JP S62154648 U JPS62154648 U JP S62154648U
Authority
JP
Japan
Prior art keywords
vacuum chuck
groove
groove along
outer periphery
plate body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4239386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH019169Y2 (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4239386U priority Critical patent/JPH019169Y2/ja
Publication of JPS62154648U publication Critical patent/JPS62154648U/ja
Application granted granted Critical
Publication of JPH019169Y2 publication Critical patent/JPH019169Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Registering Or Overturning Sheets (AREA)
JP4239386U 1986-03-25 1986-03-25 Expired JPH019169Y2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4239386U JPH019169Y2 (US20090163788A1-20090625-C00002.png) 1986-03-25 1986-03-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4239386U JPH019169Y2 (US20090163788A1-20090625-C00002.png) 1986-03-25 1986-03-25

Publications (2)

Publication Number Publication Date
JPS62154648U true JPS62154648U (US20090163788A1-20090625-C00002.png) 1987-10-01
JPH019169Y2 JPH019169Y2 (US20090163788A1-20090625-C00002.png) 1989-03-13

Family

ID=30858258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4239386U Expired JPH019169Y2 (US20090163788A1-20090625-C00002.png) 1986-03-25 1986-03-25

Country Status (1)

Country Link
JP (1) JPH019169Y2 (US20090163788A1-20090625-C00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007067303A (ja) * 2005-09-01 2007-03-15 Tokyo Electron Ltd 基板搬送装置、基板搬送方法及び塗布、現像装置
JP2013131709A (ja) * 2011-12-22 2013-07-04 Disco Abrasive Syst Ltd ウェーハ保持装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007067303A (ja) * 2005-09-01 2007-03-15 Tokyo Electron Ltd 基板搬送装置、基板搬送方法及び塗布、現像装置
JP4616731B2 (ja) * 2005-09-01 2011-01-19 東京エレクトロン株式会社 塗布、現像装置
JP2013131709A (ja) * 2011-12-22 2013-07-04 Disco Abrasive Syst Ltd ウェーハ保持装置

Also Published As

Publication number Publication date
JPH019169Y2 (US20090163788A1-20090625-C00002.png) 1989-03-13

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